臺灣博碩士論文加值系統

本文提出一種創新的D型感測器之製作方式，利用磨輪在單模光纖(SMF)上加工出深度10 μm的D型結構，結合傳統的雷射輔助蝕刻技術，參考文獻[2]製程，以KrF準分子雷射透過光纖聚焦，在研磨面製作光柵結構，並透過BOE進行濕式蝕刻，製造出直徑70 μm、週期620 μm的D型研磨長週期光纖光柵感測器(D-Shape Grinding Technology of Laser-Assisted Etching Long-Period Fiber Gratings，D-LLPFGs)。並且透過COMSOL 5.6 Multiphysics模擬軟體之光學模組，模擬雷射聚焦狀況與光纖受拉伸作用時光源通過光纖時之狀況，藉由模擬結果得知，首先當幾何形狀為曲面時，能在D型研磨面上產生有效的聚焦，其二模擬繪製出的頻譜圖相當貼近實際拉伸的狀態，證明以此方法製作感測器是具有可行性。
在汞金屬量測實驗中，在濃度0.5 ppm至10.0 ppm範圍內及量測時間1分鐘以內其變化量具有良好的損耗線性度，其線性度可達0.44，結果顯示隨著汞金屬濃度的升高，波長有往短波長漂移的趨勢，當濃度接近20.0 ppm時變化逐漸趨緩。在胃泌素細胞生醫量測實驗中，先進行固定抗原(濃度10 µg/ml)、改變抗體(濃度分別為2 / 2.5 / 4 / 10 µg/ml)的實驗，發現量測時間在0~1分鐘內具有劇烈變化，其中以抗體濃度4 µg/ml的波長飄移變化量最大，達2.56 nm；接著再進行固定抗體(濃度4 µg/ml)、改變抗原(濃度分別為10 / 12.5 / 20 / 50 µg/ml)的實驗，發現抗原濃度12.5 µg/ml的波長飄移與傳輸損耗的變化量最大，分別為1.186 nm及0.503 dB。經實驗分析後歸納出以抗體濃度4 µg/ml及抗原濃度12.5 µg/ml作為胃泌素細胞生醫量測實驗效果最好，結果顯示以D型研磨感測器應用於實驗具有良好的表現。

In this study, we advance an new method for making D-Shape sensor which using a grind wheel to manufacture D-Shape structure on single-mode fiber (SMF) with depth of 10 μm, then a KrF excimer laser was used to focus on the optical fiber grating grind surface, which was combined with laser-assisted etching technology refer from reference [2], at last used wet etching by BOE to produce a D-Shape Grinding Technology of Laser-Assisted Etching Long-Period Fiber Gratings(D-LLPFGs).The D-LLPFGs diameter is 70 μm and period is 620 μm.And used the COMSOL 5.6 Multiphysics simulation software optical module which to simulation the KrF laser beam focus on the fiber state and the state of the light source through the fiber which was external by force stretch.The simulation results was proved that the KrF laser beam can produced effective focus on D-shape grinding surface and the simulations produced spectrum grapher was closely approximates the actual stretched state spectrum grapher, that demonstrating the feasibility of this method of sensor production.
In the mercury concentration measurement experiment, the concentration was between 0.5 ppm to 10.0 ppm, the measurement time was less then 1 minute, which has a good transmission R square, the linearity is 0.44, the results show that when the mercury concentration increase the wavelength was shift towards short wavelength, when the concentration is closely to 20.0 ppm, the change gradually slows down.In the gastrin-17 experiment, first we fix the antigen(the concentration is 10 µg/ml), and used dfifferent antibody concentration(the concentration is 2 / 2.5 / 4/ 10 µg/ml),it was found that when the measurement time was between 0 to 1 minute, is generate drastic spectrum signal changes, among, when the antibody concentration is 4 µg/ml which is the largest, it can be reach to 2.56 nm; secondly fix the antibody (the concentration is 4 µg/ml) and change the antigen (the concentration is 10 / 12.5 / 20 / 50 µg/ml) , it was found that the wavelength shift and transmission loss have largest changesat when the antibody concentration was 12.5 µg/ml, it can be reach to 1.186 nm and 0.503 dB, respectively.
