臺灣博碩士論文加值系統

本論文提出使用模仁翻印奈米壓印溶膠凝膠法來製造用於氣體感測的導模共振(GMR)元件，先利用濺鍍的方式在玻璃基板鍍上高折射率材料二氧化鈦薄膜，再使用市售的二氧化鈦溶膠凝膠將光柵結構壓印在二氧化鈦薄膜上，形成光柵波導結構，此為先鍍後壓製程，也可以先壓印光柵結構再濺鍍二氧化鈦薄膜，此為先壓後鍍製程，我們比較兩種製程元件的共振特性；之後再以旋轉塗佈的方式在光柵表面覆蓋上一層聚二甲基矽氧烷(PDMS)來完成氣體感測器製作。感測器工作原理為：當有揮發性有機物經過感測器表面時，PDMS會因吸收揮發性有機物而體積膨脹導致密度變小，相當於改變在導模共振元件表面的折射率，因此會改變元件的共振角。在氣體感測器的量測系統中，我們將雷射光的入射角設定在共振角附近使其穿透光強度變化率最大，當感測器因吸收揮發性有機物而改變共振角時會導致穿透光強度的變化，光強度變化愈大，氣體的濃度愈高；此外，不同的揮發性有機物因PDMS的吸收效率不同可以分辨出不同的氣體，我們測試了PDMS吸收乙醇與異丙醇在共振角偏移速度的差異，乙醇會較快出現反應，反之異丙醇則會比較慢。

In this paper, we propose the use of die-imprinted nanoimprinted fusion gelation for the fabrication of guided mode resonance (GMR) elements for gas sensing. For a start, we use sputtering to coat the glass substrate with a high refractive index material, titanium dioxide film. Then, we use commercially available titanium dioxide melt gel to emboss the grating structure on the titanium dioxide film to form the grating waveguide structure, which is the first plating and then pressing process. On the other hand, we can also emboss the lenticular structure first and then sputter the titanium dioxide film, and it is the first press and then plating process. We compare the resonance characteristics of the two process components. Then, we finish the gas sensor by coating the grating surface with a layer of polydimethylsiloxane (PDMS) by rotational coating. The working principle of the sensor is as follows: when a volatile organic substance passes over the surface of the sensor, the PDMS will absorb the volatile organic substance and expand in volume, resulting in a decrease in density, which is equivalent to a change in the refractive index on the surface of the guided mode resonance element, thus changing the resonance angle of the element. In a gas sensor measurement system, we set the incident angle of the laser light near the resonance angle to maximize the rate of change of its penetrating light intensity. When the resonance angle of the sensor changes due to the absorption of volatile organic substances, it causes a change in the intensity of the transmitted light. The greater the change in light intensity, the higher the concentration of gas. In addition, different volatile organic compounds can be distinguished from each other by the different absorption efficiency of PDMS. We tested the difference between PDMS absorption of ethanol and isopropanol in the resonance angle shift velocity. Ethanol reacts more quickly, while isopropyl alcohol reacts more slowly.

摘要....i
Abstract....ii
誌謝....iii
目錄....iv
表目錄....vi
圖目錄....vii
第一章 緒論....- 1 -
1.1 研究動機與目的....- 1 -
1.2 文獻回顧....- 2 -
1.3 研究方法....- 5 -
1.4 論文架構....- 5 -
第二章 導模共振原理....- 6 -
2.1 波導理論....- 6 -
2.1.1 GMR介紹....- 6 -
2.2 導模共振原理....- 8 -
2.3 嚴格耦合波分析法....- 10 -
第三章 模仁翻印之導模共振元件製作....- 12 -
3.1 導模共振元件材料介紹....- 12 -
3.1.1 聚二甲基矽氧烷(PDMS)....- 12 -
3.1.2 二氧化矽(SiO2)....- 13 -
3.1.3 二氧化鈦(TiO2)....- 13 -
3.2 導模共振元件製程介紹....- 13 -
3.2.1 光柵母模翻印聚二甲基矽氧烷(PDMS)之模仁....- 14 -
3.2.2 溶膠-凝膠法(Sol-Gel)之TiO2之奈米壓印製程....- 15 -
3.2.3 真空磁力固定支架製作....- 16 -
3.2.4 波導層鍍膜(射頻磁控共濺鍍系統)....- 18 -
3.3 軟硬體與程式選用....- 20 -
3.3.1 LabVIEW程式控制....- 21 -
3.3.2 Rsoft-DiffractMOD....- 22 -
第四章 量測系統與結果....- 24 -
4.1 共振角測量....- 24 -
4.1.1 穿透式共振角測量系統....- 24 -
4.2 模擬與測量結果對照....- 25 -
4.3 PDMS吸收揮發性氣體之感測元件....- 30 -
4.3.1 實驗架構....- 30 -
4.3.2 量測結果與應用分析....- 33 -
第五章 結論....- 41 -
參考文獻....- 42 -
Extended Abstract....- 43 -

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