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This study is to study the wafer into the semiconductor packaging process, using the oven machine to heat and accelerate the polyimide material to a fully solidified stable state, because the problem of organic solvent volatiles blocking the gas sampling tube is studied to solve Oxygen analyzer sampling tube blocking problem.
The solvent in the photoresist material of the polyimide is condensed in the oxygen sampling pipeline due to the volatile matter generated in the high temperature process, which indirectly causes abnormal flow of the sample gas in the oxygen sampling tube, affecting the accuracy of the detection, in order to slow down the blockage. Speed and install a heating belt in the blocked pipe section, and heat the pipeline to slow down the blocking speed, thereby improving the oxygen detection efficiency.
This study is aimed at: 1. Reducing the number of rework caused by abnormal detection (increasing productivity by 21%); 2. Reducing the maintenance time of cleaning the sampling tube of the machine due to abnormal detection (saving 89% compared with the time before installation) Third, reduce the number of oxygen analyzer damage caused by blockage (analyzer maintenance times reduced by 80%). According to the measured results, it can increase the production capacity, reduce the maintenance time of the machine and reduce the number of damages of the oxygen analyzer, so as to improve the performance.
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