臺灣博碩士論文加值系統

隨著大自然的釋出和各行各業的發展，地球的空氣汙染也在不斷的增加，導致於人們需要更加的重視空氣品質，而如何確保好的空氣品質就成了一大問題，所以氣體感測器的出現變解決了審視空氣品質的一大指標。
而本論文會先介紹氧化銅奈米線的製造方法，之後再進行材料的分析及探討。
氣體感測器是利用氧化銅奈米線作為感測材料，本實驗使用氧化銅感測器對臭氧進行量測，首先我們會藉由加熱至最佳的工作溫度而進行量測，量測出最佳的參數。對於各種不同氣體包含氧化性、還原性氣體做量測。本研究中實驗之氧化銅氣體感測器屬於半導體式晶片型氣體感測器，具備多種優勢，如：微小化的原件尺寸縮小元件體積 、低功率消耗減少耗能、低操作溫度、製造成本降低、高靈敏度。
本研究中微機電系統氣體感測器元件之結構與其特性也通過SEM、EDS、XRD來分析與量測。本碩士論文之研究主題包括：(1.)氧化銅奈米線的製備(2.)氧化銅微機電系統氣體感測器製程(3.)氧化銅奈米線材料分析及氧化銅氣體感測器特性探討(4.)元件的工作溫度可以到達100℃，主要量測氣體為臭氧。

With the release of nature and the development of all walks of life, the air pollution of the earth is also increasing, resulting in people need to pay more attention to air quality, and how to ensure good air quality has become a big problem, so gas The advent of sensors has solved a major indicator of air quality.
In this paper, the fabrication method of copper oxide nanowires will be introduced first, and then the material analysis and discussion will be carried out.
The gas sensor uses copper oxide nanowires as the sensing material. In this experiment, the copper oxide sensor is used to measure ozone. First, we will measure it by heating it to the best working temperature. optimal parameters. Measure various gases including oxidizing and reducing gases. Experiment in this study
The copper oxide gas sensor belongs to the semiconductor chip type gas sensor, which has many advantages, such as: miniaturized original size, reduced component size, low power consumption to reduce energy consumption, low operating temperature, reduced manufacturing cost, and high sensitivity.
The structure and characteristics of the MEMS gas sensor element in this study were also analyzed and measured by SEM, EDS, and XRD. The research topics of this master's thesis include: (1.) Preparation of copper oxide nanowires (2.) Manufacturing process of copper oxide MEMS gas sensor (3.) Material analysis of copper oxide nanowires and copper oxide gas sensing Discussion on device characteristics (4.) The working temperature of the component can reach 100 ℃, and the main measurement gas is ozone.

目錄
摘要 I
ABSTRACT II
致謝 III
目錄 V
圖目錄 VIII
表目錄 XI
第一章、 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3常見氣體 3
1-3-1揮發性有機化合物(TVOCs) 3
1-3-2一氧化碳(CO) 3
1-3-3氨氣(Ammonia, NH3) 4
1-3-4氮氧化物(NOx) 5
1-3-5二氧化硫(SO2) 5
1-3-6臭氧(O3) 5
1-4 各類氣體感測器之介紹 8
電化學氣體感測器 9
催化燃燒式氣體感測器 10
1-4-1半導體式氣體感測器 11
1-4-2電化學氣體感測器 12
1-4-3催化燃燒式氣體感測器 12
觸媒燃燒式氣體感測器 13
1-4-4熱導式氣體感測器 14
1-4-5紅外線氣體感測器 15
1-5氣體感測器之市場性 16
第二章、 基本理論 19
2-1半導體式氣體感測器原理 19
2-2 吸附理論 21
2-2-1化學吸附 21
2-2-2物理吸附 23
2-3氧化銅奈米線成長方式及機制 25
2-4濺鍍原理與機制 26
2-5氣體感測器之重要參數 28
2-5-1響應(response) 28
2-5-2穩定度(stability) 28
2-5-3選擇性(selectivity) 28
2-5-4響應時間與回復時間(response and recovery time) 28
2-5-5偵測極限(detection limit) 28
第三章、 研究方法 30
3-1元件設計 30
3-2元件尺寸 30
3-3元件結構 32
3-4實驗流程及架構 33
3-4-1元件製程步驟 34
3-5製程設備分析儀器介紹 37
3-5-1掃描式電子顯微鏡(SEM) 37
3-5-2化學分析電子光譜儀(ESCA-XPS) 37
3-6製程設備介紹 38
3-6-1濕式蝕刻清洗系統 38
3-6-2電漿增強式化學氣相沉積&感應耦合電漿蝕刻系統 40
3-6-3自動光阻塗佈及顯影系統 41
3-6-4破片光阻旋轉塗佈機 42
3-6-5光阻去除及濕蝕刻化學槽 43
3-6-6光罩對準曝光系統 44
3-6-7電子槍蒸鍍系統 46
3-6-8複合薄膜多腔體濺鍍系統 47
3-6-9金屬濺鍍系統 48
3-6-10反應式離子蝕刻系統(STS) 49
3-6-11表面輪廓量測儀 50
3-6-12光學薄膜測厚儀 51
3-6-13表面修飾製程塗佈系統 52
3-6-14快速退火系統 53
3-6-15鋁打線機 54
第四章、結果與討論 56
4-1 氧化銅材料分析 56
4-1-1氧化銅SEM分析 56
4-1-2氧化銅奈米結構XRD分析 60
4-1-3氧化銅EDS分析 64
4-2 純氧化銅奈米線之氣體量測分析 67
4-2-1不同操作溫度下之氣體量測分析 68
4-2-2相同溫度下之不同臭氧氣體濃度量測分析 73
4-2-3相同溫度相同濃度下之不同氣體量測分析 77
第五章、 結論與未來展望 79
5-1結論 79
5-2未來展望 80
參考文獻 81

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