臺灣博碩士論文加值系統

AlTiN薄膜由於其優異的機械性能（包括高硬度，耐磨性和耐蝕性以及出色的熱穩定性）而廣泛用作切削工具、壓鑄模具和汽車零件等各種工業應用中的保護性塗層，為了滿足現代工具在高速乾切應用中不斷增長的需求。本研究使用陰極電弧蒸鍍技術(CAE)鍍製AlTiZrN、AlTiZrSiN多層薄膜，並採用漸進層設計以改善薄膜殘留應力及提升附著性能，針對薄膜結構、表面性質、機械性質與切削性能等進行分析探討。
本實驗藉由使用場發射掃描式電子顯微鏡(FE-SEM)與高解析穿透式電子顯微鏡(HR-TEM)觀察並分析薄膜之微觀結構並搭配X光能量分散光譜分析儀(EDS)測量薄膜元素成份，接著利用X光繞射分析儀(XRD)觀察薄膜之晶體結構及結晶相分析，再使用三維表面輪廓儀與水接觸角儀檢測薄膜的表面性能。機械性質分析先利用洛氏壓痕試驗機及刮痕試驗機評估薄膜與基材之間的附著性能，接著使用微小微克氏壓痕試驗機及奈米壓痕試驗機測量薄膜硬度值及彈性係數，再透過球對盤磨耗試驗機(Ball-On-Disk)觀察薄膜抗磨耗性能。最後將薄膜鍍製在碳化鎢銑刀上，對304不鏽鋼進行循環切削測試，探討薄膜對刀具磨損情況及刀具壽命的影響。
根據研究結果顯示，XRD顯示AlTiSiN/ZrN薄膜由於添加Si元素後，薄膜由強度較強的繞射峰轉變為強度較弱且較寬廣的繞射峰，晶粒尺寸也變小，接著FE-TEM觀察薄膜截面形貌，觀察到薄膜由柱狀晶結構轉為緻密的奈米複合結構，且頂層沒有觀察到明顯之柱狀晶結構。機械性質方面，單層AlTiN薄膜有最高之硬度(31.59GPa)及H3/E*2值(0.293)，而AlTiN/ZrN 1:1薄膜有最佳之抗破裂韌性KIC值(1.08MPa√m)，在連續乾式磨擦鉻鋼球300m後，AlTiN及AlTiN/ZrN 2:1薄膜有大量沾黏情況發生。最後由SUS 304不鏽鋼切削試驗，結果顯示AlTiN/ZrN 1:1薄膜有最低的刀刃磨耗，且從球對盤磨耗分析中可以得知有較低之磨耗率及優異的抗沾黏特性，且有較佳的抗破裂韌性，因此可以有效降低切削沾黏磨損及發生熱裂紋情況進而提升刀具壽命，更優於單層AlTiN薄膜刀具。

AlTiN coatings are widely used as protective coatings in various industrial applications such as cutting tools, die casting moulds, and automobile parts, owing to their excellent properties, namely high hardness, wear and erosion resistance, and excellent thermal stability. To meet the increasing requirements of modern tools in high-speed anddry-cutting applications.
The microstructure of the deposited coatings was characterized using field emission scanning electron microscopy (FE-SEM) and high-resolution transmission electron microscopy (HR-TEM), and the chemical composition was measured using energy dispersive X-ray spectrometry (EDS). X-ray diffraction (XRD) was used to determine the crystal structure and crystalline phases of the films. The surface characteristics of the coatings were detected using three-dimensional surface profile microscopy and water contact angle measurements. A Rockwell indentation tester and Scratch Test were used to evaluate the adhesion strength between the coating and the substrate. The coating hardness value and Young’s modulus were measured by nanoindentation. In addition, to investigate the tribological performance, a ball-on-disk tribometer was used to evaluate the wear resistance of the coating. For the cutting experiment, SUS304 stainless steel was machined by the coated end mills under oil mist conditions using a CNC milling machine.
The XRD results show that the diffraction peak of AlTiSiN/ZrN coating changes from strong to weak and broadens, and the grain size of the coating decreases. The cross-section morphology of the thin film was observed using FE-TEM; the coating changed from a columnar crystal structure to a dense nanocomposite structure, and no obvious columnar crystal structure was observed at the top layer. In terms of mechanical properties, the single-layer AlTiN coating has the highest hardness (31.59GPa) and H3 / E * 2 value (0.293), while the AlTiN/ZrN 1:1 coating has the best fracture toughness KIC(1.08MPa√m)). After 300 m continuous dry friction with a chromium steel ball, there was considerable adhesion in AlTiN and the AlTiN/ZrN 2:1 coatings. Finally, the cutting experiment of SUS 304 stainless steel showed that the AlTiN/ZrN 1:1 coating has the lowest flank wear. From the ball-on-disc test analysis, it is observed that the AlTiN/ZrN 1:1 coating has a lower wear rate, excellent adhesive resistance, and better fracture toughness. Therefore, it can effectively reduce the cutting flank wear and hot crack and further improve the tool lives, which is better than that of a single-layer AlTiN tool coating.

