臺灣博碩士論文加值系統

本論文關注的是使用納米壓印工藝製造的亞波長光柵傳感器在傳感應用中的應用。 已經提出並在實驗中實現了周期性亞波長結構的光學特性。 入射光的入射平面在經典和錐形安裝中都進行了研究。 使用基於 RCWA 和 FDTD 的商業軟件（Rsoft 和 EM Explorer）驗證了所提出結構的相位響應。 提出了一種基於移相干涉法的新型導模諧振相位測量系統。 實現了一種用作空間光調製器的數字微鏡器件。

This dissertation is concerned with the use of subwavelength grating sensors fabricated using nanoimprinting process for optical and sensing applications. The optical characteristics of periodic subwavelength structures have been proposed and realized in experiments. The plane of incidence of the incident light is investigated in both classical and conical mountings. The proposed structures are verified utilizing commercial software (Rsoft, Gsolver, and EM Explorer) based on RCWA and FDTD.
Two guided-mode resonance (GMR) devices based on the nanoimprinting process are proposed. First, tunable polarization-independent GMR filters are reported. The resonance wavelength supported by a 2D grating structure can be tuned to have the same resonance wavelength for both TE and TM-polarized light. The tunable resonance wavelength can be archived by changing the incident angles. Then, a GMR pressure sensor is reported. A low-density polyethylene (LDPE) film is used as a substrate for this GMR device. The LDPE-GMR can be fabricated using a low-cost hot embossing nanoimprint. The TiO2 film can be directly coated onto the imprinted structure on the LDPE surface. The pressure change is detected using the transmission power change of the proposed LDPE-GMR. This pressure sensor reaches a limit of detection (LOD) of 0.012 mbar if the power meter noise can be suppressed to be less than 0.1 W.
In addition to the GMR devices, a dielectric grating-coupled surface plasmon resonance (GCSPR) based on the same fabrication process is also proposed. The grating structure is formed using mesoporous silica sol-gel. The groove of the grating structure is filled using the sol-gel process to create a smooth surface. The reflected light intensity and phase response of the back-side incident GCSPR device are investigated. The limit of detection (LOD) of this backside incident GCSPR sensor can be estimated to be approximately 2×10−5 RIU.
Regarding the phase detection of the GMR device, two novel measurement methods are proposed. First, a reflection-type phase-detection system using an electro-optic heterodyne interferometer is implemented to detect a GMR sensor based azimuth angle rotation. The reflectivity and phase response of the GMR sensor versus azimuth angles are studied numerically and experimentally. The proposed system is employed to perform gas sensing and The LOD is 2.68×10−7 RIU assuming the statistical error phase of 0.01°. Second, the phase shifting interferometer (PSI) based digital micromirror device (DMD) gratings is proposed. In the PSI system, the DMD serves as a spatial light modulator (SLM). The diffraction patterns of the DMD with various grating patterns are analyzed. The proposed DMD-SLM-based PSI system is used to perform the phase measurement of the GMR device. The measurement results of the phase difference between the s- and p-polarizations of the GMR sensor utilizing this DMD-based PSI system are demonstrated.

Chinese Abstract..........................i
English Abstract..........................ii
Acknowledgements..........................iv
Table of Content..........................v
List of figure..........................vii
Chapter 1 Introduction..........................1
1.1 Subwavelength Grating Couplers..........................1
1.2 Surface Plasmon Resonance..........................2
1.3 Guided Mode Resonance..........................4
1.4 Sub-wavelength Grating patterning..........................5
Chapter 2 Phase Interrogation of grating sensors..........................6
2.1 Electro-optic Heterodyne Interferometer [23]..........................6
2.1.1 Phase detection of grating-coupled surface plasmon resonance [20]..........................7
2.1.2 Phase detection of guided-mode resonance [26]..........................8
2.2 Phase-Shifting Interferometry [29]..........................9
2.3 Mach-Zehnder Interferometry [32]..........................10
2.4 Wollaston Interferometry [33]..........................11
Chapter 3 Device Simulation and Fabrication..........................13
3.1 Simulation..........................13
3.1.1 Finite-Difference Time-Domain Method [35]..........................14
3.1.2 Rigorous Coupled Wave Analysis [37]..........................16
3.2 Fabrication..........................18
3.1.1 Material Preparation..........................18
3.1.2 Stamp preparation..........................21
3.1.3 Device fabrication..........................22
Chapter 4 Guided-mode resonance device..........................27
4.1 Tunable polarization-independent GMR filers..........................27
4.1.1 Introduction..........................27
4.1.2 2D GMR structures and simulation results..........................28
4.1.3 Fabrication..........................32
4.2 GMR pressure sensor based on stretchable low-density polyethylene film..........................34
4.2.1 Introduction..........................34
4.2.2 Device structure and simulations..........................36
4.2.3 Fabrication..........................37
4.2.4 Measurement setup and results..........................39
Chapter 5 Phase detection of GC-SPR sensor..........................44
5.1 Introduction..........................44
5.2 Device structure and simulation..........................45
5.3 Fabrication..........................50
5.4 Measurement results..........................52
Chapter 6 Phase detection of GMR sensor Based on Azimuth angle rotation...........................54
6.1 Introduction..........................54
6.2 Device structure and simulation..........................56
6.3 Experimental results..........................58
Chapter 7 Phase measurement of GMR device using DMDs grating..........................64
7.1 Introduction..........................64
7.2 DMD Grating and its diffraction pattern..........................66
7.3 DMD-based PSI system..........................70
7.4 Device structure and simulation..........................74
7.5 Experimental results..........................75
Chapter 8 Conclusions..........................78
Reference..........................80
List of publications..........................88
Extended Abstract..........................89

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