本研究先以電漿增強化學氣相沉積系統(Plasma-Enhanced Chemical Vapor Deposition；PECVD)對基板進行表面改質，透過旋轉塗佈法(sping coating)製備單層聚苯乙烯(Polystrene)奈米球陣列結構，並使用射頻磁控共濺鍍系統(RF magnetron co-sputtering system)，將50 nm的銀(Ag)、鋁(Al)、鈦(Ti)金屬分別沉積於奈米球上，觀察其金屬/奈米球陣列結構的表面形貌及粗糙度，再利用快速熱退火爐(Rapid Thermal Annealing, RTA)對薄膜進行退火，討論退火對不同金屬與奈米球造成的結構變化，最後藉由丙酮輔助舉離實現金屬陣列結構。實驗量測透過原子力顯微鏡(AFM)以及紫外光-可見光光譜儀(UV-Vis spectrum)，分析薄膜的表面結構特性與光學特性，藉由ImageJ程式對金屬粒徑進行量測與分析。
實驗結果顯示，對比單層的金屬薄膜，當金屬沉積於奈米球時，在可見光波段出現特定波長的吸收；經退火後發現奈米球因氣化與基板表面分離，而鈦在高溫下粒子並不會產生明顯的團聚，仍然為持奈米陣列結構，有利於在後續舉離時觀察結構變化，通過控制退火溫度及時間並以丙酮舉離成功製備蜂巢狀金屬結構。

In this study, the surface modification of the substrate was carried out by plasma enhanced chemical vapor deposition (PECVD) system, and the single-layer polystyrene nano-sphere array structure was prepared by spin-coating method. 50 nm silver (Ag), aluminum (Al), and titanium (Ti) metals were deposited onto the nano-sphere by using radio-frequency magnetron sputtering (RF-MCSP) system, and the surface morphology and roughness of the metal/nano-sphere array structure were observed, and the surface morphology and roughness of the metal/nano-sphere array structure were investigated, and the surface morphology and roughness of the metal/nano-sphere array structure were investigated. The films were annealed in a Rapid Thermal Annealing (RTA) furnace to discuss the structural changes caused by the annealing on different metals and nanospheres, and finally the metal array structures were realized by acetone-assisted lift-off. The experimental measurements were carried out by atomic force microscopy (AFM) and ultraviolet-visible spectroscopy (UV-VIS) to analyze the surface structural and optical properties of the films, and the metal particle size was measured and analyzed by ImageJ program.
The experimental results show that compared with the single-layer metal film, when the metal is deposited in the nanorods, the absorption of specific wavelengths occurs in the visible wavelength band; after annealing, it is found that the nanorods are separated from the surface of the substrate due to the vaporization, and the titanium particles do not produce obvious agglomeration at high temperatures, and remain in the nano array structure, which is conducive to the structural changes observed in subsequent lifting off, and the honeycomb metal structure is successfully fabricated through the control of the annealing temperature and time, and the lifting off of the titanium in acetone. By controlling the annealing temperature and time and lifting off with acetone, the honeycomb metal structure was successfully fabricated.

摘要......i
Abstract......ii
誌謝......iv
目錄......v
表目錄......vii
圖目錄......viii
第一章 緒論......1
1.1前言......1
1.2文獻回顧......1
1.3研究動機......2
第二章 理論基礎......6
2.1 電漿成分及原理..........6
2.2 氧電漿蝕刻奈米球之原理...6
2.3 射頻磁控濺鍍原理.........7
2.4 薄膜成核理論......8
第三章 實驗方法及步驟.......13
3.1實驗流程......13
3.2實驗系統......13
3.2.1電漿增強化學氣相沉積系統......13
3.2.2旋轉塗佈系統(Spin coating)......14
3.2.3 射頻磁控共濺鍍系統......14
3.3奈米球表面形貌量測分析......15
3.3.1原子力顯微鏡(Atomic force microscope；AFM)......15
3.3.2紫外光-可見光光譜儀（UV-Vis Spectrum）......15
3.3.3 接觸角量測儀......15
3.3.4 α-step表面輪廓儀......16
第四章 結果與討論......22
4.1金屬薄膜沉積於單層聚苯乙烯奈米球陣列表面..........22
4.1.1單層奈米球經氧電漿蝕刻前後之表面特性及光學分析...22
4.1.2金屬沉積於單層奈米球的表面特性及光學分析.........23
4.2金屬薄膜沉積於單層奈米球上經快速熱退火後的特性分析...26
4.2.1金屬薄膜熱退火處理之表面特性及光學穿透率......26
4.2.2不同金屬薄膜沉積於單層奈米球上經快速熱退火後的表面特性及光學分析......28
4.3利用奈米球舉離製備陣列金屬結構.......31
4.3.1 利用熱舉離製程製備鈦金屬奈米陣列結構之表面形貌分析......31
4.3.2 利用熱舉離製備銀金屬陣列結構的表面特性及光學分析......33
第五章 結果與未來工作......72
參考文獻......73
Extended Abstract.......75

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