臺灣博碩士論文加值系統

在本研究中提出一種光纖感測器：高溫塑型(high-temperature fabrication process) U型彎曲光纖感測(U-shaped FOS)濺鍍銀薄膜與塗覆二氧化鈦(TiO2)奈米粒子，應用於重金屬汞與鉻水溶液檢測，及一種新型的U型電子肌肉光纖感測器，應用於光強度量測。
本研究在重金屬汞水溶液實驗中，將U型光纖感測器濺鍍上一層銀薄膜，量測濃度範圍為0.001 ppm至10.0 ppm，然後對不同厚度的靈敏度感測結果進行分析，結果顯示感測器在100 nm以後的銀薄膜呈現的表面等離子共振最為明顯，其中100 nm的銀薄膜的綜合靈敏度最會優異，平均損耗靈敏度為1.356 dB/ppm，線性度可達0.965，證實在水中微量重金屬汞離子可被U-shaped FOS檢測到。
本研究在重金屬鉻水溶液實驗中，將U型光纖感測器塗覆上一層二氧化鈦(TiO2)薄膜，利用光催化對鉻離子產生反應，量測濃度範圍為0.001 ppm至10.0 ppm，然後對不同製程燒結溫度的靈敏度感測結果進行分析，結果顯示感測器在燒結溫度為500ºC時具有最佳的傳輸損耗靈敏度與線性度，平均傳輸損耗靈敏度可達0.457 dB/ppm，線性度可達0.981，證實在水中微量重金屬Cr3+可被U-shaped FOS感測器檢測到。
本研究提出一種新型的U型電子肌肉光纖感測器，執行光強度實驗，光強度的變化可以改變感測層的有效折射率和收縮率，從而影響光纖中光的共振波長與傳輸損耗，隨著流明度7.05 勒克斯(Lux)增加到437 Lux時，共振波長向長波長方向漂移，且傳輸損耗越來越深。平均共振波長靈敏度為0.001 nm/(lm/m2)，且線性度R2可達0.913；平均傳輸損耗靈敏度為0.0003 dB/(lm/m2)，且線性度R2可達0.638。顯示出U電子肌肉光纖感測器對光感具有良好的線性度以及在線性等優點。

In this study, we propose a fiber optic sensor: a dry thermosetting U-shaped fiber optic sensor (U-shaped FOS) coated with a sputtered silver thin film and titanium dioxide (TiO2) nanoparticles. The sensor is applied for the detection of heavy metal mercury and chromium in aqueous solutions, as well as a novel U-shaped electronic muscle fiber optic sensor for measuring light intensity.
In the experiments with mercury solutions, the U-shaped fiber optic sensor was coated with a layer of silver thin film. The concentration range measured was from 0.001 ppm to 10.0 ppm. The sensitivity of the sensor was analyzed for different film thicknesses. The results showed that the surface plasmon resonance exhibited the most significant response for silver thin films with a thickness of 100 nm and above. The 100 nm silver thin film demonstrated superior overall sensitivity with an average sensitivity of 1.356 dB/ppm and a linearity of 0.965. This confirms the detection capability of the U-shaped FOS sensor for trace amounts of mercury ions in water.
In the experiments with chromium solutions, the U-shaped fiber optic sensor was coated with a layer of TiO2 thin film to enable photocatalytic reaction with chromium ions. The concentration range measured was from 0.001 ppm to 10.0 ppm. The sensitivity of the sensor was analyzed for different sintering temperatures. The results indicated that the sensor exhibited optimal transmission loss sensitivity and linearity at a sintering temperature of 500ºC. The average transmission loss sensitivity was 0.457 dB/ppm, and the linearity reached 0.981. This confirms the detection capability of the U-shaped FOS sensor for trace amounts of chromium ions (Cr3+) in water.
Additionally, we proposed a novel U-shaped electronic muscle fiber optic sensor for measuring light intensity. In the light intensity experiments, the variation in light intensity affected the effective refractive index and contraction of the sensing layer, thus influencing the resonant wavelength and transmission loss in the optical fiber. As the luminance increased from 7.05 Lux to 437 Lux, the resonant wavelength shifted towards longer wavelengths, and the transmission loss became deeper. The average resonant wavelength sensitivity was 0.001 nm/(lm/m2), with a linearity (R2) of 0.913. The transmission loss sensitivity was 0.0003 dB/(lm/m2), with a linearity (R2) of 0.638. These results demonstrate the excellent linearity and linear advantages of the U-shaped electronic muscle fiber optic sensor for light sensing.