摘要..................................................................i
Abstract.............................................................ii
誌謝.................................................................iv
目錄..................................................................v
表目錄..............................................................vii
圖目錄.............................................................viii
第一章 緒論...........................................................1
1.1 前言..............................................................1
1.2 研究動機與目的.....................................................2
第二章 文獻回顧........................................................3
2.1 陰極電弧蒸鍍系統(cathodic arc evaporation, CAE)....................3
2.1.1 陰極電弧蒸鍍原理.................................................3
2.2 薄膜成長機制.......................................................8
2.3 薄膜結構...........................................................9
2.4 多元氮化物硬質薄膜.................................................11
2.4.1 多層薄膜強化機制.................................................11
2.4.2 高熵合金(HEA)強化機制............................................13
2.4.3 氮化鋁鈦(AlTiN)薄膜..............................................16
2.4.4 氮化鋁鈦鋯(AlTiZrN)薄膜..........................................22
2.4.5 氮化鋁鈦矽(AlTiSiN)薄膜..........................................27
2.5 刀具磨損機制.......................................................31
2.6 切削沃斯田鐵型不鏽鋼................................................34
第三章 實驗方法........................................................36
3.1 實驗流程...........................................................36
3.2 薄膜設計與實驗方法..................................................37
3.2.1 前處理及鍍膜步驟..................................................37
3.2.2 新型電漿增強電磁控弧源............................................39
3.2.3 漸進層AlTiN薄膜製程設計...........................................40
3.2.4 多層AlTiN/ZrN薄膜製程設計.........................................41
3.2.5 多層AlTiSiN/ZrN薄膜製程設計.......................................42
3.3 薄膜微結構分析......................................................43
3.3.1 場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscope, FE-SEM) ........................43
3.3.2 場發射穿透式電子顯微鏡(Field Emission Transmission Electron Microscope, FE-TEM)........................44
3.3.3 X光繞射分析儀(X-Ray Diffractometer, XRD)..........................46
3.4 薄膜表面性質分析.....................................................49
3.4.1 三維表面輪廓儀(3D Surface Profilometer)............................49
3.4.2 接觸角量測儀(Contact Angle, WCA)...................................50
3.5 薄膜機械性質分析......................................................52
3.5.1 洛氏硬度試驗機(Rockwell Hardness Tester)............................52
3.5.2 刮痕試驗儀(Scratch Tester)..........................................54
3.5.3 微小維克氏硬度試驗機(Micro Vickers Hardness Tester)..................55
3.5.4 奈米壓痕試驗機(Nano-indentation).....................................57
3.5.5 球對盤磨耗試驗機(Ball-on-disc wear Tester)...........................58
3.6 CNC高速數控工具機切削加工...............................................59
第四章 結果與討論..........................................................61
4.1 常溫薄膜微結構分析......................................................61
4.1.1 SEM薄膜表面與成份分析................................................61
4.1.2 SEM微結構分析........................................................63
4.1.3 X光繞射分析..........................................................64
4.1.4 TEM薄膜微結構分析....................................................67
4.2 常溫薄膜表面性質分析....................................................75
4.2.1 表面粗糙度分析........................................................75
4.2.2 接觸角量測分析........................................................76
4.3 常溫薄膜機械性質分析....................................................78
4.3.1 洛氏壓痕分析.........................................................78
4.3.2 刮痕試驗分析.........................................................79
4.3.3 微小維克氏硬度分析....................................................81
4.3.4 奈米壓痕分析..........................................................82
4.3.5 破裂韌性分析..........................................................83
4.3.6 薄膜殘留應力分析......................................................85
4.3.7 球對盤磨耗試驗分析....................................................86
4.4 切削加工測試............................................................92
第五章 結論................................................................102
第六章 未來展望............................................................104
參考文獻 ..................................................................105
Extended Abstract.........................................................116

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