本論文使用射頻磁控濺鍍系統在36°Y切面鉭酸鋰基板與42°Y切面鉭酸鋰基板上沉積c軸取向氧化鋅薄膜後利用黃光微影製程線寬5μm之指叉狀電極，利用低溫水溶液法成長氧化鋅奈米片完成表面聲波紫外光感測器。氧化鋅奈米片主要使用硝酸鋅(Zn(NO3)2)和氫氧化鈉(NaOH)生長，實驗過程中調整氫氧化鈉濃度改變氧化鋅奈米片形貌。完成後藉由場發射掃描式電子顯微鏡(FE-SEM)、X光繞射分析儀(XRD)之檢測對氧化鋅奈米片及氧化鋅薄膜進行晶體結構、表面形貌的分析。元件分析方面，使用網路分析儀和紫外光波段為254nm與365nm量測元件，量測元件之插入損耗和相位之元件頻率響應特性。

The c-axis orientation ZnO thin films were deposited on 36° and 42°Y-X LiTaO3 substrate by radio frequency magnetron sputtering system and then used photolithography process to grow the interdigital electrodes with 5μm-wide. Finally, the ZnO nanosheets grown on the ZnO films via aqueous solution method to fabricate a surface acoustic wave ultraviolet sensor. The ZnO nanosheets grown using Zn(NO3)2 and NaOH, we controlled the NaOH concentration to change the ZnO nanosheets morphology. The crystalline structure and surface morphology of the ZnO nanosheets and thin films were examined by field emission scanning electron microscopy and X-ray diffraction analyzer. The insertion losses and phase shifts of devices under 254 and 365 nm ultraviolet irradiated were measured by network analyzer.

摘要.......i
Abstract.......ii
誌謝.......iii
目錄.......iv
表目錄.......vi
圖目錄.......vii
第一章 緒論.......1
1.1 前言.......1
第二章 文獻回顧.......2
2.1 壓電理論.......2
2.1.1 壓電效應.......2
2.1.2 壓電材料.......3
2.2 聲電效應.......3
2.2.1 表面聲波傳遞的擾動.......3
2.2.2 表面聲波聲電響應.......4
2.3 表面聲波.......7
2.3.1 拉福表面聲波(Love surface acoustic wave).......8
2.3.2 表面聲波元件.......8
2.3.3 表面聲波元件參數性質.......9
2.3.4 波速與中心頻率.......9
2.3.5 插入損耗.......9
2.3.6 機電耦合係數(Electromechanical Coupling Coefficient,K2).......9
2.3.7 溫度頻率係數.......10
2.4 氧化鋅.......11
2.4.1 氧化鋅材料簡介.......11
2.5 氧化鋅薄膜沉積.......12
2.5.1 薄膜沉積方式.......12
2.5.2 磁控濺鍍法原理.......12
2.5.3 薄膜成長機制.......13
2.6 氧化鋅奈米結構製備方法.......14
2.7 氧化鋅奈米片成長機制.......14
2.8 光吸收.......15
2.9 紫外光感測原理.......16
2.10 紫外光元件感測.......16
第三章 實驗步驟與分析.......17
3.1 實驗架構.......17
3.2 氧化鋅奈米片表面聲波元件製作.......18
3.2.1 氧化鋅薄膜濺鍍.......18
3.2.2 黃光微影製程.......19
3.2.3 氧化鋅奈米片生長.......20
3.3 分析與量測儀器.......22
3.3.1 場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscopy,FE-SEM)分析.......22
3.3.2 X光繞射儀(X-ray Diffraction,XRD).......22
3.3.3 網路分析儀(Network analyzer).......23
3.4 表面聲波元件之紫外光量測.......24
第四章 結果與討論.......25
4.1 氧化鋅薄膜分析.......25
4.2 氧化鋅奈米片結構分析.......25
4.3 氧化鋅奈米結構XRD分析.......25
4.4 表面聲波紫外光感測器特性分析.......35
4.4.1 表面聲波元件頻率響應分析.......35
4.4.2 表面聲波元件紫外光量測特性分析.......63
第五章 結論.......92
參考文獻.......93
Extended Abstract.......100

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