臺灣博碩士論文加值系統

以傳統固態反應法製作SrZnV2O7陶瓷，將混合的原始粉末進行熱重分析。透過粉末的重量損失情況確認粉末的反應溫度、相的形成溫度及材料化學反應，並使用X射線繞射儀(XRD)與掃描式電子顯微鏡(SEM)分析材料晶相與微觀結構。SrZnV2O7陶瓷燒結於大氣環境下，以640~730 oC溫度區間持溫四小時，實驗結果顯示700 oC燒結的SrZnV2O7具有最佳微波介電特性ε_r=11.22、Qu×f=55,367 GHz、τ_f=-38.7 ppm/oC。SEM微結構影像顯示700 oC燒結陶瓷時具有最佳緻密性，且其相對密度高達95.9%。將Sr及Zn元素配比進行調整製作Sr2-xZnxV2O7(x=0~2)陶瓷，並以700 oC進行燒結，當x=1即SrZnV2O7燒結於700 oC，具有最佳微波介電特性及緻密性。將SrZnV2O7與20 wt%的Ag粉末於700 oC進行共燒，BEI和EDS結果發現Ag與SrZnV2O7之間發生擴散及反應，說明兩者之間化學相容性差，故於700 oC燒結的SrZnV2O7不適合於LTCC應用。

SrZnV2O7 ceramics were synthesized through a conventional solid-state reaction route. The raw mixture powders were analyzed by thermogravimetric analysis (TGA) to determine the reaction temperature. The formation temperature of the SrZnV2O7 phase and the chemical reactions between the raw materials were discussed. Crystalline and microstructure of the SrZnV2O7 ceramics were analyzed using X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The sintering was carried out in the temperature range from 640 to 730 °C for 4 hours. The experimental results demonstrated that 700°C sintered SrZnV2O7 ceramic exhibited best microwave dielectric properties with ε_r = 11.22, Qu×f = 55,367 GHz, and τ_f = -38.7 ppm/°C. SEM images also showed that the 700 °C sintered SrZnV2O7 ceramic exhibited dense microstructure and had a highest relative density of 95.9%. Furthermore, 700 °C sintered Sr2-xZnxV2O7 (x=0~2) ceramics were prepared to investigate the microwave dielectric properties. Among various Sr/Zn ratio, the SrZnV2O7 ceramic still demonstrated the best microwave dielectric properties. Moreover, the SrZnV2O7 ceramic and 20 wt% Ag powder were co-fired at 700 °C to examine the chemical compatibility. The results of backscattered electron image (BEI) and energy-dispersive X-ray spectroscopy (EDS) indicated diffusion and reaction between Ag and SrZnV2O7, suggesting poor chemical compatibility. Therefore, SrZnV2O7 sintered at 700 °C is not suitable for LTCC applications.

摘要I
ABSTRACTII
致謝IV
目錄V
圖目錄VII
表目錄IX
第一章 緒論1
1-1 前言1
1-2 本實驗重點及目的1
第二章 文獻回顧與基礎理論3
2-1 通訊系統介紹3
2-1-1 Sub-6G介紹4
2-1-2 毫米波(millimeter Wave)介紹5
2-2 陶瓷材料於5G應用6
2-3介電共振器之原理7
2-3-1 電磁場流向分佈8
2-3-2 微波透射情形9
2-4介電共振器需求10
2-5材料燒結理論11
2-5-1材料燒結過程11
2-5-2 燒結的種類13
2-5-3 影響燒結的因素14
2-6微波材料之特性14
2-6-1介電常數εr14
2-6-2 品質因數(Quality factor)18
2-6-3 溫度飄移係數τf21
2-7微波材料與電極共燒22
2-8材料結構計算或原理解釋22
2-9 材料系統介紹25
第三章 實驗步驟及量測方法27
3-1 介電共振器元件製備27
3-2材料結構分析28
3-3微波介電量測32
3-3-1 平行金屬板量測法33
3-3-2 微波共振模態之判別33
3-3-3 實際量測步驟與方式34
3-3-4 介電常數量測34
3-3-5 品質因數量測36
3-3-6 共振頻率溫度飄移係數量測及計算38
第四章 實驗結果與討論39
4-1 SrZnV2O7粉末分析39
4-2 SrZnV2O7材料特性探討42
4-3 Sr2-xZnxV2O7材料特性探討49
4-4 SrZnV2O7與電極共燒54
第五章 結論與未來展望57
5-1 結論57
5-2 未來展望57
參考文獻58

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