臺灣博碩士論文加值系統

本論文在氧化鋅薄膜上成長奈米柱並應用於表面聲波之紫外光感測，以射頻磁控濺鍍法分別在鉭酸鋰(LiTaO3) 36°Y-X與42°Y-X基板上成長C軸(002)取向的氧化鋅(ZnO)薄膜，並在氧化鋅薄膜上利用黃光微影製程製作線寬5μm的鋁金屬指叉電極完成一表面聲波型紫外光感測器之基本結構。為了增強元件對紫外光的靈敏度，本文在其氧化鋅薄膜上使用水熱法成長不同參數之奈米柱，藉此來加強對紫外光的靈敏度，並透過X光繞射分析儀(XRD)、場發射掃描式電子顯微鏡(FE-SEM)以及向量網路分析儀(VNA)來觀察氧化鋅奈米柱的表面形態、晶體結構與紫外光的靈敏度。本文主要探討不同的奈米柱參數、成長時間以及薄膜厚度並成長於36°與42°Y-X鉭酸鋰基板，來研究紫外光對元件的插入損耗、中心頻率與相位的影響。

The ZnO films with c-axis (002) orientation have been successfully deposited on the 36°and 42°Y-X LiTaO3 substrate by RF magnetron sputtering system, respectively. The ZnO nanorods grown on the ZnO film via hydrothermal method to fabricate a surface acoustic wave (SAW) ultraviolet sensor. The interdigital transducer (IDT) with a line width of 5μm was made by photolithography process and it was placed on the ZnO film. The basic structure of ultraviolet (UV) sensor is IDT/ZnO/LiTaO3. The nanorods grown on the ZnO film easily absorbs UV, which enhances the UV sensitivity for the SAW sensor. The crystalline structure, surface morphology and UV sensitivity of the ZnO films, nanorods, and sensor were examined by X-ray diffraction, scanning electron microscopy and vector network analyzer, respectively. Effects of ZnO film thickness and nanorods length on UV sensitivity of the SAW sensors were investigated.

摘要.........................................................................i
Abstract....................................................................ii
誌謝.......................................................................iii
目錄........................................................................iv
表目錄.....................................................................vii
圖目錄....................................................................viii
第一章、 緒論.................................................................1
1.1前言......................................................................1
1.2文獻回顧..................................................................3
1.2.1表面聲波................................................................3
1.2.2氧化鋅介紹..............................................................3
1.2.3氧化鋅紫外光感測器.......................................................5
第二章、 基礎理論.............................................................7
2.1壓電效應..................................................................7
2.1.1正壓電效應..............................................................7
2.1.2逆壓電效應..............................................................8
2.2壓電材料..................................................................8
2.2.1壓電基板之特性...........................................................9
2.3表面聲波元件概述..........................................................10
2.3.1表面聲波之波速與中心頻率................................................10
2.3.2機電耦合係數............................................................11
2.3.3插入損耗 (Insertion Loss)..............................................11
2.3.4頻率溫度係數............................................................12
2.4表面聲波.................................................................13
2.4.1雷利表面聲波(Rayleigh Surface Acoustic Waves)...........................13
2.4.2水平剪切聲波(Shear Horizontal Acoustic Waves)...........................13
2.4.3表面漂移塊體波(Surface Skimming Buck Waves, SSBW).......................13
2.4.4拉福表面聲波(Love Surface Acoustic Waves)...............................14
2.5氧化鋅薄膜沉積方法........................................................15
2.5.1射頻磁控濺鍍............................................................15
2.5.2薄膜成長的機制..........................................................16
2.6氧化鋅奈米柱成長機制......................................................17
2.7紫外光感測原理............................................................19
2.6.1聲電效應(Acoustoelectric effect).......................................20
2.6.2質量負載效應(Mass-loading effect).......................................22
2.6.3光吸收.................................................................22
第三章、 實驗步驟與分析......................................................23
3.1 實驗流程架構.............................................................23
3.2表面聲波元件製作..........................................................24
3.2.1薄膜濺鍍製程............................................................24
3.2.2黃光微影製程............................................................27
3.2.3光罩設計...............................................................29
3.2.4氧化鋅奈米柱之水熱法生長................................................31
3.3分析與量測儀器介紹........................................................33
3.3.1場發射型掃描式電子顯微鏡（Field Emission Scanning Electron Microscope , FE-SEM）.......................................................................33
3.3.2 X光繞射儀（X-ray Diffraction , XRD）...................................33
3.3.3網路分析儀（Network Analyzer）..........................................33
3.4表面聲波元件之紫外光量測..................................................35
3.5實驗藥品、耗材及儀器介紹..................................................36
第四章、 結果與討論..........................................................38
4.1氧化鋅物理特性分析........................................................38
4.1.1氧化鋅薄膜形貌分析......................................................38
4.1.2氧化鋅奈米柱形貌分析....................................................39
4.1.3氧化鋅晶體結構特性分析..................................................63
4.2表面聲波元件量測與分析 ....................................................64
4.2.1 成長3小時奈米柱/氧化鋅薄膜1.2μm/36度鉭酸鋰基板之頻率響應.................65
4.2.2 成長6小時奈米柱/氧化鋅薄膜1.2μm/36度鉭酸鋰基板之頻率響應.................72
4.2.3 成長3小時奈米柱/氧化鋅薄膜0.6μm/36度鉭酸鋰基板之頻率響應.................79
4.2.4 成長6小時奈米柱/氧化鋅薄膜0.6μm/36度鉭酸鋰基板之頻率響應.................84
4.2.5 成長6小時奈米柱/氧化鋅薄膜1.2μm/42度鉭酸鋰基板之頻率響應.................88
4.2.6 成長6小時奈米柱/氧化鋅薄膜0.6μm/42度鉭酸鋰基板之頻率響應.................92
4.2.7 鎳摻雜於氧化鋅奈米柱之頻率響應..........................................96
4.3表面聲波元件之紫外光量測與分析............................................101
4.3.1紫外光波長254nm對NRs/ZnO/36°Y-X LiTaO3之相位影響.......................104
4.3.2紫外光波長254nm對NRs/ZnO/42°Y-X LiTaO3之相位影響.......................106
4.3.3紫外光波長365nm對NRs/ZnO/36°Y-X LiTaO3之相位影響.......................107
4.3.4紫外光波長365nm對NRs/ZnO/42°Y-X LiTaO3之相位影響.......................109
4.3.5紫外光波長254nm對NRs/ZnO/36°Y-X LiTaO3之頻率影響.......................110
4.3.6紫外光波長254nm對NRs/ZnO/42°Y-X LiTaO3之頻率影響.......................112
4.3.7紫外光波長365nm對NRs/ZnO/36°Y-X LiTaO3之頻率影響.......................113
4.3.8紫外光波長365nm對NRs/ZnO/42°Y-X LiTaO3之頻率影響.......................115
4.3.9紫外光波長254nm對NRs/ZnO/36°Y-X LiTaO3之插入損耗影響....................116
4.3.10紫外光波長254nm對NRs/ZnO/42°Y-X LiTaO3之插入損耗影響...................118
4.3.11紫外光波長365nm對NRs/ZnO/36°Y-X LiTaO3之插入損耗影響...................119
4.3.12紫外光波長365nm對NRs/ZnO/42°Y-X LiTaO3之插入損耗影響...................121
4.3.13鎳摻雜氧化鋅奈米柱對紫外光波長254nm之量測..............................122
4.3.14鎳摻雜氧化鋅奈米柱對紫外光波長365nm之量測..............................125
第五章、 結論...............................................................128
參考文獻 ...................................................................131
Extended Abstract..........................................................136

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