臺灣博碩士論文加值系統

壓電致動器因具備體積小、高精密、響應快、高剛性，且無摩擦力及背隙等優點，廣泛地運用於各種精密機械工業如精密定位系統等，但其伸縮行程有限，故常需加入一位移放大機構來改善其有效行程。本研究利用兩個不同截面積之波紋管與液壓所構成的位移放大機構，建構加工機之進給刀座。首先，進行基礎特性實驗，施加50 V至壓電致動器，刀座所產生之位移為42 μm，位移放大率達4.6倍，有別於鉸鏈式位移放大機構，具有高剛性及響應快的優點。接著，為克服壓電致動器之非線性遲滯特性(Hysteresis)，運用三種控制法探討其對於某一漸減振幅之加工路徑的追跡特性，其一為具有強健性的順滑模態控制(Slide mode control, SMC)，其次為適應性分數階快速積分終端順滑模態控制(Adaptive fractional-order fast integral terminal sliding mode control, AFOFITSMC)，最後為基於干擾觀測器之分數階快速積分終端順滑模態控制(FOFITSMC based on a disturbance observer, FOFITSMC-DO)．根據鑑別率為81.13 %的非線性系統，針對最大振幅為40 μm的加工路徑進行追跡模擬的結果，SMC、Adaptive FOFITSMC、FOFITSMC-DO三者的穩態誤差分別為3 μm、0.3 μm、0.28 μm．最後，建構myRIO 1900即時控制系統，以加工路徑的控制點數為20000，進行控制實驗的結果，三者的初始追蹤誤差分別為5 μm、3 μm、3 μm，最後的追蹤精度分別為0.13 μm、0.03 μm、0.03 μm，但AFOFITSMC具有較大之抖振現象，而FOFITSMC-DO卻良好的抑制抖振現象，證明FOFITSMC-DO最適合應用於本研究之具液壓式位移放大機構之刀座的追蹤控制。

Piezoelectric actuators are widely used in various precision machine industries such as precision positioning systems because of their small size, high precision, fast response, high rigidity, and no friction and backlash, etc. However, their telescopic travel is limited, so a displacement amplification mechanism is often needed to improve their effective travel. In this study, a displacement amplification mechanism composed of two corrugated tubes with different cross-sectional areas and hydraulic pressure is used to construct the tool holder of the machining machine. Firstly, the basic characteristic experiment was conducted, and the displacement produced by the tool holder was 42 μm when 50 V was applied to the piezoelectric actuator, with a displacement amplification rate of 4.6 times, which is different from the hinge-typed displacement amplification mechanism, with the advantages of high rigidity and fast response. Then, in order to overcome the non-linear hysteresis of the piezoelectric actuator, three control methods are used to explore the tracking control of a non-axisymmetric shape with decreasing amplitude. One is robust sliding mode control (SMC), followed by adaptive fractional-order fast integral terminal sliding mode control (AFOFITSMC), and finally fractional-order fast integral terminal sliding mode control based on disturbance observer (FOFITSMC-DO). Based on the non-linear system with 81.13% discrimination rate, the trace simulation results of the processing path with the maximum amplitude of 40 μm show that the steady-state errors of SMC, AFOFITSMC, and FOFITSMC-DO are 3 μm, 0.3 μm, and 0.28 μm, respectively. Finally, the myRIO 1900 real-time control system is constructed, and the number of control points of the processing path is 20000. The results of the control experiment show that the initial tracking errors of the three are 5 μm, 3 μm, and 3 μm, respectively, and the final tracking accuracies are 0.13 μm, 0.03 μm, and 0.03 μm, respectively. From the experimental results, it is indicated that AFOFITSMC has a larger chattering phenomenon and FOFITSMC-DO can suppress the chattering phenomenon. Therefore, it is validated that FOFITSMC-DO is most suitable for the tracking control of the tool holder with hydraulic displacement amplification mechanism in this study.

摘要 i
ABSTRACT ii
目錄 iv
圖目錄 vi
表目錄 viii
符號說明 ix
第一章 緒論 1
1.1 研究背景與目的 1
1.2 文獻回顧 2
1.2.1 有關放大機構進給刀座之研究 2
1.2.2 有關控制法之研究 5
1.3 研究方法與流程 6
1.4 論文架構 7
第二章 液壓式放大壓電定位刀座 9
2.1 壓電進給刀座系統 9
2.1.1液壓式位移放大機構介紹 9
2.1.2壓電致動器 10
2.1.3壓電保護套 11
2.2 實驗設備 15
2.2.1 NI myRIO 1900控制器 15
2.2.2 單晶鑽石刀具 17
2.3 量測設備 18
2.3.1 光學尺 18
2.3.2 訊號擷取裝置 20
2.4 液壓式放大壓電進給刀座特性實驗 20
2.4.1 實驗裝置 21
2.4.2 斜坡響應 22
2.4.3 步階響應 25
2.4.4 系統分析與建模 26
2.4.5 系統鑑別 31
第三章 控制理論 34
3.1 順滑模態控制 34
3.1.1 理論介紹 34
3.1.2 順滑面 36
3.1.3 控制律 37
3.2 適應性分數階快速積分終端順滑模態控制 41
3.3 基於干擾觀測器之分數階快速積分終端順滑模態控制 45
第四章 控制器設計與模擬 48
4.1 非軸對稱非球面形狀 48
4.2 順滑模態控制 52
4.2.1 控制設計 52
4.2.2 穩定性證明 53
4.2.3 模擬結果 55
4.3 適應性分數階快速積分終端順滑模態控制 56
4.3.1 控制設計 56
4.3.2 穩定性證明 58
4.3.3 模擬結果 60
4.4 基於干擾觀測器之分數階快速積分終端順滑模態控制 63
4.4.1 控制設計 63
4.4.2 穩定性證明 64
4.4.3 模擬結果 66
4.5 本章結語 68
第五章 控制法實際驗證 73
5.1 控制輸入與系統輸出擷取 73
5.2 實驗結果 73
5.2.1 順滑模態控制 73
5.2.2 適應性分數階快速積分終端順滑模態控制 75
5.2.3 基於干擾觀測器之分數階快速積分終端順滑模態控制 77
第六章 結論與未來展望 81
6.1 結論 81
6.2 未來展望 81
參考文獻 83

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