In the result show that the antibody concentration is 4 µ/ml and the antigen concentration is 12.5 µg/ml have best effect, the result proved of the D-shape grinding sensing has a good performance in experiment.

致謝
摘要
ABSTRACT
目錄
圖目錄
表目錄
第一章 序論
1.1 研究動機
1.2 研究背景
1.2.1 雷射輔助蝕刻相關文獻回顧
1.2.2 長週期光纖光柵感測器製作之文獻回顧
a. 準分子雷射
b. 飛秒雷射
c. 二氧化碳(CO2)雷射
1.2.3 D型光纖製作之文獻回顧
1.2.4 光纖感測器汞金屬與生醫量測實驗之文獻回顧
1.3 研究目的
第二章 基礎理論
2.1 光纖傳輸基本原理
2.2 光彈理論
2.3 光纖光柵基礎理論
2.4 長週期光纖光柵耦合模態理論分析
2.5 長週期光纖光柵應變靈敏度分析
2.6 長週期光纖光柵尺寸靈敏度分析
第三章 研究方法與步驟
3.1 D型研磨光纖製程
3.2 雷射輔助蝕刻長週期光纖製程
3.3 光纖濕蝕刻製程
3.4 長週期光纖光柵感測器之拉伸實驗
3.5 D型研磨長週期光纖光柵感測器PVA+Au溶液塗覆實驗
3.6 D型研磨長週期光纖光柵感測器食人魚溶液蝕刻與奈米金塗覆實驗
3.7 D型研磨長週期光纖光柵感測器汞金屬濃度量測實驗
3.8 D型研磨長週期光纖光柵感測器胃泌素細胞生醫量測實驗
3.9 電腦模擬分析
3.10 實驗設備與化學品
第四章 實驗結果與討論
4.1 不同研磨深度的探討
4.2 感測器的雷射燒熔與蝕刻情形
4.2.1雷射製程
4.2.2蝕刻製程
4.3 D型研磨長週期光纖光柵感測器拉伸實驗
4.3.1 光纖纖殼直徑90 µm
4.3.2 光纖纖殼直徑80 µm
4.3.3 光纖纖殼直徑70 µm
4.4 雷射聚焦位置與感測器頻譜電腦模擬分析
4.4.1 雷射聚焦位置
4.4.2 感測器頻譜
4.4.3 結論─D-LLPFGs實際與模擬結果比較分析
4.5探討不同汞金屬濃度量測數據
4.5.1汞金屬濃度量測數據
4.5.2 D-LLPFGs汞金屬量測SEM圖與EDS成分分析
4.5.3 結論─D-LLPFGs量測不同汞金屬濃度實驗
4.6探討胃泌素細胞抗體與抗原生醫量測數據
4.6.1 D-LLPFGs量測胃泌素細胞改變抗體與固定抗原濃度數據
4.6.2 D-LLPFGs量測胃泌素細胞固定抗體與改變抗原濃度數據
4.6.3 結論─D-LLPFGs量測胃泌素細胞抗體抗原實驗
第五章 結論
5.1 D型研磨長週期光纖光柵感測器結論
5.2 D型研磨長週期光纖光柵感測器之汞金屬量測實驗結論
5.3 D型研磨長週期光纖光柵感測器之胃泌素細胞實驗結論
第六章 未來展望
6.1 雙面D型研磨長週期光纖光柵感測器
6.2 D型研磨結合黃光微影蝕刻製程
6.3 微小型長週期光纖光柵感測器
參考文獻

[1]M. Mieloszyk and W. J. M. S. Ostachowicz, "An application of Structural Health Monitoring system based on FBG sensors to offshore wind turbine support structure model," vol. 51, pp. 65-86, 2017.
