臺灣博碩士論文加值系統

無塵室為維持製程或研發工作環境之潔淨度，空間內利用空氣淨化設備其塵埃的收集率達99%之多，靜電除塵至多90~95%隨風速越高，濾率會進一步下降。而淨室內除人體攜出入產生之污物以外，尚有機器等之發塵源，這些產生的塵埃一旦擴散，即無法保持空間之潔淨度，因此必須利用氣流交換，將發生的塵埃迅速排出。當室內外空氣含塵量超出淨化設備所能工作之額定量時，粉塵量將不斷積累於室內，衍生出空氣交換帶入污染源之問題。
對於膜層絕緣電阻的推論，發現各種類電阻彼此間存有關聯性，差異在於影響因素對測定結果誤差大小，是一總和量化結論。觀察多種電阻影響因素發現，溼度及污染因素存於諸多項目。粉塵堆積及其比電阻的研究中了解到，孔隙率(接觸面積)對於電阻影響，而實驗材水泥粉為高電阻非磁性無機質，其性質具有非常良好之潤溼效果；表面粗糙度與溼度影響之界面黏附力理論研究中了解到，表面粗糙度對於物理性質接觸角、水膜附著張力、潤溼性間的關聯性。在此假設理論為：粉塵微粒因材質表面水分子、落塵、人為夾帶等原因，填補於測件表面糙度中的孔隙，增加了接觸面積，由於粉塵及測件材質潤溼性，理應具更低之電阻值，但實際測量結果不如預期，故設此實驗研究其影響要素。
由推論中得知，討論表面電阻、膜層電阻時不加入體積、面積等概念，電極接觸面的大小、與接地導體距離皆不納入考量中，僅與材料、環境溫度、環境溼度、接觸面狀況等作綜合的一接觸電阻概念。當標準差σ越低、綜合性指標Cpk越高，會有較高溼度之金屬表面。同時表面參數也會有較小之波幅、高於樣本尺寸之中心高度(中心線平均高)。溼度對於不同糙度表面SUS304試片，30μm糙度表面當相對溼度低於30%RH時會有較高之電阻。

The clean room is to maintain the cleanliness of the process or R&D work environment. The dust collection rate of the air purification equipment in the space is as much as 99%, and the electrostatic dust removal is up to 90-95%. The higher the wind speed, the higher the filtration rate will be. In the clean room, in addition to the dirt generated by the human body, there are also dust sources such as machines. Once the generated dust spreads, the cleanliness of the space cannot be maintained. Therefore, air exchange must be used to quickly discharge the generated dust. When the dust content of the indoor and outdoor air exceeds the rated capacity of the purification equipment, the amount of dust will continue to accumulate in the room, resulting in the problem of air exchange bringing pollution sources.
For the inference of the insulation resistance of the film, it is found that various types of resistance are related to each other. The difference lies in the size of the error of the measurement result by the influencing factor, which is a sum of quantitative conclusions. Observing a variety of resistance factors, it is found that humidity and pollution factors exist in many projects. From the study of dust accumulation and specific resistance, it is understood that the porosity (contact area) has an effect on electrical resistance, while the experimental material cement powder is a high-resistance non-magnetic inorganic substance with a very good wetting effect; surface roughness and humidity affect In the theoretical study of the interface adhesion force, it is understood that the surface roughness is related to the physical properties, contact angle, water film adhesion tension, and wettability. The hypothesis here is that the dust particles fill the pores in the surface roughness of the test piece due to water molecules on the surface of the material, falling dust, man-made entrainment, etc., and increase the contact area. Due to the wettability of the dust and the material of the test piece, it should be better. The resistance value is low, but the actual measurement result is not as expected, so this experiment is set up to study its influencing factors.
It is known from the inference that the concepts of volume and area are not added when discussing surface resistance and film resistance. The size of the electrode contact surface and the distance from the grounding conductor are not taken into consideration, and only the material, ambient temperature, ambient humidity, and contact surface are not taken into consideration. The condition is a comprehensive concept of contact resistance. When the standard deviation σ is lower and the comprehensive index Cpk is higher, there will be a metal surface with higher humidity. At the same time, the surface parameters will have a smaller amplitude and higher than the center height of the sample size (the average height of the center line). Humidity For SUS304 test pieces with different roughness surfaces, the 30μm roughness surface will have higher resistance when the relative humidity is lower than 30%RH.

致謝 i
摘要 ii
英文摘要 iii
目錄 1
表目錄 3
圖目錄 5
符號說明 10
一、序論
1.1 前言 11
1.2 研究目的與動機 12
1.3 研究背景
1.3.1 IOSH97−S305電子業之靜電危害預防管理技術文獻回顧 14
1.3.2 表面粗糙度與溼度影響之界面黏附力理論研究文獻回顧 28
1.3.3 粉塵堆積及其比電阻研究文獻回顧 30
1.3.4 表面粗糙度對靜電產生影響的實驗研究文獻回顧 33
二、基礎理論
2.1 靜電基本概念 41
2.2 電阻概念與種類 43
2.3 材料磁性概念及對電阻之影響
2.3.1 磁阻效應 51
2.3.2 磁電阻效應 51
2.4 粗糙度概念
2.4.1 表面紋理輪廓法術語、定義和參數 53
2.4.2 輪廓法與表面性能關聯性 55
三、實驗原理與流程規劃
3.1 實驗原理與流程規劃 58
3.2 實驗設備器材
3.2.1 測量儀器 61
3.2.2 實驗測物 66
3.3 初步實驗量測
3.3.1 不同環境潔淨度下測物電阻 71
3.3.2 不同量測週期下測物電阻 75
3.4 測物變因實驗
3.4.1 不同環境溼度下測物電阻 78
3.4.2 不同環境溫度下測物電阻 83
四、分析建立實驗
4.1 試片變因實驗 89
4.1.1 不同溫度下各粗糙度潔淨SUS304試片電阻 90
4.1.2 不同溼度下各粗糙度潔淨SUS304試片電阻 93
4.1.3 粉塵附著於不同糙度SUS304試片表面狀況 96
4.2 變因實驗結果分析 105
五、結論與未來展望
5.1 實驗結論 108
5.2 未來展望 108
六、參考文獻 109

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