本論文之研究探討使用離心機搭配超音波霧化器噴霧處理ＰＭ2.5 particulate matter (PM)粉塵之探討，本研究所使用之粉塵樣品為ＳiＨ4與Ｏ2結合後所產生之SiO2粉塵做實驗，由於SiO2有不溶於水也不溶於酸使其研究更有其難度，研究經由細微噴霧後之SiO2之粉塵使其粉塵重量與粒徑的變大再由離心機將粉塵甩離之去除效率，由於尾氣處理系統處理氣體後雖將氣體的危害性大幅降低，但隨之效率越高所產生之粉塵也隨之變多，粒徑原先就比較大或是能以水沖刷下來的粉塵以外，也有許多不溶於水或粒徑更小之粉塵無法處理完全，使用SiO2為測試目標也因SiO2擁有不溶於水與粉塵粒徑較小的特性，故才將SiO2當成實驗處理之目標，使尾氣處理系統後產生之ＰＭ2.5除去使尾氣處理系統更加完整。

目前工業發展儼然成為經濟的支柱，而工業製程後所產生之廢棄物也隨之產生，但處理廢棄物之技術卻無法與產業產生之產物成對等的技術成長，在全世界環保意識抬頭的時代對其產生的副產物處理要求訂定更嚴格的目標，裡面又以細懸浮微粒PM2.5為空氣排放之新指標，空氣為生物所需之重要物資，如何將細懸浮微粒處理作為本研就之目的。

由於半導體尾氣之組成成分較為複雜，尾氣處理系統主要以燃燒式、電熱式、電漿式等為多數，其尾氣處理效果越好通常都伴隨大量粉塵，而粉塵中也包含PM2.5方面，傳統尾氣處理系統對PM2.5的處理效果乏善可陳，為搭配尾氣處理系統在各式除塵器中來看，EP靜電吸附結合雖對PM2.5粉塵處理有效果，但須在尾氣系統加裝EP對安全性是有疑慮的，故轉而研究以離心式處理PM2.5粉塵與尾氣系統結合。

The research is discussed the use of a centrifuge with two-fluid spray to treat PM2.5 dust in this paper. We used the SiO2 dust for sample produced by the combination of SiH4 and O2 in this paper. It is more difficult to study because the SiO2 is insoluble in water and acid. Study the removal efficiency of SiO2 dust after fine spraying to make the dust weight and particle size larger, and then the dust is removed by the centrifuge. As the exhaust gas treatment system treats the gas, the hazard of the gas is greatly reduced. However, the higher the efficiency, the more dust is generated. Except for dust whose particle size is relatively large or can be washed away with water. There are also many dusts insoluble in water or smaller in particle size. It cannot be processed completely. Using SiO2 as the test target also because SiO2 has the characteristics of insoluble in water and small dust particle size. Therefore, SiO2 is regarded as the target of the experimental treatment. The PM2.5 generated after the exhaust gas treatment system is removed to make the exhaust gas treatment system more complete.
At present, industrial development has become the backbone of the economy, and the waste generated after the industrial process is also generated. However, the technology for processing waste cannot be developed in parallel with the products produced by the industry. In the era of rising environmental awareness around the world, stricter targets have been set for the disposal of by-products. It also uses fine suspended particulate PM2.5 as a new indicator of air emissions. The air is an important material needed by organisms. So how to treat fine suspended particles as the purpose of this research.
Due to the complex composition of semiconductor exhaust gas, the exhaust gas treatment system is mainly composed of combustion type, electric heating type, plasma type, etc. The better exhaust gas treatment effect is usually accompanied by a large amount of dust, and the dust also contains PM2.5. There is a poor treatment effect on PM2.5 by traditional exhaust gas treatment system. In order to match the exhaust gas treatment system in various dust collectors, the combination of EP electrostatic adsorption is effective for PM2.5 dust treatment. Howerer, it is necessary to install EP in the exhaust system for safety. There are doubts about the performance. So we turned to the study of the centrifugal treatment of PM2.5 dust and the exhaust gas system.