[2]陳景綸,''雷射輔助蝕刻型長週期光纖光柵之研製及應用,國立高雄科技大學機械系碩士論文,''2019.
[3]A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, et al., "Femtosecond laser-assisted three-dimensional microfabrication in silica," Optics Letters, vol. 26, pp. 277-279, 2001.
[4]T. Tanabe, T. Okamoto, and F. J. J. j. o. a. p. Kannari, "Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses," vol. 42, no. 9R, p. 5594, 2003.
[5]C. Hnatovsky, R. Taylor, E. Simova, V. Bhardwaj, D. Rayner, and P. J. O. l. Corkum, "Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica," vol. 30, no. 14, pp. 1867-1869, 2005.
[6]Y. Kawaguchi, H. Niino, T. Sato, A. Narazaki, and R. Kurosaki, "A deep micro-trench on silica glass fabricated by laserinduced backside wet etching (LIBWE)," in Journal of Physics: Conference Series, 2007, vol. 59, no. 1, p. 080: IOP Publishing.
[7]T. Lee, D. Jang, D. Ahn, and D. J. J. o. A. P. Kim, "Effect of liquid environment on laser-induced backside wet etching of fused silica," vol. 107, no. 3, p. 033112, 2010.
[8]C. Corbari, A. Champion, M. Gecevičius, M. Beresna, Y. Bellouard, and P. G. J. O. E. Kazansky, "Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass," vol. 21, no. 4, pp. 3946-3958, 2013.
[9]M. Yonemura, S. Kato, K. Hasegawa, and H. J. J. o. L. M. N. Takahashi, "Formation of through holes in glass substrates by laser-assisted etching," vol. 11, no. 2, p. 143, 2016.
[10]C. A. Ross, D. G. MacLachlan, D. Choudhury, and R. R. J. O. e. Thomson, "Optimisation of ultrafast laser assisted etching in fused silica," vol. 26, no. 19, pp. 24343-24356, 2018.
[11]K. P. Luong, R. Tanabe-Yamagishi, N. Yamada, and Y. J. I. J. o. E. M. Ito, "Laser-Assisted Wet Etching of Silicon Back Surfaces Using 1552 nm Femtosecond Laser," vol. 25, p. 7, 2020.
[12]P. T. Nguyen et al., "Nanosecond laser-induced reshaping of periodic silicon nanostructures," vol. 22, pp. 43-49, 2021.
[13]A. M. Vengsarkar, J. R. Pedrazzani, J. B. Judkins, P. J. Lemaire, N. S. Bergano, and C. R. J. O. L. Davidson, "Long-period fiber-grating-based gain equalizers," vol. 21, no. 5, pp. 336-338, 1996.
[14]C. Su and L. A. J. J. o. L. T. Wang, "Multiwavelength fiber sources based on double-pass superfluorescent fiber sources," vol. 18, no. 5, pp. 708-714, 2000.
[15]S. Oh, W. Han, U. Paek, and Y. J. O. E. Chung, "Reduction of birefringence and polarization-dependent loss of long-period fiber gratings fabricated with a KrF excimer laser," vol. 11, no. 23, pp. 3087-3092, 2003.
[16]C.-L. Tien, T.-W. Lin, H.-Y. Hsu, L.-C. Chen, Y.-C. Chen, and W.-F. Liu, "Double-sided polishing long period fiber grating sensors for measuring liquid refractive index," in 2009 Asia Communications and Photonics conference and Exhibition (ACP), 2009, vol. 2009, pp. 1-6: IEEE.
[17]H. Chen, Z. Gu, K. J. S. Gao, and A. B. Chemical, "Humidity sensor based on cascaded chirped long-period fiber gratings coated with TiO2/SnO2 composite films," vol. 196, pp. 18-22, 2014.
[18]S. Schlangen et al., "Long-period gratings in highly germanium-doped, single-mode optical fibers for sensing applications," vol. 18, no. 5, p. 1363, 2018.
