臺灣博碩士論文加值系統

本研究主要利用低成本之水熱法合成氧化鋅奈米柱，用於製造紫外光感測器，以鐵摻雜濃度作為操作變因，討論其奈米柱之變化及特性穩定度。
首先將玻璃基板切割後使用異丙醇及丙酮清洗乾淨，洗完後使用氮氣槍吹乾後烘烤，接著使用射頻磁控濺鍍機在玻璃基板上濺鍍100nm氧化鋅薄膜做為晶種層，最後使用水熱法配置硝酸鋅、六亞甲基四胺(HMTA)以及不同濃度的硝酸鐵，生長鐵摻雜氧化鋅奈米柱。實驗完後將試片透過場發射掃描式電子顯微鏡(FE-SEM)、能量散布分析儀(EDS) 、螢光光譜儀(PL)、X光繞射頻譜圖分析(XRD)及穿透式電子顯微鏡(TEM)進行奈米柱結構型態分析、材料成分、晶格缺陷及光學等等分析。最後使用黃光微影技術，在玻璃基板上定義成長區塊並且鍍上金屬銀作為電極，再以水熱法在具有氧化鋅晶種層試片上生長鐵摻雜氧化鋅奈米柱。最後將元件透過量測分析光暗電流比以及光響應值分析，在鐵摻雜0.4mM濃度之氧化鋅奈米柱時，不僅光暗電流比有提升，光響應的部分也提高。
　　通過X光繞射頻譜圖分析(XRD)、螢光光譜儀(PL)可以發現紅移現象，主要歸因於鐵的摻雜效應。場發射掃描式電子顯微鏡(FE-SEM)和穿透式電子顯微鏡(TEM)檢查了摻雜鐵的氧化鋅奈米柱的形貌和質量。發現鐵原子易於摻入到ZnO晶格中，因為Fe3+離子可以取代Zn2+離子，除了抑制氧化鋅的本質缺陷-氧空缺，改善了氧化鋅的結晶性，更提高了元件特性。

In this study, ZnO nanorods were synthesized by low-cost hydrothermal method and used to fabricate UV photodetectors.

First, clean the glass substrate with isopropanol and acetone after cutting, and then dry it with nitrogen gun and bake it.

Then, the 100nm zinc oxide film was sputtered on the glass substrate by radio frequency (RF) magnetron sputtering machine as the seed layer. Finally, zinc nitrate, hexamethylenetetramine (HMTA) and different concentrations of iron nitrate were prepared by hydrothermal method to grow Fe-doped zinc oxide nanorods.

After the experiment, the samples were analyzed by Field-emission scanning electron microscope (FE-SEM), Energy Dispersive Spectrometer (EDS), Photoluminescence spectrum (PL), X-Ray Diffractometer (XRD) and Transmission electron microscopy (TEM), including the structure, composition, lattice defect and optics of the nanorods.

Finally, using the lithography technology, we define the patten on the glass substrate and plated with silver as the electrode. Then, we use hydrothermal method to grow the Fe-doped ZnO nanorods on the substrate with ZnO crystal seed layer. Finally, through the analysis of the photo current and dark current ratio and the light response value, when the Fe-doped ZnO (0.4mM) nanorods, not only the photo current ratio and dark current is increased, but also the response part is improved.

The red shift can be found by X-Ray Diffractometer (XRD) and Photoluminescence spectrum (PL), which is mainly due to the doping effect of iron. Field emission scanning electron microscopy (FE-SEM) and transmission electron microscope (TEM) were used to examine the morphology and quality of Fe-doped ZnO nanorods. It is found that iron atoms are easy to be incorporated into ZnO lattice, because Fe3+ ions can replace Zn2+ ions.In addition to inhibiting the essential defect of zinc oxide - oxygen vacancy, the crystallinity of zinc oxide is improved, and the element characteristics are improved.

摘要......i
Abstract......ii
誌謝......iv
目錄......v
表目錄......vii
圖目錄......viii
第一章 緒論......1
1-1前言......1
1-2 研究動機......2
1-3 文獻回顧......2
第二章 理論基礎......3
2-1 電漿理論......3
2-2 射頻磁控濺鍍原理......3
2-3 薄膜成核理論......5
2-4 材料特性簡介......6
2-4-1 氧化鋅薄膜......6
2-5 金屬與半導體接觸理論......7
2-5-1 蕭特基接觸理論......9
2-6 水熱法......10
2-6-1 水熱法原理......10
2-6-2 水熱合成優點......11
2-7 成長鐵摻雜氧化鋅奈米柱之化學反應流程......11
第三章 實驗製程方法與步驟......12
3-1 實驗基本結構......12
3-1-1 實驗架構......12
3-1-2 實驗流程......12
3-2 實驗儀器與藥品......14
3-3 實驗設備......15
3-3-1 射頻磁控濺鍍系統(Radio frequency magnetron sputtering)......15
3-3-2 場發射掃描式電子顯微鏡(FE-SEM)......16
3-3-3 X光繞射分析儀(XRD)......17
3-3-4 穿透式電子顯微鏡(TEM)......18
3-3-5 光激發螢光光譜儀(PL)......19
3-3-6 表面輪廓分析儀......20
3-3-7 半導體參數分析儀......20
第四章 結果與討論......22
4-1 鐵摻雜氧化鋅奈米柱之製備方法......22
4-2 鐵摻雜氧化鋅奈米柱之結構各項分析......23
4-2-1 鐵摻雜氧化鋅奈米柱之SEM分析......23
4-2-2 鐵摻雜氧化鋅奈米柱之EDS分析......28
4-2-3 鐵摻雜氧化鋅奈米柱之TEM分析......31
4-2-4 鐵摻雜氧化鋅奈米柱之PL分析......33
4-2-5 鐵摻雜氧化鋅奈米柱之XRD分析......34
4-3 鐵摻雜氧化鋅奈米柱之元件量測......36
第五章 結論......42
5-1 結論......42
5-2 未來展望......42
參考文獻......43
Extended Abstract......46
Abstract......46

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