臺灣博碩士論文加值系統

氧化鋅(ZnO)為 II-VI 族化合物半導體，用途廣泛且低成本，具有寬能隙(能隙 3.37eV)。本論文研究分成二個部分探索基於鎵摻雜的ZnO（GZO）奈米柱（NR）陣列的壓電奈米發電機（NGs）。第一部分是在氧化銦錫（ITO）玻璃基板上利用 RF 磁控濺射沉積 ZnO 晶種層，並以水熱法製備鎵摻雜氧化鋅奈米柱結構。透過場發射掃描式電子顯微鏡（FE-SEM）、X 射線衍射（XRD）、X 光能譜散佈分析儀(EDS)、光致發光光譜儀(PL)、穿透式電子顯微鏡(TEM)對樣品進行了晶體分析，其觀察奈米結構之表面形貌、結晶性、元素含量以及光學特性。
第二部分是以研究以Au / ZnO 奈米柱為電極，並以鎵摻雜氧化鋅奈米柱組裝成奈米發電機。利用超聲波驅動GZO 探討其機電性能。
研究結果發現本研究以鎵摻雜濃度為 0.125m mol 為最佳參數，奈米發電機的量測結果分別為平均電壓 53mV、平均電流為 4.8μA、平均功率為 257nW。

Zinc oxide (ZnO) is a group II-VI compound semiconductor with a wide range of uses and low cost, with a wide energy gap (energy gap 3.37eV). This thesis is divided into two parts to explore piezoelectric nanogenerators(NGs) based on gallium-doped ZnO(GZO) nanopillar (NR) arrays. The first part is to deposit a ZnO seed layer on an indium tin oxide(ITO) glass substrate by RF magnetron sputtering, and prepare a gallium-doped zinc oxide nanopillar structure by hydrothermal method. Through field emission scanning electron microscope (FE-SEM), X-ray diffraction(XRD), X-ray energy spectrum dispersion analyzer(EDS), photoluminescence spectrometer(PL), transmission electron microscope(TEM) Crystal analysis was performed to observe the surface morphology, crystallinity, element content and optical properties of the nanostructure.
The second part is to study the use of Au/ZnO nanorods as electrodes and gallium-doped zinc oxide nanopillars to assemble nanogenerators. Use ultrasonic to drive GZO to discuss its electromechanical performance.
The results of the study found that this study took 0.125 mmol of gallium doping concentration as the best parameter, and the measurement results of the nanogenerator were respectively an average voltage of 53mV, an average current of 4.8μA, and an average power of 257nW.

摘要.......i
Abstract.......ii
誌謝.......iii
目錄.......iv
表目錄.......vi
圖目錄.......vii
第一章 緒論.......1
1.1前言.......1
1.2研究動機.......2
第二章 文獻回顧.......3
2.1氧化鋅奈米材料介紹.......3
2.1.1晶體結構.......3
2.1.2奈米結構.......4
2.1.3光學性質.......5
2.2薄膜成核成長理論.......6
2.3氧化鋅奈米結構之合成方式.......8
2.3.1化學氣相沉積法(CVD).......8
2.3.2水溶液法 (Aqueous solution method).......9
2.3.3水熱法 (Hydrothermal method).......10
2.4水熱法成長氧化鋅奈米結構成核機制.......12
2.4.1氧化鋅奈米柱摻雜鎵之反應.......12
2.5 壓電效應原理.......14
2.5.1 正、逆壓電效應.......14
2.5.2 壓電效應的產生.......16
第三章 實驗步驟與量測設備分析.......17
3.1實驗室藥品與儀器.......17
3.1.1實驗藥品.......17
3.1.2使用儀器.......18
3.2儀器介紹.......19
3.2.1射頻磁控濺鍍系統 (RF magnetic sputtering system).......19
3.2.2場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscopy, FE-SEM).......21
3.2.3能量散佈分析儀 (Energy Dispersive Spectrometer, EDS).......22
3.2.4 X射線繞射儀(X-ray diffraction, XRD).......23
3.2.5穿透式電子顯微鏡(Transmission Electron Microscopy, TEM).......24
3.2.6光激發螢光光譜儀(Photoluminescence, PL).......25
3.3實驗步驟.......26
3.3.1基板清洗.......27
3.3.2沉積氧化鋅薄膜.......28
3.3.3鎵摻雜氧化鋅奈米柱生長.......29
3.3.4奈米發電機之電極製作.......31
3.3.5元件製作.......33
第四章 結果與討論.......34
4.1鎵摻雜氧化鋅奈米柱之物性分析.......34
4.1.1鎵摻雜氧化鋅奈米柱之表面形貌分析.......34
4.1.2鎵摻雜氧化鋅奈米柱之能量散佈分析.......41
4.1.3鎵摻雜氧化鋅奈米柱之穿透式電子顯微鏡分析.......43
4.1.4 X-ray繞射儀之鎵摻雜氧化鋅奈米柱分析.......46
4.1.5光致發光之鎵摻雜氧化鋅奈米柱分析.......47
4.2鎵摻雜氧化鋅奈米柱製備壓電奈米發電機之電性分析.......48
4.2.1不同電極之壓電奈米發電機電性分析.......48
4.2.2不同鎵摻雜濃度之壓電奈米發電機電性分析.......50
4.2.3 UV光之壓電奈米發電機電性分析.......56
第五章 結論.......58
5.1結論.......58
5.2未來展望.......58
參考文獻.......59
Exctended Abstract.......66

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