[19]K. Fukushima, M. G. Soares, K. Nakaya, A. Wada, S. Tanaka, and F. Ito, "Wavelength Tunable and Switchable EDF Ring Laser using Cascaded-Chirped Long Period Fiber Grating," in 2020 Opto-Electronics and Communications Conference (OECC), 2020, pp. 1-3: IEEE.
[20]R. Oliveira, L. M. Sousa, A. M. Rocha, R. Nogueira, and L. J. S. Bilro, "UV Inscription and Pressure Induced Long-Period Gratings through 3D Printed Amplitude Masks," vol. 21, no. 6, p. 1977, 2021.
[21]Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. G. Kazansky, and K. J. O. l. Hirao, "Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses," vol. 24, no. 10, pp. 646-648, 1999.
[22]F. Hindle et al., "Inscription of long-period gratings in pure silica and germano-silicate fiber cores by femtosecond laser irradiation," vol. 16, no. 8, pp. 1861-1863, 2004.
[23]D. Wang, Y. Wang, and M. Yang, "Microhole-structured long period fiber grating," in Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, 2010, p. BMA5: Optical Society of America.
[24]J. a. Duan et al., "Torsion sensing characteristics of long period fiber gratings fabricated by femtosecond laser in optical fiber," vol. 83, pp. 94-98, 2016.
[25]D. Viveiros et al., "Temperature Stability and Spectral Tuning of Long Period Fiber Gratings Fabricated by Femtosecond Laser Direct Writing," vol. 20, no. 14, p. 3898, 2020.
[26]S.-B. Lee, Y.-J. Jung, H.-K. Choi, I.-B. Sohn, and J.-H. J. S. Lee, "Hybrid LPG-FBG Based High-Resolution Micro Bending Strain Sensor," vol. 21, no. 1, p. 22, 2021.
[27]Y.-P. Wang, D. N. Wang, and W. J. A. o. Jin, "CO2 laser-grooved long period fiber grating temperature sensor system based on intensity modulation," vol. 45, no. 31, pp. 7966-7970, 2006.
[28]P.-H. Lu, K.-C. Hsu, S.-S. Jyu, and Y. Lai, "Periodically tapered long-period fiber gratings by CO2 laser heating and tension stretching," in OECC 2010 Technical Digest, 2010, pp. 626-627: IEEE.
[29]X. Zhong, Y. Wang, C. Liao, S. Liu, J. Tang, and Q. J. O. l. Wang, "Temperature-insensitivity gas pressure sensor based on inflated long period fiber grating inscribed in photonic crystal fiber," vol. 40, no. 8, pp. 1791-1794, 2015.
[30]W. Liu et al., "A S-shaped long-period fiber grating with ultra-high strain sensitivity," vol. 299, p. 111614, 2019.
[31]C. Sun et al., "A Novel Twist Sensor Based on Long-Period Fiber Grating Written in Side-Helical Polished Structure," vol. 32, no. 5, pp. 275-278, 2020.
[32]C. Jiang, Y. Liu, and C. J. I. P. T. L. Mou, "Polarization-Maintaining Fiber Long-Period Grating Based Vector Curvature Sensor," vol. 33, no. 7, pp. 358-361, 2021.
[33]C.-H. Chen, T.-C. Tsao, J.-L. Tang, and W.-T. J. S. Wu, "A multi-D-shaped optical fiber for refractive index sensing," vol. 10, no. 5, pp. 4794-4804, 2010.
[34]G. Quero et al., "Evanescent-wave LPFG in D-fiber by periodically patterned overlay," in Fourth European Workshop on Optical Fibre Sensors, 2010, vol. 7653, p. 76531G: International Society for Optics and Photonics.
[35]L.-Y. Niu, Q. Wang, J.-Y. Jing, and W.-M. J. O. C. Zhao, "Sensitivity enhanced D-type large-core fiber SPR sensor based on Gold nanoparticle/Au film co-modification," vol. 450, pp. 287-295, 2019.
