臺灣博碩士論文加值系統

本論文為製作一影像式測量導模共振(GMR)元件相位變化之光學系統，可以量測雷射光掃描入射角入射導模共振元件時雷射光之S光與P光的個別的強度變化曲線，並經由記錄干涉條紋位移改變量從而量測出兩者之間的相位差與入射角的關係圖。系統以氦氖雷射作為光源經偏振片從而轉變為線性偏振光，入射至導模共振元件待測元件光柵結構，經沃斯特頓稜鏡(Wollaston Prism)將雷射光以夾角1°將S、P光分離後，通過檢偏器後產生干涉條紋照成像於影像感測器，觀察記錄S、P光重合部分產生的干涉條紋在進入共振角度前後差異，利用LabVIEW程式圖像化干涉條紋影像並計算其偏移量對應的相位值。系統的量測結果與使用電光外差式干涉儀比較，並使用Rsoft模擬結果來驗證。

This paper reports a phase measurement system of a guided-mode resonance (GMR) device to detect the transmitted phase difference between s- and p-polarization of the incident light under the different incident angles. The GMR device is a resonance grating waveguide and can be used as a sensor to detecting the refractive index change on the grating surface. The phase-type detection method has better noise immunity than intensity-type detection. Here, we report the experimental results of the compact common-path phase measurement system proposed by I. Barth, which utilizes a 1°-separation-angle Wollaston prism to detect the phase difference between s- and p-polarization of the incident light. We use a beam expander to enlarge the fringe pattern to improve the detection resolution and measure the transmitted phase of the GMR device by scanning the incident angle. The interference fringes produced by the overlapping part of s- and p-polarized light are recorded by a low-cost WebCam image sensor and shift of the interference fringe is recorded and used to calculate the phase difference curve of the GMR device. Some image processes are applied to the recorded images to obtain the accurate fringe shifting value to convert to phase value. Finally, the measurement results obtained by the proposed system are compared with the electro-optical heterodyne interferometer and the simulation (Rsoft DiffractMOD) results.

摘要……i
Abstract……ii
誌謝……iii
目錄……iv
表目錄……vi
圖目錄……vii
第一章 導論……1
1.1 研究目的與動機……1
1.2　文獻回顧……2
1.2.1 GMR相位量測……2
1.2.2 共光程(common-path)[7]……6
1.3　研究方法……7
1.4　論文架構……8
第二章 導模共振原理與模擬……9
2.1 導模共振原理[8,9]……9
2.2 Rsoft-DiffractMOD[10]……10
2.3 導模共振元件製作流程……15
第三章 穿透式影像相位量測系統……19
3.1 光路結構……19
3.2 精密旋轉平台……22
3.3 軟體選用與程式設計……23
3.3.1 軟體介紹……23
3.3.2 程式控制……23
3.3.3 計算相位……28
第四章 結果與討論……32
4.1 模擬結果對照……32
4.2 相位量測結果……34
第五章 結論與未來展望……39
參考文獻……40
Extended Abstract……41

[1]W.-K. Kuo, N.-C. Huang, H.-P. Weng, and H.-H. Yu, “Tunable phase detection sensitivity of transmitted-type guided-mode resonance sensor in a heterodyne interferometer,” Opt. Express 22(19), 22968–22973 (2014).
[2]W. K. Kuo, S.-H. Syu, P.-Z. Lin, and H. H. Yu, “Tunable sensitivity phase detection of transmitted-type dual-channel guided-mode resonance sensor based on phase-shift interferometry,” Appl. Opt. 55, 903–904 (2016).
[3]P. K. Sahoo, S. Sarkar, and J. Joseph, “High sensitivity guided-mode-resonance optical sensor employing phase detection,” Sci. Rep. 7, 7607 (2017).
[4]Chiang, Min-Xu, Jaturon Tongpakpanang, and Wen-Kai Kuo. "Phase Measurement of Guided-Mode Resonance Device Using Digital Micromirror Device Gratings." Photonics. Vol. 8. No. 5. Multidisciplinary Digital Publishing Institute, (2021).
[5]K. H. Chen, C. C. Hsu, and D. C. Su, “Measurement of wavelength shift by using surface plasmon resonance heterodyne interferometry,” Opt. Commun. 209(1-3), 167–172 (2002).
[6]Kuo, Wen-Kai, Shi-Wei Yang, and Po-Chean Gao. "Transmitted-type guided-mode resonance phase image system for sensing refractive index distribution." 2020 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR). IEEE, 2020.
[7]I. Barth, D. Conteduca, C. Reardon, S. Johnson, and T. F. Krauss, “Common-path interferometric label-free protein sensing with resonant dielectric nanostructures,” Light: Sci. Appl. 9(1), 96 (2020).
[8]P. G. Hermannsson, “Design and use of guided mode resonance filters for refractive index sensing,” Ph.D. dissertation (Technical University of Denmark, 2015).
[9]A. Sharon, D. Rosenblatt and A. A. Friesem, “Resonant grating-waveguide structures for visible and near-infrared radiation,” J. Opt. Soc. Am. A 14 (11), 2985-2993 (1997).
[10]Rsoft Photonic Device Tools 軟體首頁, https://www.synopsys.com/photonic-solutions/rsoft-photonic-device-tools.html.
[11]EM Explorer 軟體首頁, www.emexplorer.net/index.php
[12]LabVIEW 軟體首頁, https://www.ni.com/zh-tw/shop/labview.html
[13]MATLAB 軟體首頁, https://www.mathworks.com/?s_tid=gn_logo