本研究以旋轉塗佈法(spin coating)，在基板改質後製備出單層聚苯乙烯奈米球(polystyrene nanospheres)薄膜，並觀察在不同條件下製備聚苯乙烯奈米球薄膜之形貌，接著，利用電漿增強化學氣相沉積(PECVD)來氧電漿蝕刻奈米球薄膜，並分析單層奈米球薄膜在不同氧電漿蝕刻(oxygen plasma etching)時間下的粒徑大小與分佈情形。研究中，透過原子力顯微鏡(AFM)來觀察奈米球薄膜的表面形貌及表面粗糙度，再配合image J程式來分析奈米球薄膜表面之覆蓋率，實驗中還利用紫外光-可見光光譜儀(UV-VIS)，觀察結構化奈米球的光學穿透率，並利用水滴接觸角量測系統，量測基板表面改質前後的親水特性。研究結果顯示，基板改質後因其表面親水性使奈米球更容易旋塗在基板上，且利用氧電漿蝕刻製程能夠有效控制奈米球粒徑大小及分佈，大幅提升表面粗糙度，奈米球在材料科學中扮演著重要的角色。它們可以用於製備具有特殊結構和性能的材料。此外，奈米球還可用於製備高效能的太陽能電池、催化劑和光學材料等。奈米球的應用廣泛且值得我們探討。

In this study, a single-layer polystyrene nanosphere film was prepared after the substrate was modified by spin coating, and the morphology of the polystyrene nanosphere film prepared under different conditions was observed. , and then, plasma-enhanced chemical vapor deposition (PECVD) was used to etch the nanosphere film with oxygen plasma, and the particle size and particle size of the single-layer nanosphere film under different oxygen plasma etching (oxygen plasma etching) times were analyzed. Distribution situation. In the study, the surface morphology and surface roughness of the nanosphere film were observed through an atomic force microscope (AFM), and then the image J program was used to analyze the surface coverage of the nanosphere film. In the experiment, a UV-visible spectrometer ( UV-VIS), observe the optical transmittance of structured nanospheres, and use the water droplet contact angle measurement system to measure the hydrophilic characteristics of the substrate surface before and after modification. The research results show that after the substrate is modified, the nanospheres are easier to spin-coat on the substrate because of the surface hydrophilicity, and the use of oxygen plasma etching process can effectively control the particle size and distribution of the nanospheres, and greatly improve the surface roughness. Nanospheres play an important role in materials science. They can be used to prepare materials with special structures and properties. In addition, nanospheres can also be used to prepare high-efficiency solar cells, catalysts, and optical materials. The applications of nanospheres are extensive and worth exploring.

摘要...........i
Abstract...........ii
誌謝......iv
目錄...........v
表目錄...........vii
圖目錄...........viii
第一章 緒論...........1
1.1前言...........1
1.2文獻回顧...........1
1.2.2 奈米結構的應用...........2
1.2.3 氧電漿蝕刻奈米球之應用...........3
1.3研究動機...........4
第二章 理論基礎...........10
2.1 電漿成分及原理...........10
2.2 化學氣相沉積法之種類...........10
2.3 濕潤性原理...........11
2.4 氧電漿蝕刻奈米球之原理...........11
第三章 實驗方法及步驟...........16
3.1實驗流程...........16
3.2實驗系統...........16
3.2.1電漿增強化學氣相沉積系統...........16
3.2.2旋轉塗佈系統(Spin coating)...........17
3.3奈米球表面形貌量測分析...........17
3.3.1原子力顯微鏡(Atomic force microscope；AFM)...........17
3.3.2紫外光-可見光光譜儀（UV-Vis Spectrum）...........17
3.3.3 接觸角量測儀...........17
3.3.4場發射掃描式電子顯微鏡（Field Emission-Scanning Electron Microscope；FE-SEM） ...........18
第四章 結果與討論...........23
4.1以乾式氧電漿基板表面改質技術塗佈奈米球層之研究...........23
4.1.1 以乾式/濕式基板表面改質技術塗佈奈米球層之研究...........23
4.1.2奈米球尺寸與旋塗轉速相關性分析...........25
4.2奈米球塗佈於具不同表面能基板之均勻性與缺陷分析...........27
4.2.1不同表面能自組裝奈米球之表面特性分析...........27
4.2.2奈米球層塗佈與表面特性相關性分析...........28
4.3氧電漿蝕刻單層奈米球結構之分析...........30
4.3.1奈米球經不同氧電漿蝕刻時間之特性分析...........30
4.3.2不同製程條件對於氧電漿蝕刻單層奈米球之影響...........31
第五章 結果與未來工作...........58
參考文獻...........60
Extended Abstract...........62


 

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