臺灣博碩士論文加值系統

本研究利用溶膠凝膠法搭配靜電紡絲法於指叉式電極基板上蒐集金屬氧化物半導體纖維薄膜，並調製鑭系鈣鈦礦溶液，浸鍍於金屬半導體薄膜得到異質介面，觀察其特性及應用於氣體感測器上。實驗前半部使用靜電紡絲法制備金屬氧化物奈米纖維薄膜，利用調整機台製程數據與紡絲環境因數得到不同參數，藉此得到較好的纖維成型效果，紡絲完成的金屬氧化物纖維經過乾燥與高溫鍛燒將纖維中高分子材料燃燒後得到多晶結構，退火後對薄膜進行表面、特性與對於氣體的響應性作分析。實驗後半部透過溶膠凝膠法調製LaSrFeO鈣鈦礦溶液，探討不同比例與鍛燒溫度下的鈣鈦礦薄膜特性，並與前半部製備的金屬氧化物纖維薄膜進行浸鍍，藉此得到異質結合薄膜對於氣體感測的影響。

In the study, a metal oxide semiconductor gas sensing film was prepared by an electrospinning method, and prepared perovskite solution by using sol-gel method in the same time. After completing two processes, combine the two materials on the surface of a finger-forked gold electrode substrate. Make it has gas sensing characteristics. In the first part of the experiment, the metal oxide nanofiber film was prepared by electrospinning method, by adjusting the machine process data and environment factor to get different parameters, so as to obtain better fiber forming effect. After electrospinning method, the metal oxide fibers are dried and calcined at high temperature to remove the polymer material in the fibers to obtain a polycrystalline structure. After annealing, we analyzed the characteristic of the surface, material properties and response to toxic gas. In the second part, we prepared LaSrFeO solution by Sol-Gel method, and observed the characteristics of LaSrFeO film in different calcination temperatures. In the final part, the metal oxide fibers film and LaSrFeO film were mixed by spinning coating method to obtaining the heterogeneous bonding film for gas sensing.

摘要 i
ABSTRACT ii
致謝 iii
目錄 iv
第一章 緒論 1
1.1前言 1
1.2 研究動機與目的 2
第二章 基礎原理介紹與文獻回顧 3
2.1 氧化鋅 (ZnO) 3
2.3 靜電紡絲 5
2.3.1 靜電紡絲簡介與文獻回顧 5
2.3.2 靜電紡絲影響因素 6
2.4 氣體感測器 8
2.4.1 氣體感測器介紹 8
2.4.2半導體氣體感測器 11
2.4.3半導體氣體感測器作用原理 12
2.4.4 氣體感測器響應值換算 15
2.5 P-N異質結合 16
第三章 實驗步驟與分析方法 18
3.1實驗架構 18
3.2實驗藥品 18
3.3實驗方法與流程 19
3.3.1 ZnO金屬氧化物纖維製備 19
3.3.2 鑭系鈣鈦礦薄膜製備 21
3.3.3氧化鋅與鑭系鈣鈦礦異質結合 23
3.4感測電極製作 25
3.4.1晶圓清潔 25
3.4.2晶圓製程 25
3.4.3 氣體感測元件設計 27
3.4.4基板清潔 27
3.5製程使用儀器 29
3.5.1靜電紡絲機 29
3.5.2精密天平 30
3.5.3磁石攪拌機 30
3.5.4精密烘箱 31
3.5.5高溫爐 31
3.5.6超音波洗淨機 32
3.6實驗分析儀器 33
3.6.1 高解析場發射掃描式電子顯微鏡(Ultrahigh Resolution Scanning Electron Microscope, UHRFE-SEM) 33
3.6.2 高解析穿透式電子顯微鏡(HR-AEM) 34
3.6.3 前瞻聚焦離子束系統(Advanced Focused Ion Beam System) 35
3.6.4 多功能X光薄膜繞射儀(Mutiourpose X-Ray Thin-Film Diffractiometer, XRD) 36
3.6.6 氣體感測系統 37
第四章 結果與討論 38
4.1 靜電紡絲法製備ZnO奈米纖維 38
4.1.1 ZnO奈米纖維於不同工作電壓下的直徑影響 38
4.1.2 ZnO奈米纖維之熱重分析 40
4.1.3 ZnO奈米纖維之X光薄膜繞射分析 41
4.1.4 ZnO紡絲纖維之掃描式電子顯微鏡分析 42
4.1.5 ZnO紡絲纖維之穿透式電子顯微鏡分析 45
4.1.6 ZnO氣體感測器於不同工作溫度對於H2S響應變化 46
4.1.7 ZnO纖維對H2S在1~5 ppm下的氣體響應比較 47
4.1.8 ZnO紡絲纖維對H2S反應機制 51
4.2溶膠凝膠法合成LaSrFeO薄膜 52
4.2.1 LaSrFeO薄膜之X光薄膜繞射分析 53
4.2.2 LaSrFeO薄膜之掃描式電子顯微鏡分析 54
4.2.3不同燒結溫度對於LaSrFeO薄膜厚度影響 56
4.2.4 LaSrFeO薄膜之穿透式電子顯微鏡分析 58
4.3 ZnO與LaSrFeO纖維異質結合薄膜製備 59
4.3.1 ZnO與LaSrFeO纖維異質結構薄膜之XRD分析 60
4.3.2 ZnO與LaSrFeO纖維異質結構薄膜之掃描式電子顯微鏡分析 61
4.3.3. ZnO與LaSrFeO薄膜異質結合材料的氣體選擇性 64
4.3.4 ZnO與LaSrFeO薄膜異質結合材料對H2S在不同工作溫度下
的響應比較 65
4.3.5 ZnO與LaSrFeO薄膜異質結合材料對1~5ppm 的H2S氣體
響應比較 66
第五章 結論 70
5.1 結論 70
5.2 未來展望 71
參考文獻 72
個人簡歷 80

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