摘要 i
ABSTRACT iii
致 謝 v
目錄 vi
圖目錄 x
表目錄 xvii
第一章 序論 1
1.1研究動機 1
1.2研究目的 3
1.3文獻回顧 5
1.3.1 U型光纖製作方法 5
1.3.2銀金屬粒子對光纖與汞離子影響 11
1.3.3光纖感測器量測重金屬(Hg)溶液 16
1.3.4複合塗層TiO2粒子對光纖與鉻離子影響 22
1.3.5光纖感測器量測重金屬(Cr)溶液 26
1.3.6光纖感射器量測光強度 33
1.4 論文架構 36
第二章 基礎理論 39
2.1光纖基本原理 39
2.2光彈理論 48
2.3彎曲型光纖基礎理 51
2.4金屬塗層彎曲型光纖產生表面等離子共振(SPR) 58
2.5 金屬納米粒子塗層光纖產生表面等離子共振(LSPR) 62
第三章 研究方法與步驟 65
3.1光纖製程-高溫塑型彎曲型光纖(U-shaped FOSs)感測器製作 65
3.1.1製程所需設備及材料： 65
3.1.2彎曲型光纖感測器(高溫塑型燒製法)製作步驟 65
3.2光纖製程-彎曲型光纖感測器封裝 67
3.2.1製程所需設備及材料： 67
3.2.2彎曲型光纖感測器封裝製作步驟 67
3.3光纖製程-直流濺鍍銀(Ag)薄膜製程 69
3.3.1製程所需材料 69
3.3.2直流濺鍍銀(Ag)薄膜鍍層U型感測器製程 70
3.4感測層塗層製程- TiO2-PVA混和 71
3.4.1製程所需設備及材料 71
3.4.2 TiO2-PVA製程 71
3.5光纖製程-塗覆奈米二氧化鈦(TiO2)製程 73
3.5.1製程所需設備及材料 73
3.5.2塗覆TiO2塗層U型感測器製程 73
3.6光纖製程-電子肌肉感測器製程 75
3.6.1製程所需設備及材料 75
3.6.3電子肌肉感測器製程 76
3.6高溫塑型彎曲型光纖感測器之液體實驗架構 78
3.7 U型電子肌肉光纖感測器光強度實驗 80
第四章 實驗結果與討論 84
4.1 不同彎曲半徑之高溫塑型彎曲光纖靈敏度實驗之感測 85
4.1.1彎曲半徑2.5mm的感測器折射率靈敏度實驗 86
4.1.2彎曲半徑3.0mm的感測器折射率靈敏度實驗 91
4.1.3彎曲半徑3.5mm的感測器折射率敏度實驗 96
4.1.4不同彎曲半徑光纖感測器折射率實驗結果與討論 101
4.2 不同厚度銀薄膜U型彎曲光纖感測器量測重金屬汞離子實驗 102
4.2.1不同厚度銀薄膜的U型光纖感測器直流濺鍍製程 102
4.2.2厚度50nm銀薄膜感測器汞離子實驗 103
4.2.3厚度100nm銀薄膜感測器汞離子實驗 108
4.2.4厚度150nm銀薄膜感測器汞離子實驗 113
4.2.5 U-shaped 銀薄膜感測器量測汞離子之 SEM 與 EDS 分析 118
4.2.6結論-不同厚度銀薄膜感測器量測汞離子實驗結果與討論 121
4.3 不同燒結溫度的TiO2奈米粒子的U型彎曲光纖探討感測器量測重金屬鉻離子實驗 125
4.3.1不同燒結溫度的TiO2塗層的U型光纖感測器製程 127
4.3.2燒結溫度400ºC的TiO2感測器量測鉻離子實驗 130
4.3.3燒結溫度450ºC的TiO2感測器量測鉻離子實驗 135
4.3.4燒結溫度500ºC的TiO2感測器量測鉻離子實驗 140
4.2.5 U-shaped 二氧化鈦塗層感測器量測鉻離子之 SEM 與 EDS 分析 145
4.3.6結論-不同燒結溫度的TiO2感測器量測鉻離子實驗結果與討論 147
4.4 U型電子肌肉光纖感測器光強度實驗 151
4.4.1 U型電子肌肉光纖感測器製程 152
4.4.2U型電子肌肉光纖感測器光強度實驗 153
4.4.3結論-U型電子肌肉光纖感測器光強度實驗 158
第五章 結論 160
5.1不同彎曲半徑之高溫塑型彎曲光纖靈敏度實驗之感測 160
5.2不同厚度銀薄膜U型彎曲光纖感測器量測重金屬汞離子實驗 160
5.3不同燒結溫度的TiO2奈米粒子的U型彎曲光纖探討感測器量測重金屬鉻離子實驗 161
5.4 U型電子肌肉光纖感測器量測光強度實驗 161
第六章 未來展望 162
6.1新型O型彎曲光纖感測器 162
6.2氫氣感測器製作 163
參考文獻 164

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