摘要...........i
Abstract...........ii
誌謝...........iii
目錄...........iv
表目錄...........vi
圖目錄...........vii
第一章 緒論...........1
1.1 前言...........1
1.2 研究動機...........2
1.3 研究內容 ...........3
1.3.1 可行性分析...........4
第二章 文獻探討...........8
2.1 舊有除塵系統種類分析比較...........8
2.2 懸浮微粒...........10
2.3 懸浮微粒監測方式...........12
2.4 二氧化矽（SiO2）特性...........13
第三章 實驗流程及方法...........19
3.1 實驗系統組成...........19
3.2 量測系統架構...........20
3.3 氣溶膠檢測儀及MOUDI檢測方法原理...........21
3.4 使用儀器設...........23
第四章 結果與討論...........28
4.1 微霧除塵系統設計...........28
4.2 驗測試與討論...........29
4.2.1 第一代微霧除塵系統實驗測試...........29
4.2.2 探討微霧除塵系統加旋風除塵器對去除率之成效...........31
4.2.3 第二代微霧除塵系統實驗測試...........32
4.3 微霧除塵系統測試與討論...........33
4.3.1 超音波霧化器對處理懸浮微粒之成效...........33
4.3.2 離心機對處理懸浮微粒之成效...........35
4.3.3 微霧除塵系統對細懸浮微粒成效...........36
第五章 結論...........52
5.1 結論...........52
5.2 未來改善方向...........54
參考文獻...........55
Extended Abstract...........56

[1] 湛秀春，2019，“環保署測站細懸浮微粒(PM2.5) 自動與手動儀器比對之研究”， 3
[2] 行政院環境保護署，109，“空氣品質標準法規”，空氣品質監測網1091159220 號令修正發布
[3] 望熙榮譯，民國90年6月，“空氣污染防制” ，中央圖書出版社
[4] 陳世偉編著，民國90年1月，“局部排氣、空氣清凈裝置標準設計和維護管理”， 中誌文化事業有限公司出版
[5] Wayne T. Davis, Air Pollution Engineering Manual 2nd edition, Air & Waste Management Association.
[6] 賴以賢、李王永泉譯，民國91年9月，“空氣污染防制工程”， 滄海書局
[7] 國家教育研究院_空氣動力學直徑
[8] 高雄市政府環境保護局空氣與噪音防制科，“PM2.5的認識”空氣汙染防制網站
[9] 賴盈儒， 107，“港灣城市大氣中細懸浮微粒成份特性之研究---以L 城市為例”24-27
[10] 吳宗德，2014， “ 台灣地區大氣中衍生性氣膠之轉化速率推估及探討” ，11-13
[11] 許志祥，104， “ 探討細懸浮微粒PM2.5自動與手動分析之相關性” ，10-14
[12] 行政院環境保護署，空氣品質監測網，細懸浮微粒手動監測
[13] 環署檢字第 71416 號公告(民89) 空氣中粒狀污染物自動檢測方法－貝他射線衰減法， (NIEA A206.10C)。
[14] 李崇德、魏海青， “ 大氣環境 PM2.5 濃度檢測分析” 環境工程會刊，2
[15] DustTrak II Aerosol Monitor Theory of Operation (EXPMN-001) US，1-2
[16] 洪千喬， 107，“簡易型PM10與PM2.5感測器之效能比對與校正方法建立研究” ，49-50
[17] 陳宏達， 99，“一個多階衝擊器內的微粒反彈及溼度的影響研究” ，14-16
[18] 陳建峰，2002，“超重力技術及應用—新一代反應與分離技術
” ，化學工業出版社材料科學與工程出版中心
[19] Chuen-Jinn Tsai, Chia-Hung Lin, Yu-Min Wang, Cheng-Hsiung Hunag, Shou-Nan Li, Zong-Xue Wu & Feng-Cai Wang, 2005, “An Efficient Venturi Scrubber System to Remove Submicron Particles in Exhaust Gas”, Journal of the Air & Waste Management Association, 55, pp. 319-325.