臺灣博碩士論文加值系統

本論文利用氧化鋅薄膜成長於玻璃基板上製作一表面聲波液體與紫外光感測器，氧化鋅薄膜是利用射頻磁控濺鍍法成長於玻璃基板上，再使用黃光微影製程製作指叉狀電擊。氧化鋅薄膜厚度控制在1至5微米，探討氧化鋅薄膜不同厚度對液體與紫外光感測器靈敏度的影響。由於液體與紫外光會對氧化鋅薄膜聲電效應造成影響，進而改變表面聲波波傳特性，在量測元件插入損失與頻率偏移量後，氧化鋅薄膜在3微米時(波長40微米)對液體與紫外光有最大的靈敏度。

ZnO thin films grown on glass substrate were fabricated in surface acoustic wave
liquid and UV sensors. The ZnO thin film was deposited on glass by RF magnetron
sputtering; then, the Al interdigital transducer was made via the lithography process. The SAW devices applied different ZnO films thicknesses from 1μm to 5μm. The effect of thickness of ZnO thin film on the sensitivity of UV and liquid was
investigated. According to the insertion loss and frequency shift of transmitted
signals of the devices, ZnO thin film at 3μm showed the best sensitivity for both
liquid and UV sensors. The variances in center frequency and insertion loss are the results of acoustoelectric effects between the charge carriers generated by the photons and the potential associated with their arrival.

摘要 ...i
Abstract ...ii
Acknowledgments ...iii
Table of Contents ...iv
List of Table ...vi
List of Figure ...vii
Chapter 1 Introduction ...1
1.1 Research Rationale ...1
1.2 Research Objectives, Scope, and Method ...2
1.2.1 Research Objectives ...2
1.2.2 Research Scope ...2
1.2.3 Method ...2
1.3 Research Structure ...2
Chapter 2 Literature Review ...4
2.1 Properties of ZnO ...4
2.1.1 ZnO Crystal Structure ...4
2.1.2 ZnO Crystal Structure ...8
2.1.3 Piezoelectric Properties ...9
2.2 Piezoelectric effect ...11
2.2.1 Direct piezoelectric effect ...13
2.2.2 Reverse piezoelectric effect ...14
2.3 Surface Acoustic Wave Parameters ...14
2.3.1 Surface Acoustic Wave velocity (SAW velocity) ...14
2.3.2 Electromechanical Coupling Coefficient (K2) ...15
2.3.3 Insertion loss (IL) ...15
2.3.4 Temperature coefficient of frequency (TCF) ...16
2.4 Interdigital transducer (IDT) ...17
2.4.1 Fundamentals of IDT Transducers ...17
2.4.2 Fundamentals of IDT ...17
Chapter 3 Experimental procedures ...19
3.1 Experimental process structures ...19
3.2 Fabrication of surface acoustic wave component...19
3.2.1 The Manufacture of a Zinc Oxide Thin Film ...19
3.2.2 Producing IDTs finger electrodes ...23
3.2.2.1 Substrate Cleaning ...24
3.2.2.2 Photolithography ...24
3.2.2.3 Aluminium sputtering ...26
3.2.2.4 Lift-off method ...27
3.3 Introduction to analysis and measurement instruments ...27
3.3.1 Producing IDTs finger electrodes ...27
3.4 Introduction to experimental drugs and device ...28
Chapter 4 Results and Discussion 31
4.1 Analysis and Measurement of surface acoustic wave components ...31
4.2 Liquid measurement and analysis of surface acoustic wave component ...34
4.3 UV light measurement and analysis of surface acoustic wave components....43
Chapter 5 Conclusion ...48
References ...49
Extended Abstract ...51

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