[36]Q. Wang, J.-Y. Jing, X.-Z. Wang, L.-Y. Niu, W.-M. J. I. T. o. I. Zhao, and Measurement, "A D-shaped fiber long-range surface plasmon resonance sensor with high Q-factor and temperature self-compensation," vol. 69, no. 5, pp. 2218-2224, 2019.
[37]X. Jin et al., "A strain sensor with low temperature crosstalk based on re-modulation of D-shaped LPFG," vol. 177, p. 109300, 2021.
[38]P. Pilla et al., "Long period grating working in transition mode as promising technological platform for label-free biosensing," vol. 17, no. 22, pp. 20039-20050, 2009.
[39]L. Guerrini et al., "Chemical speciation of heavy metals by surface-enhanced Raman scattering spectroscopy: identification and quantification of inorganic-and methyl-mercury in water," vol. 6, no. 14, pp. 8368-8375, 2014.
[40]E. Brzozowska et al., "Recognition of bacterial lipopolysaccharide using bacteriophage-adhesin-coated long-period gratings," vol. 67, pp. 93-99, 2015.
[41]D. R. Raj, S. Prasanth, T. Vineeshkumar, and C. J. O. C. Sudarsanakumar, "Surface Plasmon Resonance based fiber optic sensor for mercury detection using gold nanoparticles PVA hybrid," vol. 367, pp. 102-107, 2016.
[42]S.-Y. Tan, S.-C. Lee, T. Okazaki, H. Kuramitz, and F. J. O. C. Abd-Rahman, "Detection of mercury (II) ions in water by polyelectrolyte–gold nanoparticles coated long period fiber grating sensor," vol. 419, pp. 18-24, 2018.
[43]M. Piestrzyńska et al., "Ultrasensitive tantalum oxide nano-coated long-period gratings for detection of various biological targets," vol. 133, pp. 8-15, 2019.
[44]M. E. Martínez-Hernández, J. Goicoechea, and F. J. J. S. Arregui, "Hg2+ optical fiber sensor based on LSPR generated by gold nanoparticles embedded in LBL nano-assembled coatings," vol. 19, no. 22, p. 4906, 2019.
[45]H. Yuan et al., "Mercaptopyridine-functionalized gold nanoparticles for fiber-optic surface plasmon resonance Hg2+ sensing," vol. 4, no. 3, pp. 704-710, 2019.
[46]V. Prakashan et al., "Investigations on SPR induced Cu@ Ag core shell doped SiO2-TiO2-ZrO2 fiber optic sensor for mercury detection," vol. 507, p. 144957, 2020.
[47]M. Janik et al., "Optical fiber aptasensor for label-free bacteria detection in small volumes," vol. 330, p. 129316, 2021.
[48]Z. Fang, K. Chin, R. Qu, and H. Cai, Fundamentals of optical fiber sensors. John Wiley & Sons, 2012.
[49]T. L. Singal, Optical fiber communications: principles and applications. Cambridge University Press, 2016.
[50]E. Snitzer, "Cylindrical dielectric waveguide modes," JOSA, vol. 51, no. 5, pp. 491-498, 1961.
[51]D. Gloge, "Weakly guiding fibers," Applied optics, vol. 10, no. 10, pp. 2252-2258, 1971.
[52]R. Gafsi and M. A. El-Sherif, "Analysis of induced-birefringence effects on fiber Bragg gratings," in Optical Fiber Technology, 2000, vol. 6, no. 3, pp. 299-323.
[53]R. A. Kadhim, L. Yuan, H. Xu, J. Wu, and Z. J. I. S. J. Wang, "Highly Sensitive D-Shaped Optical Fiber Surface Plasmon Resonance Refractive Index Sensor Based on Ag-α-Fe 2 O 3 Grating," vol. 20, no. 17, pp. 9816-9824, 2020.
[54]T. Erdogan, "Fiber grating spectra," Journal of lightwave technology, vol. 15, no. 8, pp. 1277-1294, 1997.
[55]林楷翔, "具金屬結構之長週期光纖光柵製作與應用, 國立高雄應用科技大學機械系碩士論文," 2015.
