臺灣博碩士論文加值系統

本研究以銀奈米粒子修飾氧化鋅奈米柱狀結構製作出氣敏自供電奈米發電機元件為主題，以簡單且低成本之水熱法，對氧化鋅奈米結構進行濺鍍不同時間之銀奈米粒子，探討如何成功製作穩定且特性良好之氣敏自供電奈米發電機元件，主要研究可分為兩部分：

第一部分：首先使用射頻磁控濺鍍機(Radio frequency magnetron sputtering)在玻璃基板上濺鍍100nm氧化鋅薄膜作為晶種層，再利用水熱法配置硝酸鋅(Zn(NO3)2‧6H2O)、四氮六甲圜(HMTA)以及濺鍍時間20秒之銀奈米粒子，形成銀奈米粒子修飾氧化鋅奈米結構，最後使用快速熱退火在450C下進行熱處理。將試片透過場發射掃描式電子顯微鏡(FE-SEM)、能量散佈分析儀(EDS)、穿透式電子顯微鏡(TEM)、X光繞射頻譜圖分析(XRD)及螢光光譜儀(PL)，進行生長結構、材料成分、晶格缺陷、結晶度以及光學等等分析。

第二部分：使用雷雕技術定義圖形，在ITO PET基板上定義電極區域，以射頻磁控濺鍍儀器，濺鍍一層銀薄膜做為電極層，然後與銀奈米粒子修飾氧化鋅奈米柱組裝成奈米發電機，利用新穎敲擊系統驅動自供電奈米發電機，並結合氣體之量測。

In this study, we focused on the fabrication of gas sensing self-powered nanogenerator devices by silver nanoparticles modified zinc oxide nanorod structure. We used a simple and low-cost hydrothermal method to sputter zinc oxide nanostructures with silver nanoparticles at different times, and explored how to successfully fabricate stable and good gas sensing self-powered nanogenerator components.

　　The first part: first, 100 nm ZnO film was sputtered on glass substrate by radio frequency magnetron sputtering. Then, zinc nitrate (Zn (NO3) 2 · 6H2O), hexamethylenetetramine (HMTA) and silver nanoparticles 20 seconds were prepared by hydrothermal method. Finally, the rapid thermal annealing was used to heat treatment at 450 ℃. The samples were analyzed by field emission scanning electron microscope (FE-SEM), energy dispersive spectrometer (EDS), transmission electron microscope (TEM), X-ray diffraction (XRD) and fluorescence spectrometer (PL).

　　The second part: using the laser engraving technology to define the figure, defining the electrode area on the ITO PET substrate, the electrode layer is made of a silver film sputtered by RF magnetron sputtering instrument, and then assembling the nanogenerator with the silver nanoparticles modified zinc oxide nanorods, using a novel percussion system to drive the self-powered nanogenerator, and combining with the gas measurement.

摘要...i
Abstract...ii
誌謝...iii
目錄...iv
表目錄...vi
圖目錄...vii
第一章緒論...1
1.1 前言...1
1.2 研究動機與目的...2
第二章理論基礎與文獻探討...3
2.1 氧化鋅之材料特性...3
2.1.1 氧化鋅不同型態的結構...4
2.1.1 氧化鋅之光學特性...5
2.2 濺鍍之原理...6
2.2.1 射頻濺鍍的優點...9
2.3 水熱法合成氧化鋅奈米柱陣列...10
2.3.1 水熱法的優點...10
2.4成長氧化鋅奈米柱陣列之化學反應流程...10
2.5雷射雕刻技術...11
2.6 壓電效應的介紹...11
2.7壓電效應原理...12
2.8 精密敲擊系統...14
2-8-1 精密敲擊系統原理...14
2-8-2 精密敲擊系統的優點...14
第三章實驗步驟與機台介紹...15
3.1 實驗機台與藥品...15
3.2 實驗架構...17
3.3基板的準備...17
3.4下電極之製作...18
3.4.1生長氧化鋅奈米柱...18
3.4.2濺鍍銀奈米顆粒修飾氧化鋅奈米柱...18
3.5上電極之製作...20
3.6元件之製作...22
在上、下電極之ITO層貼上銅膠帶連接電線，利用封膜膠在加熱平台上將上、下電極組合封裝，即完成元件製作，如圖3-9，圖3-10為自供電元件組合量測示意圖。...22
3.7材料特性之分析...23
3.7.1場發射掃描式電子顯微鏡（Field-Emission Scanning Electron Microscope,FE-SEM）...23
3.7.2能量散射光譜儀(Energy Dispersive Spectrometry, EDS)...23
3.7.3透式電子顯微鏡(Transmission Electron Microscope,TEM)...23
3.7.4X光繞射分析儀（X-Ray Diffraction, XRD）...24
3.7.5光激發螢光光譜儀(PL)...26
第四章實驗內容與討論...27
4-1銀奈米顆粒修飾氧化鋅奈米柱之自供電氣體感測器製備...27
4-1-1銀奈米顆粒修飾氧化鋅奈米柱表面結構與形貌(SEM)...28
4-1-2銀奈米顆粒修飾氧化鋅奈米柱之晶相分析結晶性討論(XRD)...31
4-1-3銀奈米顆粒修飾氧化鋅奈米柱氧化鋅奈米柱陣列之成分分析(EDS)...32
4-1-4 銀奈米顆粒修飾氧化鋅奈米柱之光激發螢光光譜儀(PL)...34
4-1-5 銀奈米顆粒修飾氧化鋅奈米柱之穿透式電子顯微鏡分析(TEM)...35
4-2 銀奈米顆粒修飾氧化鋅奈米柱陣列自供電氣體感測器量測分析...39
4-2-1 V-t量測分析比較...39
第五章...45
5-1 結論...45
5-2未來展望...45
參考文獻...46
Extended Abstract...50

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[58] 黃柏崴 硫摻雜氧化鋅奈米柱備製壓電式奈米發電機之研究 國立虎尾科技大學光
電工程系光電與材料科技碩士班。