臺灣博碩士論文加值系統

本文提出一種製作彎曲型光纖感測器的方法，設計出利於量測的感測器，以回音廊模態(Whispering Gallery Mode；WGM)為基礎，受到外界環境折射率影響，與纖核層及纖殼層的干涉變化等因素，造成波長或是傳輸損耗會有飄移或改變的現象，本研究第一部分是利用光纖燒製法製作出U型結構，並提出一種能控制彎曲半徑的方法，輔以蝕刻製程改變光纖直徑使頻譜波長產生飄移，製作出不同尺寸之感測器應用於實驗，發現在彎曲半徑為2.5 mm且光纖直徑控制在30 μm~40 μm時，在折射率及溫濕度量測上，皆有良好靈敏度表現。
第二部分則是在彎曲型光纖結構上披覆聚乙烯醇(Polyvinyl alcohol ; PVA)高分子感測層，本研究提出將壓電紡絲技術應用於光纖上，利用高壓電使高分子液滴呈帶電狀態，因液滴的表面張力會與靜電排斥力互相抵消使液滴被拉長，進而形成細絲，並將絲堆疊在彎曲光纖感測器上使其型成感測薄膜，PVA薄膜的感濕特性，在濕度量測時發揮良好做用，波長靈敏度可達-0.855 nm/%RH，為了提升靈敏度，在紡絲結構中混入高分子導電材料PEDOT發現波長靈敏度能再提升到-0.990 nm/%RH。由以上可以得知高分子紡絲結構應用於光纖是可行的，藉由其高空隙率及高接觸面積和高分子的專一感測機制，未來可用於發展氣體量測。

This paper proposes a method for fabricating U-shaped optical fiber sensor, which is designed to facilitate the measurement of the sensor. Based on the Whispering Gallery Mode (WGM), which is affected by the refractive index of the external environment. The core layer and cladding layer cause the wavelength or transmission loss to shift. The first part of this study is to use the fiber-fired method to make a U-shaped structure, and propose a method to control the bending radius. The wavelength of the fiber was changed by the etching process to make the wavelength of the spectrum drift. Different sizes of sensors were used in the experiment. It was found that when the bending radius was 2.5 mm and the fiber diameter was controlled from 30 μm to 40 μm, the refractive index 、 temperature and humidity measurement were all with good sensitivity.
The second part is to coat the polyvinyl alcohol (PVA) polymer sensing layer on the U-shaped optical fiber sensor. In this study, the piezoelectric spinning technology is applied to the optical fiber. The high-voltage electricity is used to make the polymer droplets in a charged state. Because the surface tension of the droplets and the electrostatic repulsion force cancel each other out, so that the droplets are elongated, thereby forming fine wire, and the wire is stacked on the U-shapedoptical fiber sensor to make it into a sensing film. The moisture absorption characteristics of PVA film have a good role in humidity measurement. The wavelength sensitivity can reach -0.855 nm/% RH. In order to improve the sensitivity, the polymer conductive material PEDOT is mixed into the spinning structure. We find that the wavelength sensitivity can be further improved to -0.990 nm/% RH. It can be seen from the above that it is feasible to apply the polymer spin structure to the optical fiber sensor, and it can be used for developing gas measurement in the future by its high void ratio, high contact area and specific sensing mechanism .

致謝 I
摘要 II
Abstract III
目錄 V
圖目錄 VIII
表目錄 XVIII
第一章 序論 1
1-1 研究動機 1
1-2 研究背景 2
1-2-1 彎曲型光纖感測器應用於折射率量測 2
1-2-2 彎曲型光纖感測器應用於溫度量測 7
1-2-3 彎曲型光纖感測器應用於濕度量測 11
1-3 研究目的 18
第二章 基礎理論 19
2-1 波長與彎曲半徑之關係 19
2-2 波長與折射率之關係 22
第三章 研究方法與步驟 24
3-1彎曲型光纖感測器製程 24
3-1-1 彎曲型光纖探針燒製法 24
3-1-2 光纖蝕刻製程 25
3-1-3 PDMS感測層製程 27
3-1-4 壓電紡絲 28
3-2 彎曲型光纖感測器實驗架構 31
3-2-1 折射率實驗架構 31
3-2-2 溫度實驗架構 32
3-2-3 濕度實驗架構 33
第四章 實驗結果與討論 34
4-1 不同半徑U型光纖感測器蝕刻與折射率之間的關係 34
4-1-1 彎曲半徑2.53mm 35
4-1-2 彎曲半徑1.57mm 65
4-1-3 彎曲半徑0.54mm 87
4-1-4 綜合討論 105
4-2 塗覆PDMS高分子材料之U型光纖感測器溫度實驗 111
4-2-1 彎曲半徑2.5mm 112
4-2-1.a 無塗覆感測層 光纖直徑125μm之感測器 112
4-2-1.b 塗覆PDMS 光纖直徑125μm之感測器 117
4-2-1.c 塗覆PDMS 光纖直徑78.6μm之感測器 122
4-2-1.d 塗覆PDMS 光纖直徑33.2μm之感測器 127
4-2-2 彎曲半徑1.5mm 132
4-2-2.a 無塗覆感測層 光纖直徑125μm之感測器 132
4-2-2.b 塗覆PDMS 光纖直徑125μm之感測器 137
4-2-2.c 塗覆PDMS 光纖直徑73.6μm之感測器 142
4-2-2.d 塗覆PDMS 光纖直徑31.3μm之感測器 147
4-2-3 彎曲半徑0.5mm 152
4-2-3.a 無塗覆感測層 光纖直徑125μm之感測器 152
4-2-3.b 塗覆PDMS 光纖直徑125μm之感測器 157
4-2-3.c 塗覆PDMS 光纖直徑65.4μm之感測器 162
4-2-3.d 塗覆PDMS 光纖直徑34.7μm之感測器 167
4-2-4 綜合討論 172
4-3 電紡絲高分子PVA之材料U型光纖感測器溼度實驗 173
4-3-1 彎曲半徑2.54 mm光纖直徑125 μm之U型光纖感測器 174
4-3-2 彎曲半徑2.56 mm光纖直徑77.4 μm之U型光纖感測器 179
4-3-3 彎曲半徑2.51 mm光纖直徑32.4 μm之感測器 184
4-3-4 彎曲半徑0.55 mm光纖直徑125 μm之感測器 190
4-3-5 彎曲半徑0.52 mm光纖直徑74.8 μm之感測器 195
4-3-6 彎曲半徑0.54 mm光纖直徑32.4 μm之感測器 200
4-4 電紡絲高分子 PVA-PEDOT之材料U型光纖感測器溼度實驗 205
4-4-1 彎曲半徑2.51 mm光纖直徑125 μm之感測器 206
4-4-2 彎曲半徑2.52 mm光纖直徑76.2 μm之感測器 211
4-4-3 彎曲半徑2.51 mm光纖直徑30.7 μm之感測器 216
4-4-4 彎曲半徑0.549 mm光纖直徑125μm之感測器 221
4-4-5 彎曲半徑0.514 mm光纖直徑75.7 μm之感測器 226
4-4-6 彎曲半徑0.531 mm光纖直徑31.8 μm之感測器 231
4-4-7 綜合討論 236
第五章 結論 238
參考文獻 239

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