[56]T. Erdogan, "Cladding-mode resonances in short-and long-period fiber grating filters," JOSA A, vol. 14, no. 8, pp. 1760-1773, 1997.
[57]H. A. Haus and W. Huang, "Coupled-mode theory," Proceedings of the IEEE, vol. 79, no. 10, pp. 1505-1518, 1991.
[58]W.-P. Huang, "Coupled-mode theory for optical waveguides: an overview," JOSA A, vol. 11, no. 3, pp. 963-983, 1994.
[59]H. Kogelnik and C. Shank, "Coupled‐wave theory of distributed feedback lasers," Journal of applied physics, vol. 43, no. 5, pp. 2327-2335, 1972.
[60]H. Kogelnik, "Filter response of nonuniform almost‐periodic structures," Bell System Technical Journal, vol. 55, no. 1, pp. 109-126, 1976.
[61]V. Mizrahi and J. E. Sipe, "Optical properties of photosensitive fiber phase gratings," Journal of lightwave technology, vol. 11, no. 10, pp. 1513-1517, 1993.
[62]M. Matsuhara, K. Hill, and A. Watanabe, "Optical-waveguide filters: Synthesis," JOSA, vol. 65, no. 7, pp. 804-809, 1975.
[63]M. Yamada and K. Sakuda, "Analysis of almost-periodic distributed feedback slab waveguides via a fundamental matrix approach," Applied optics, vol. 26, no. 16, pp. 3474-3478, 1987.
[64]K. A. Winick and J. E. Roman, "Design of corrugated waveguide filters by Fourier-transform techniques," IEEE Journal of Quantum Electronics, vol. 26, no. 11, pp. 1918-1929, 1990.
[65]P. Verly, J. Dobrowolski, W. J. Wild, and R. Burton, "Synthesis of high rejection filters with the Fourier transform method," Applied optics, vol. 28, no. 14, pp. 2864-2875, 1989.
[66]J. Xia, A. K. Jordan, and J. A. Kong, "Electromagnetic inverse-scattering theory for inhomogeneous dielectrics: the local reflection model," JOSA A, vol. 11, no. 3, pp. 1081-1086, 1994.
[67]K. A. Winick, "Effective-index method and coupled-mode theory for almost-periodic waveguide gratings: a comparison," Applied optics, vol. 31, no. 6, pp. 757-764, 1992.
[68]J. L. Frolik and A. Yagle, "An asymmetric discrete-time approach for the design and analysis of periodic waveguide gratings," Journal of lightwave technology, vol. 13, no. 2, pp. 175-185, 1995.
[69]P. S. J. Russell and T. Birks, "A Hamiltonian approach to propagation in chirped and non-uniform Bragg grating structures," 1995.
[70]L.Poladian,"Variational technique for nonuniform gratings and distributed-feedback lasers," JOSA A, vol. 11, no. 6, pp. 1846-1853, 1994.
[71]G. W. C. Kaye and T. H. Laby, Tables of physical and chemical constants and some mathematical functions. Longmans, Green and Company, 1911.
[72]S. P. Clark, Handbook of physical constants. Geological Society of America, 1966.
[73]ShuX,ZhangL,BennionI.Sensitivitycharacteristicsoflong-periodfiber gratings. Journal of Lightwave Technology 2002; 20: 255–266.
[74]J. P. Smith, S. Nadella, N. J. C. Osborne, m. gastroenterology, and hepatology, "Gastrin and gastric cancer," vol. 4, no. 1, pp. 75-83, 2017.
[75]Shu X, Zhang L, Bennion I. "Sensitivity characteristics of long-period fiber gratings," Journal of Lightwave Technology, vol. 20, pp. 255–266, 2002
[76]A. K. Sharma, R. Jha, and B. D. Gupta, “Fiber-optic sensors based on surface plasmon resonance: A comprehensive review,” IEEE Sensors J., vol. 7, no. 8, pp. 1118–1129, Aug. 2007.