在精密機械加工領域中，加工元件的尺寸與精度取決於加工機台的定位和精度準確性。因此，機台的設計和控制是實現高品質加工的關鍵。
本研究使用行程±2mm以上的三軸長行程精密平台進行實驗。平台結構由鋁合金平台和線性導軌組成，控制方面則使用 MATLAB-Simulink 進行模型編譯和控制。通過控制音圈馬達使平台達到預期位移，並使用雷射干涉儀量測各軸的位移量，進行平台位移觀察，以測試平台控制性和其他特性。首先使用PID進行平台控制，並觀察平台各軸的控制狀況。發現平台控制良好後，增加使用NARX和DNLRX摩擦力模型作為前饋控制器，進行實驗觀察，結果表明控制器的效果更佳，誤差更小。最後，將兩個控制器的實驗結果進行比較，同時證明它們對精密平台控制的有效性。

In the field of precision machining, the size and accuracy of machined components depend on the machining equipment's positioning and precision accuracy. Therefore, the design and control of the machine tool are crucial for achieving high-quality machining.
This study conducted experiments using a three-axis long-stroke precision platform with a travel range of ±2mm or above. The platform structure consists of an aluminum alloy platform and linear guides, and the control aspect utilizes MATLAB-Simulink for model compilation and control. The platform is driven by voice coil motors to achieve the desired displacements, and the displacement of each axis is measured using a laser interferometer for observation and evaluation of the platform's control performance and other characteristics. Initially, PID control was employed for platform control, and the control performance of each axis was observed. After confirming satisfactory platform control, NARX and DNLRX friction models were incorporated as feedforward controllers. Experimental observations indicated improved control performance and reduced error with the integration of these controllers. Finally, the experimental results of the two controllers were compared to demonstrate their effectiveness in precision platform control.

摘要…i
Abstract…ii
誌謝…iii
目錄…iv
表目錄…vi
圖目錄…vii
符號表…x
第一章 緒論…1
1.1前言…1
1.2 研究動機與目的…1
1.3 文獻回顧…1
1.4 論文架構…3
第二章 系統架構介紹…4
2.1 平台系統介紹…5
2.1.1 X-Y交叉滾子導軌平台…5
2.1.2 Z軸升降平台…6
2.2 控制系統介紹…7
2.2.1 量測系統…7
2.2.2 音圈馬達及驅動器…9
2.2.3 dSPACE 控制介面版及使用軟體介紹…10
第三章 系統數學模型與控制器設計…12
3.1系統數學模型之建立…12
3.2 飽和型繼電器回授法…12
3.3 步階響應測試法…15
3.4 PID控制器設計…17
3.5 DNLRX反摩擦力控制設計…18
3.6 NARX 反摩擦力模型…20
3.7 DNLRX與NARX的測試結果…21
3.7.1 DNLRX 模型…23
3.7.2 NARX 模型…26
第四章 實驗控制結果與分析…28
4.1 控制器測試結果…28
4.1.1 兩種PID控制器測試結果…28
4.1.2 X軸 PID控制 Sine波…29
4.1.3 X軸 PID+NARX控制 Sine波…31
4.1.4 X軸 PID+DNLRX控制 Sine波…32
4.1.5 Y軸 PID控制 Sine波…34
4.1.6 Y軸 PID+NARX控制 Sine波…36
4.1.7 Y軸 PID+DNLRX控制 Sine波…37
4.1.8 Z軸 PID控制 Sine波…39
4.1.9 Z軸 PID+NARX控制 Sine波…41
4.1.10 Z軸 PID+DNLRX控制 Sine波…42
4.1.11 X軸 PID控制 梯形波…45
4.1.12 X軸 PID+NARX控制 梯形波…45
4.1.13 X軸 PID+DNLRX控制 梯形波…46
4.1.14 Y軸 PID控制 梯形波…46
4.1.15 Y軸 PID+NARX控制 梯形波…46
4.1.16 Y軸 PID+DNLRX控制 梯形波…47
4.1.17 Z軸 PID控制 梯形波…47
4.1.18 Z軸 PID+NARX控制 梯形波…47
4.1.19 Z軸 PID+DNLRX控制 梯形波…48
4.2 三軸PID控制…50
第五章 結論與未來展望…54
5.1 結論…54
5.2 未來與展望…54
參考文獻…55
Extended Abstract…59

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