臺灣博碩士論文加值系統

有別於需要外接電源的感測器，自供電感測器擁有不依賴外加電源仍然可以運作的技術。因不需依賴外部電源，使自供電感測器在可運用範圍更廣泛。

在這項工作中，通過水熱法生長鉻摻雜的氧化鋅奈米柱 (NR) 陣列，然後製作並分析了基於壓電奈米發電機 (PENG) 的自供電氣體傳感器。可以看出，通過能量散佈分析儀 (EDS)，氧化鋅奈米柱中的鉻摻雜濃度估計為 0.4wt%。此外，穿透式電子顯微鏡 （TEM）結果表明，生長的氧化鋅奈米柱具有六方纖鋅礦結構。在元件製造過程中，通過雷射雕刻定義電極圖形，並通過射頻濺射技術在ITO-PET基板上沉積銀薄膜。然後PENGs由頂部的銀電極和底部的鉻摻雜氧化鋅奈米柱組成。並使用敲擊系統驅動其PENG。在0.5mM 硝酸鉻摻雜條件下，在沒有通氣體和100ppm 一氧化氮 (NO) 的情況下，PENG 的輸出電壓分別為 1.447V 和 2.323V。顯然這種元件具有自供電特性並且對NO 氣體有明顯的響應。

Unlike sensors that need external power supply, self-powered sensors have technology that can still operate without external power supply. Because it does not need to rely on external power supply, the self-powered sensor can be used in a wider range.
In this work, chromium-doped ZnO nanorod (NR) arrays were grown by hydrothermal route, then the self-powered gas sensors based on piezoelectric nanogenerators (PENGs) were fabricated and characterized. It can be seen that the Cr-doped concentration in the ZnO NRs is estimated to 0.4wt% by energy-dispersive X-ray spectroscopy (EDS). In addition, the transmission electron microscope (TEM) results show that the as-grown ZnO NRs have hexagonal wurtzite structure. In the process of device fabrication, the top electrodes pattern was defined by laser engraving, and the silver thin films were deposited on the ITO-PET substrates by rf-sputtering technique. Then, the PENGs were composed of such Ag top electrodes and Cr-doped ZnO NRs. The PENGs were driven by a special tapping system. Under the doping condition of 0.5mM chromium nitrate, without and with 100ppm nitric oxide (NO), the output voltages of the PENG are 1.447V, and 2.323V, respectively. Obviously, such a device exhibits self-powered characteristics and is sensitive to NO gas.

摘要...........................................................................i
Abstract......................................................................ii
誌謝.........................................................................iii
目錄..........................................................................iv
表目錄........................................................................vi
圖目錄.......................................................................vii
第一章緒論......................................................................1
1.1 前言.......................................................................1
1.2 研究動機與目的..............................................................2
第二章理論基礎與文獻探討.........................................................3
2.1 氧化鋅的材料特性............................................................3
2.1.1 氧化鋅的不同型態結構......................................................4
2.1.2 氧化鋅的光學特性..........................................................5
2.2 濺鍍的原理.................................................................6
2.2.1 射頻濺鍍的優點............................................................8
2.3 水熱法合成氧化鋅奈米柱陣列...................................................9
2.3.1 水熱法的優點..............................................................9
2.4成長氧化鋅奈米柱陣列之化學反應流程............................................10
2.5雷射雕刻...................................................................11
2.6 壓電效應..................................................................11
2.7氧化鋅奈米柱壓電原理........................................................12
2.8可調速敲擊系統..............................................................14
2-8-1 精密敲擊系統原理.........................................................14
2-8-2 精密敲擊系統的優點.......................................................14
2.9 氧化鋅感測氣體原理.........................................................14
第三章實驗步驟與機台介紹........................................................15
3.1 實驗機台與藥品.............................................................15
3.2 實驗架構..................................................................17
3.3基板的準備.................................................................17
3.4電極之製作.................................................................18
3.4.1上電極製作...............................................................18
3.4.2下電極製作...............................................................20
3.5元件製作...................................................................20
3.6材料特性之分析..............................................................21
3.6.1場發射掃描式電子顯微鏡（Field-Emission Scanning Electron Microscope,FE-SEM）.........................................................................21
3.6.2能量散射光譜儀(Energy Dispersive Spectrometry, EDS).......................22
3.6.3高解析穿透電子顯微鏡(High-Resolution Transmission Electron Microscope,HR-TEM)..........................................................................22
3.6.4X光繞射分析儀（X-Ray Diffraction, XRD）...................................23
3.6.5光激發螢光光譜儀(PL)......................................................25
第四章實驗內容與討論...........................................................26
4-1鉻摻雜氧化鋅奈米柱之自供電氣體感測器製備......................................26
4-1-1鉻摻雜氧化鋅奈米柱表面結構與形貌(SEM)......................................27
4-1-2鉻摻雜氧化鋅奈米柱之晶相分析結晶性討論(XRD).................................33
4-1-3 鉻摻雜氧化鋅奈米柱之光激發螢光光譜儀(PL)...................................34
4-1-4鉻摻雜氧化鋅奈米柱氧化鋅奈米柱陣列之成份分析(EDS)............................35
4-1-5 鉻摻雜氧化鋅奈米柱之穿透式電子顯微鏡分析(TEM)..............................37
4-2 鉻摻雜氧化鋅奈米柱陣列自供電氣體感測器量測分析................................41
4-2-1 V-t量測分析比較..........................................................41
第五章........................................................................47
5-1 結論......................................................................47
5-2未來展望...................................................................47
參考文獻......................................................................48
Extended Abstract.............................................................52

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