臺灣博碩士論文加值系統

本論文使用熱塑型奈米技術來製作2種導模共振(Guided-Mode Resonance ,GMR)感測器，使用聚甲基丙烯酸甲酯(Poly(Methyl Methacrylate, PMMA)及低密度聚乙烯(Low Density Polyethylene, LDPE)薄膜當作基板，先用奈米壓印機將金屬鎳板上的光柵結構以熱壓印方式轉印至塑膠基板上，再鍍上一層高折射率材料二氧化鈦在光柵結構上形成導模共振元件。我們使用嚴格耦合波分析模擬軟體來模擬元件的特性並與量測結果做比較。。在感測器的應用方面，以PMMA當基板製作的導模共振元件作為液體折射率感測器，當待測液體因濃度增加而改變折射率時會使導模共振感測器的共振角產生偏移，經光學系統可將此效應轉變成光束影像暗紋偏移的變化，實驗結果顯示此PMMA-GMR感測器暗紋偏移量對折射率改變的靈敏度為1084.166 mm/RIU。而使用LDPE薄模作為軟性基板的導模共振元件作為壓力感測器，將此元件裝在空氣腔體上，當壓力增加時會使GMR元件上的光柵週期因膨脹而增加而使元件共振角產生偏移，當固定入射角時，穿透光的強度會因共振角偏移而改變，實驗結果顯示此LDPE-GMR壓力感測器光強度變化對壓力改變的靈敏度8.27×10-6 w/mbar。

In this thesis, two guided-mode resonance (GMR) sensors are fabricated using thermal-nanoimprinting technology to transfer a grating structure on Polymethyl methacrylate (PMMA) and Low-density Polyethylene (LDPE) thin-film substrate. Then, a high refractive-index (RI) film TiO2 is coated on the grating structure to form the GMR devices. The experimental characteristics of the two GMR devices are compared with simulation results based on rigorous coupled wave analysis (RCWA).In sensor applications, the PMMA-GMR device is used as a liquid RI sensor. When the RI of a analyte liquid is changed by increasing its concentration, this results in the resonance angle change. An optical system is used to convert the resonance angle change to the dark area shift in the optical beam images. Experimental results show that this PMMA-GMR sensor can achieve a sensitivity of 1084.166 mm/RIU. The other LDPE-GMR device is used as a pressure sensor. This film sensor is equipped in a gas chamber, and when the pressure is increased, the grating period of the flexible device is also increased because of inflation. This causes the shift in resonance angle of the GMR device and when the incident angle is fixed, the resonance angle changes can cause the transmitted optical power changes. Experimental results show that this LDPE-GMR sensor can achieve a sensitivity of 8.27×10-6 w/mbar.

摘要...i
Abstract...ii
誌謝...iii
目錄...iv
表目錄...vi
圖目錄...vii
第一章 緒論...1
1.1 研究動機及目的...1
1.2 文獻回顧...2
1.3 研究方法...8
1.4論文架構...8
第二章 導膜共振原理與元件參數程式模擬...9
2.1 導膜共振原理...9
2.1.1波導理論...9
2.1.2 等效介質理論...9
2.1.3 導模共振效應...10
2.2 軟體模擬...11
2.2.1 Rsoft簡介...11
2.2.2 RCWA演算法...12
2.3 導模共振元件模擬...15
第三章 導模共振元件製程...21
3.1實驗儀器與材料...21
3.1.1 奈米壓印機介紹...21
3.1.2 實驗材料...22
3.2 LDPE導模共振元件製程...25
3.2.1 製作流程...25
3.2.2 LDPE膜奈米熱壓印光柵翻模製程...27
3.2.3 LDPE膜光柵結構膜厚測量...27
3.3 PMMA導模共振元件製程...30
3.3.1製作流程...30
3.3.2 PMMA奈米熱壓印光柵翻模製程...31
3.3.3 PMMA光柵結構膜厚測量...31
3.3.4 熱塑型導模共振元件表面改質...33
第四章 實驗架構與量測結果...35
4.1共振角量測...35
4.1.1 光功率量測系統...35
4.2以LDPE膜為基板製成的導模共振元件...36
4.2.1實驗架構...36
4.2.2量測結果與分析...39
4.3 以PMMA為基板製成的導模共振元件...46
4.3.1 實驗架構...46
4.3.2 量測結果與分析...47
第五章 結論...50
參考文獻...51
Extended Abstract...52

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