感測器都需要電源，而現在的感測器都是直接或間接來自於電池提供，如果可以讓感測器供給電源給自己，就能讓這些感測器運用的範圍更加廣泛，因此開發出能將機械能轉換成電能的壓電式奈米發電機有重要的研究意義。

第一部分以射頻磁控濺鍍機在PET基板上沉積100nm氧化鋅薄膜做為晶種層，再透過水熱法配置硝酸鋅、四氮六甲圜(HMTA)以及不同濃度之硝酸鎘，生長鎘摻雜氧化鋅奈米柱結構。接著透過場發射掃描式電子顯微鏡(FE-SEM)、穿透式電子顯微鏡(TEM)、分析鎘摻雜氧化鋅奈米柱的型態；X光能譜散佈分析儀(EDS)分析鎘是否摻雜入氧化鋅奈米柱；X光繞射分析儀(XRD)、光激發螢光光譜儀(PL)分析鎘摻雜氧化鋅奈米柱結晶與光學特性。

第二部分用雷雕技術定義圖形，再透過濺鍍法於PET基板沉積銀薄膜製備電極，然後與鎘摻雜氧化鋅奈米柱組裝成壓電式奈米發電機，利用新穎敲擊系統驅動自供電奈米發電機，氧化鋅的奈米柱結構作為氣感的感測層，形成氣體感測器

Sensors need power, and current sensors are directly or indirectly supplied by batteries. If you can let the sensors supply power to themselves, you can make these sensors more widely used, so the development piezoelectric nanogenerators that can convert mechanical energy into electrical energy have important research significance.
In this study, a 100nm zinc oxide film was deposited on the PET substrate by a radio frequency magnetron sputtering machine as a seed layer, and then hydrothermally prepared with zinc nitrate, hexamethylenetetramine (HMTA) and different concentrations of cadmium nitrate to grow cadmium doped zinc oxide nanorod structures. Then, through the field emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM), analyze the type of cadmium-doped zinc oxide nanorods; X-ray energy dispersive analyzer (EDS) analyzes whether cadmium is doped with zinc oxide nanorods; X-ray diffraction analyzer (XRD) and light excitation fluorescence spectrometer (PL) analyze the crystallization and optical properties of cadmium-doped zinc oxide nanorods.
In this study, laser engraving technology was used to define the pattern, and then silver film was deposited on the PET substrate by sputtering to prepare electrodes, and then assembled with cadmium-doped zinc oxide nanorods to form a piezoelectric nanogenerator, zinc oxide nanorod structure as the sensing layer of the gas sensor, forming a gas sensor.

摘要............i
Abstract........ii
誌謝............iii
目錄............iv
表目錄............vi
圖目錄............vii
第一章緒論............1
1.1 前言............1
1.2 研究動機與目的............2
第二章文獻探討............3
2.1 氧化鋅之材料特性簡介............3
2.2 水熱法成長機制............4
2.3 濺鍍原理............5
2.3.1 射頻磁控濺鍍原理............6
2.3.2 射頻濺鍍的優點............7
2.4雷射雕刻技術............8
2.5 壓電效應原理介紹............8
2.6 精密敲擊系統............12
2.6.1 精密敲擊系統原理............12
2.6.2 精密敲擊系統的優點............12
2.7 氣體感測器介紹............12
第三章 實驗方法............14
3.1 製備之材料介紹............14
3.2 準備基板............16
3.3 實驗設計與流程............17
3.4 上電極製作............18
3.5 下電極製作............20
3.6 元件製作............21
3.7 儀器設備與材料分析方法............22
3.7.1 場發射掃描式電子顯微鏡 (Scanning Electron Microscope, FE-SEM)............22
3.7.2場發射槍穿透式電子顯微鏡(Transmission electron microscope, TEM)............23
3.7.3能量散射光譜儀(Energy Dispersive Spectrometer, EDS)............24
3.7.4 X射線繞射儀(X-ray diffraction,XRD)............25
3.7.5 光激發螢光光譜儀(Photoluminescence，PL)............26
第四章 結果與討論............27
4.1 鎘摻雜氧化鋅奈米柱製備............27
4.2 鎘摻雜氧化鋅奈米柱表面結構與形貌(SEM)............28
4.3 鎘摻雜氧化鋅奈米柱之穿透式電子顯微鏡分析(TEM)............34
4.4 鎘摻雜氧化鋅奈米柱之X-ray繞射儀分析............38
4.5 鎘摻雜氧化鋅奈米柱之光激發螢光頻譜儀分析............40
4.6 鎘摻雜氧化鋅奈米柱之壓電一氧化氮感測特性............42
第五章結論............48
5.1結論............48
5.2未來展望............48
參考文獻............49
Extended Abstract............52

