臺灣博碩士論文加值系統

　　太陽能為近年來全球致力發展的綠色能源，使用光熱轉換效率優良的太陽能選擇性吸收體，應用於太陽光熱轉換系統之集熱器，可以有效轉換光能、降低環境汙染，提供太陽光熱系統更優異的光熱轉換效能及增加其使用性。
　　本實驗利用反應式磁控濺鍍系統濺鍍MoONｘ，其O含量7.5〜9.9 at.%，N含量27.2、36.8、48.7 at.%，晶體結構從Mo2N轉變爲MoN相。氮含量的增加造成薄膜的反射率降低、片電阻和光學能隙增加，熱穩定分析結果顯示Mo-N11(N含量48.7 at.%)表現出最佳的熱穩定性，故以其作為主吸收層。
　　經由疊層設計、光學模擬厚度，製備Cu/MoONx/MoOx/AlOx太陽能選擇性吸收體，其吸收性為0.84，熱輻射率為0.05，並進行真空熱穩定測試，當吸收體達到600 ℃，開始產生針狀氧化鉬。

　　The solar energy is a committed development green energy for global in recent years. The solar selective absorbor is widely used in the solar collector due to its excellent photothermal conversion efficiency, and it can efficiently convert light energy, reduce environmental pollution, and increase the conversal efficiency and usability of solar collector.
　　This experiment uses a reactive magnetron sputtering system to sputter MoONx. The O content is 7.5~9.9 at.%, and the N content is 27.2, 36.8, 48.7 at.%. The crystal structure changes from Mo2N to MoN phase. The increase in nitrogen content causes a decrease in the reflectivity of the film, an increase in sheet resistance and optical energy gap. The thermal stability analysis results show that Mo-N11 (N content 48.7 at.%) shows the best thermal stability, so it is used as the main absorption Layer.
　　The thickness of the stacking layers in Cu/MoONx/MoOx/AlOx solar selective absorber was designed via the optical simulation software. A absorptance of 0.84 and thermal emission of 0.05 are obtained. Needle-molybdenum oxides is produced after heating to 600 ℃ in vacuum.

摘要...i
Abstract...iii
誌謝...v
目錄...vi
表目錄...viii
圖目錄...x
第一章、緒論...1
1.1 前言...1
1.2 研究動機...2
第二章、文獻探討...5
2.1 太陽能選擇性吸收體原理...5
2.2 太陽能輻射之特性...5
2.3 理想太陽能選擇性吸收體之光學性質...7
2.4 太陽能選擇性吸收體...10
2.5過渡金屬氮氧化物薄膜在太陽能吸收膜之發展趨勢...14
2.6濺鍍...17
2.7 薄膜成長方式...23
2.8 光學能隙計算...26
第三章、實驗步驟及儀器介紹...28
3.1實驗材料...28
3.2實驗儀器...29
3.3 實驗製程...33
第四章、結果與討論...42
4.1 MoONx鍍膜之製備及成分...42
4.2 MoONx大氣熱穩定性之性能探討...49
4.3 吸收膜之組合膜層...65
4.4 逐層堆疊吸收膜之光學性質比較...71
4.5 疊層真空熱穩定性之性能探討...77
第五章、結論...84
參考文獻...85

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