現今生醫植入物在應用上已是非常普遍，鈦及鈦合金材料經常被製成人工牙根，因鈦材料表面易自然生成氧化鈦，這使得材料表面具有良好的化學穩定性並且不易被腐蝕，而受到大家廣泛使用於生醫領域。
　　本研究中使用陰極電弧蒸鍍技術(Cathodic Arc Evaporation, CAE)在鈦合金(Ti-6Al-4V)支台螺絲上分別鍍製多元純金屬鈦鈮鋯鉭(TiNbZrTa)薄膜與通入少量氮氣之TiNbZrTa(N)薄膜，再進行退火氧化，使生成不同氧化物，進而分析薄膜之機械性質、螺絲移除扭矩、抗菌性與生物相容性。
　　本研究使用高解析度場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscope, FESEM)及場發射穿透式電子顯微鏡(Field Emission Transmission Electron Microscope, FETEM)觀察薄膜斷面微結構，搭配能量分散式光譜分析儀(EDS)進行薄膜元素成分分析，再利用X射線光電子能譜儀(X-ray Photoelectron Spectroscope, XPS)、X光繞射分析儀(X-Ray Diffractometer, XRD)觀察薄膜化學鍵結態、晶體結構及結晶相分析。利用三維表面輪廓儀(3D Surface Profilometer)與水接觸角量測儀(Water Contact Angle, WCA)分析薄膜表面粗糙度與親疏水性，機械性質分析採用奈米壓痕試驗機(Nano-indentation)測量薄膜硬度值及彈性係數。人工牙根移除扭矩測試則使用軸向扭力測試儀，探討鍍製薄膜的支台螺絲與純鈦類植體(螺母)兩者之間的移除扭矩比較。對於薄膜的抗菌性與生物相容性實驗分析，分別以金黃色葡萄球菌(Staphylococcus aureus, S.a)做抗菌性分析並使用小鼠纖維母細胞(L929)進行ISO 10993-5細胞毒性分析判斷是否具有良好的生物相容性。
　　根據研究結果顯示鍍製TiNbZrTa系列薄膜之支台螺絲相較於無薄膜鍍製之鈦合金螺絲具有較高的移除扭力，可避免人工牙根經長期使用而易鬆脫。本研究所鍍製之TiNbZrTa系列薄膜與廣泛使用於生醫植入物的鈦合金皆擁有同樣優良的生物相容性。而藉由退火氧化處理，推測原因為薄膜表面生成的Ta2O5氧化物抑制細菌生長而提升薄膜的抗菌效果，而在抗菌性方面有更優異的表現。

Biomedical implants have been widely used nowadays. Titanium and titanium alloy materials are often made as implants. Surface properties of oral titanium implants play decisive roles for antibacterial and biological response and tissue regeneration. The chemical composition of surface oxides on titanium is usually titanium dioxide, TiO2. The surface oxide is chemically stable and corrosion-resistant, which makes titanium surfaces quite stable under physiological conditions.
In this study, cathode arc evaporation technology (CAE) was used to deposit multicomponent coatings on the titanium alloy abutment screw. The main elements are TiNbZrTa pure metal coating and TiNbZrTa(N) with a small amount of nitrogen. The deposited coatings were then oxidized at high temperature to produce different oxides on the surface of the coatings. And then the mechanical properties, antibacterial properties and biocompatibilities of the coatings were analyzed.
In this study, Field Emission Scanning Electron Microscope (FESEM) and Field Emission Transmission Electron Microscope (FETEM) were used to analyze the coating microstructure, and the equipped energy dispersive spectrometer (EDS) was used to analyze the coating element composition. X-ray Photoelectron Spectroscope (XPS) and X-Ray Diffractometer (XRD) were used to analyze the chemical bonding state, crystal structure and crystalline phase of the coatings. For the mechanical property analysis, 3D Surface Profilometer was used to observe surface morphology and measure the surface roughness. Water Contact Angle (WCA) measurement was conducted to discuss the hydrophobicity of the coated Ti. Nano-indentation was used to measure the hardness and Young's modulus of the coatings. The different coated titanium abutments were screwed onto Ti implants, and we used the axial torque tester to study the effects of coatings on the screw loosening and removal torque between the abutment screw and the pure titanium implant (nut). For the biological analysis of the coatings, Staphylococcus aureus (S.a) was used for antibacterial analysis, and mouse fibroblasts (L929) were used for ISO 10993-5 cytotoxicity analysis to determine whether it had good biocompatibility.
According to the research results, the abutment screws coated with TiNbZrTa series coatings had higher removal torques than the uncoated titanium alloy screws, which can prevent the implant from loosening after long-term use. The TiNbZrTa series coated Ti possessed similar excellent biocompatibilities to the titanium alloy had. After oxidation treatment, Ta2O5 were formed on the coating surface, and they possessed better antibacterial performance.

