臺灣博碩士論文加值系統

　　在全球能源趨於匱乏的情勢下，再生能源的研發是必然的趨勢，太陽能的研發是再生能源重要發展之一。在太陽能應用中，太陽能光熱轉換是一項成熟的技術，並已在歐美、中國大陸等多個地區得到實際應用。
　　MoOx具有優異的機械性質、高溫熱穩定性和可調變的光學常數，廣泛使用於太陽光熱吸收體之製備，然相關濺鍍製程使用多種靶材及反應氣氛，製程繁瑣，成本昂貴。研究擬利用簡單之單一靶材及單一反應氣體進行MoOx基太陽光熱吸收體之製備，簡化製程，降低成本。
　　本實驗使用磁控式反應濺鍍系統，製備出純鉬和不同氧含量的MoOx薄膜，66.0、76.6、82.7 at.%，分別以MoO66、MoO76.6、MoO82.7表示。MoOx薄膜隨氧含量增加，晶體結構由MoO2與MoOx轉變為MoO3與MoOx，最後成為MoO3相，光學反射率下降、穿透率上升、電阻率和光學能隙隨之增加。
　　以Cu作為反射中遠紅外光的金屬基板，先製備Cu/MoO66/MoO82.7及Cu/Mo/MoO66/MoO82.7吸收體，然後再鍍上SiO2膜層作為第二抗反射層，製備Cu/MoO66/MoO82.7/SiO2及Cu/Mo/MoO66/MoO82.7/SiO2兩種吸收體，其吸收率分別達90.0 %和94.5 %，並具有1.77 %和3.5 %的熱輻射率。
　　最後是彩色吸收體的製備與探討，可以透過改變SiO2膜層厚度，探討吸收體顏色變化。

　　The development of renewable energy is an inevitable trend, due to the energy shortage of global. Reasearch and application of solar energy is an important development of renewable energy. In the application of solar energy, solar thermal conversion is a mature technology and has been actually used in many regions, such as Europe, America, and mainland China.
　　MoOx possesses excellent mechanical properties, high-temperature stability, and tunable optical constants, making it widely used in the preparation of solar thermal absorbers. However, the related sputtering processes involve multiple target materials and reactive atmospheres, leading to complex and costly procedures. To simplify the process and reduce costs, this research aims to employ a single target material and a single reactive gas for the preparation of MoOx-based solar thermal absorbers.
　　In this experiment, a magnetron sputtering system was used to fabricate pure molybdenum and MoOx thin films with different oxygen contents: 66.0, 76.6, and 82.7 at.%, represented as MoO66, MoO76.6, and MoO82.7, respectively. As the oxygen content increased, the crystal structure of the MoOx films transformed from MoO2 and MoOx to MoO3 and MoOx, ultimately becomed MoO3 phase. This resulted in a decrease in optical reflectance, an increase in transmittance, and an increase in resistivity and optical bandgap of the films.
　　Using Cu as the metal substrate for reflecting mid to far-infrared light, belowed, Cu/MoO66/MoO82.7 and Cu/Mo/MoO66/MoO82.7 absorbers are prepared. Then, a SiO2 film is coated on them as the second antireflection layer, resulting in two types of absorbers: Cu/MoO66/MoO82.7/SiO2 and Cu/Mo/MoO66/MoO82.7/SiO2. Their respective absorption rates are 90.0 % and 94.5 %, with thermal emissivity values of 1.77 % and 3.5 %.
　　Finally, the preparation and exploration of color absorbers involving various SiO2 thickness film were fabricated to investigate changes in the absorber's color.

摘要......i
Abstract......iii
誌謝......v
目錄......vi
表目錄......viii
圖目錄......x
第一章、緒論............1
1.1 前言...1
1.2 研究動機...2
第二章、文獻探討............3
2.1 太陽光熱吸收體（Solar Thermal Absorber，STA）原理...3
2.2 濺鍍薄膜的原理...13
2.3 氧化鉬的研究...19
2.4 相關的光學原理與知識...27
第三章、實驗材料及方法............31
3.1 實驗用材料...31
3.2 基板前處理...32
3.3 實驗設備與製程...34
3.4 分析儀器介紹...37
第四章、結果與討論............43
4.1 Mo、MoOx薄膜的分析...43
4.2 SiO2薄膜的分析...56
4.3 單層膜的光學常數與應用...59
4.4 Cu/Mo/MoO66/MoO82.7/SiO2多層吸收體...61
4.5 吸收體的CIE色度模擬...74
4.6 多層吸收體的真空熱穩定測試...80
第五章、結論............88
參考文獻......89
Extended Abstract......97

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