[1.]Watson, J. and K. Ihokura, The Stannic Oxide Gas sensor, Principles and Applications. 1994, CRC Press, Boca Raton, FL.
[2.]Zhang, Y., et al., Capacitive behavior of graphene–ZnO composite film for supercapacitors. Journal of Electroanalytical Chemistry, 2009. 634(1): p. 68-71.
[3.]Mills, A. and S. Le Hunte, An overview of semiconductor photocatalysis. Journal of photochemistry and photobiology A: Chemistry, 1997. 108(1): p. 1-35.
[4.]Verma, V.P., et al., Large-area graphene on polymer film for flexible and transparent anode in field emission device. Applied Physics Letters, 2010. 96(20): p. 203108.
[5.]Grätzel, M., Dye-sensitized solar cells. Journal of photochemistry and photobiology C: Photochemistry Reviews, 2003. 4(2): p. 145-153.
[6.]Monroy, E., F. Omnès, and F. Calle, Wide-bandgap semiconductor ultraviolet photodetectors. Semiconductor science and technology, 2003. 18(4): p. R33.
[7.]Gao, F., et al., Ultraviolet electroluminescence from Au-ZnO nanowire Schottky type light-emitting diodes. Applied Physics Letters, 2016. 108(26): p. 261103.
[8.]He, J., et al., Enhanced field emission of ZnO nanowire arrays by the control of their structures. Materials Letters, 2018. 216: p. 182-184.
[9.]Hsu, C.-L., L.-F. Chang, and T.-J. Hsueh, A dual-band photodetector based on ZnO nanowires decorated with Au nanoparticles synthesized on a glass substrate. RSC advances, 2016. 6(78): p. 74201-74208.
[10.]Burgos, A., et al., Electrodeposition of ZnO nanorods as electron transport layer in a mixed halide perovskite solar cell. International Journal of Electrochemical Science, 2018. 13: p. 6577-6583.
[11.]Deng, X., et al., ZnO enhanced NiO-based gas sensors towards ethanol. Materials Research Bulletin, 2017. 90: p. 170-174.
[12.]Liu, J., et al., Highly sensitive and low detection limit of ethanol gas sensor based on hollow ZnO/SnO2 spheres composite material. Sensors and Actuators B: Chemical, 2017. 245: p. 551-559.
[13.]Shi, Z.-F., et al., Photoluminescence performance enhancement of ZnO/MgO heterostructured nanowires and their applications in ultraviolet laser diodes. Physical Chemistry Chemical Physics, 2015. 17(21): p. 13813-13820.
[14.]Ashrafi, A. and C. Jagadish, Review of zincblende ZnO: Stability of metastable ZnO phases. Journal of Applied Physics, 2007. 102(7): p. 4.
[15.]Morkoç, H. and Ü. Özgür, Zinc oxide: fundamentals, materials and device technology. 2008: John Wiley & Sons.
[16.]Özgür, Ü., et al., A comprehensive review of ZnO materials and devices. Journal of applied physics, 2005. 98(4): p. 11.
[17.]Solozhenko, V.L., et al., Kinetics of the wurtzite-to-rock-salt phase transformation in ZnO at high pressure. The Journal of Physical Chemistry A, 2011. 115(17): p. 4354-4358.
[18.]Chan, Y., et al., ZnSe nanowires epitaxially grown on GaP (111) substrates by molecular-beam epitaxy. Applied physics letters, 2003. 83(13): p. 2665-2667.
[19.]Look, D.C., et al., Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy. Applied physics letters, 2002. 81(10): p. 1830-1832.
[20.]Schubert, L., et al., Silicon nanowhiskers grown on< 111> Si substrates by molecular-beam epitaxy. Applied Physics Letters, 2004. 84(24): p. 4968-4970.
[21.]Shaikh, S.K., et al., Chemical bath deposited ZnO thin film based UV photoconductive detector. Journal of Alloys and Compounds, 2016. 664: p. 242-249.
[22.]Dalui, S., et al., Aligned Zinc Oxide nanorods by hybrid wet chemical route and their field emission properties. Thin Solid Films, 2008. 516(23): p. 8219-8226.
[23.]Eskandari, M., V. Ahmadi, and S. Ahmadi, Low temperature synthesis of ZnO nanorods by using PVP and their characterization. Physica B: Condensed Matter, 2009. 404(14-15): p. 1924-1928.
[24.]Polsongkram, D., et al., Effect of synthesis conditions on the growth of ZnO nanorods via hydrothermal method. Physica B: Condensed Matter, 2008. 403(19-20): p. 3713-3717.
[25.]Gunawan, O. and S. Guha, Characteristics of vapor–liquid–solid grown silicon nanowire solar cells. Solar Energy Materials and Solar Cells, 2009. 93(8): p. 1388-1393.
[26.]Hejazi, S., H.M. Hosseini, and M.S. Ghamsari, The role of reactants and droplet interfaces on nucleation and growth of ZnO nanorods synthesized by vapor–liquid–solid (VLS) mechanism. Journal of Alloys and Compounds, 2008. 455(1-2): p. 353-357.
[27.]Vergés, M.A., A. Mifsud, and C. Serna, Formation of rod-like zinc oxide microcrystals in homogeneous solutions. Journal of the Chemical Society, Faraday Transactions, 1990. 86(6): p. 959-963.
[28.]Vayssieres, L., et al., Purpose-built anisotropic metal oxide material: 3D highly oriented microrod array of ZnO. The Journal of Physical Chemistry B, 2001. 105(17): p. 3350-3352.
[29.]Yang, Y., et al., ZnO nanowire and amorphous diamond nanocomposites and field emission enhancement. Chemical physics letters, 2005. 403(4-6): p. 248-251.
[30.]Mensah, S.L., et al., Formation of single crystalline ZnO nanotubes without catalysts and templates. Applied physics letters, 2007. 90(11): p. 113108.