摘要...............i
Abstract...............ii
誌謝...............iv
目錄...............v
表目錄...............viii
圖目錄...............ix
第一章 緒論...............1
1.1 前言...............1
1.2 研究動機與目的...............2
第二章 文獻回顧...............3
2.1 生醫材料回顧............... 3
2.1.1 生醫材料所具備之特性及應用...............3
2.1.2 植入物的機械性質...............6
2.1.3 植體與支台螺絲鬆動的原理和相關因素...............8
2.2 無毒金屬...............10
2.2.1 鈦 (Titanium) ...............12
2.2.2 釩 (Vanadium) ...............12
2.2.3 鋁 (Aluminum) ...............13
2.2.4 鈮 (Niobium) ...............13
2.2.5 鋯合金 (Zirconium Alloys) ...............13
2.2.6 鉭 (Tantalum) ...............14
2.3 無毒金屬薄膜...............15
2.3.1 鈦鋯(TiZr)薄膜的特性...............15
2.3.2 二氧化鈦(TiO2)薄膜的特性...............17
2.3.3 五氧化二鉭(Ta2O5)薄膜的特性...............20
2.4 陰極電弧蒸鍍原理(Cathodic Arc Evaporation, CAE) ...............23
2.5 薄膜成長機制...............25
2.6 薄膜結構...............27
第三章 實驗方法...............29
3.1 實驗流程...............29
3.2 薄膜設計與實驗方法...............30
3.2.1 前處理及鍍膜步驟...............30
3.2.2 TiNbZrTa薄膜製程設計...............32
3.2.3 TiNbZrTa(N)薄膜製程設計...............33
3.3 真空退火系統(Vacuum Annealing System) ...............34
3.4 薄膜微結構與成分分析...............35
3.4.1 高解析度場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscope, FESEM) ...............35
3.4.2 場發射穿透式電子顯微鏡(Field Emission Transmission Electron Microscope, FETEM) ...............38
3.4.3 化學分析電子能譜儀(Electron Spectroscope for Chemical Analysis, ESCA) ...............40
3.4.4 X光繞射分析儀(X-Ray Diffractometer, XRD) ...............41
3.5 薄膜表面性質分析...............43
3.5.1 三維表面輪廓儀(3D Surface Profilometer) ............... 43
3.5.2 水接觸角量測儀(Water Contact Angle, WCA) ...............44
3.6 薄膜機械性質分析...............47
3.6.1 奈米壓痕試驗機(Nano-indentation) ...............47
3.6.2 磨耗試驗機(Tribometer) ...............49
3.6.3 軸向扭力測試儀(Axial Torque Tester) ...............50
3.7 薄膜生物實驗分析...............52
3.7.1 金黃色葡萄球菌(Staphylococcus aureus, S.a)抗菌性分析 ...............52
3.7.2 ISO 10993-5 細胞毒性分析...............53
第四章 結果與討論...............56
4.1 薄膜微結構分析與成分分析............... 56
4.1.1 SEM薄膜表面與成分分析...............56
4.1.2 SEM薄膜微結構分析...............59
4.1.3 TEM薄膜微結構分析...............60
4.1.4 XPS化學鍵結態與成分分析............... 67
4.1.5 X光繞射分析...............74
4.2 薄膜表面性質分析...............77
4.2.1 表面粗糙度分析...............77
4.2.2 水接觸角量測分析...............79
4.3 薄膜機械性質分析...............81
4.3.1 奈米壓痕分析...............81
4.3.2 磨耗試驗分析...............84
4.3.3 移除扭矩分析...............86
4.4 薄膜生物實驗分析 ...............88
4.4.1 金黃色葡萄球菌(Staphylococcus aureus, S.a)抗菌性分析............... 88
4.4.2 ISO 10993-5細胞毒性分析...............89
第五章 結論...............90
5.1 薄膜微結構分析結論...............90
5.2 薄膜表面性質分析結論...............91
5.3 薄膜機械性質分析結論...............91
5.4 薄膜生物實驗分析結論...............92
5.5 總結...............92
第六章 未來展望...............93
參考文獻...............94
Extended Abstract...............100

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