臺灣博碩士論文加值系統

本論文使用射頻磁控濺鍍法於玻璃基板上沉積不同厚度與不同鋰摻雜濃度的氧化鋅薄膜，並通過微影製程製作10微米鋁金屬指叉狀電極於氧化鋅薄膜上，最後將純與鋰摻雜氧化鋅奈米柱成長於元件感測區，完成表面聲波元件的結構，透過X光繞射儀和場發射掃描式電子顯微鏡來分析氧化鋅薄膜與奈米柱表面型態與結晶特性。接著將不同厚度的純氧化鋅薄膜藉由網路分析儀找出擁有最大機電耦合係數的厚度，接著再分別加入0.5、1.0、2.0、5.0莫耳百分率的鋰完成不同濃度的鋰摻雜氧化鋅薄膜，鋰摻雜氧化鋅奈米柱分別為0.01、0.05、0.50、1.00、5.00莫耳%。探討鋰原子取代鋅原子後對元件的頻率、損耗和相位的變化，找出紫外光感測與液體感測變化最佳靈敏度的摻雜量。

Zinc oxide thin films with different thicknesses and lithium-doped concentrations were deposited on glass substrate using radio frequency magnetron sputtering system. The aluminum interdigital transducer with 10µm wide was fabricated by lithography process. Pure and Li-doped ZnO nanorods were grown on the sensing area for the surface acoustic wave photodetector. The surface morphology and crystal structure of the zinc oxide films with nanorods were analyzed by X-ray diffraction and scanning electron microscope.
Pure zinc oxide films grown at 1.38 µm-thick presented the maximum electromechanical coupling coefficient (K2=5.07 %), and then 0.5, 1.0, 2.0, and 5.0 mol% of lithium were doped on 1.38 µm-thick zinc oxide film, respectively to find out the maximum ultraviolet sensitivity. The variations in center frequency, insertion loss, and phase of the surface acoustic wave devices were measured to find out the optimum lithium doping concentration for the best sensitivity in ultraviolet and liquid sensor.

摘要...............................................i
Abstract...............................................ii
誌謝...............................................iii
目錄...............................................iv
表目錄...............................................vii
圖目錄...............................................ix
第一章、 緒論...............................................1
1.1前言...............................................1
第二章、 基礎理論...............................................3
2.1壓電效應理論...............................................3
2.1.1正壓電效應...............................................3
2.1.2逆壓電效應...............................................4
2.2壓電性材料...............................................4
2.2.1壓電基板之特性...............................................5
2.3表面聲波...............................................6
2.3.1雷利波(Rayleigh Waves)...............................................6
2.3.2水平剪切聲波(Shear Horizontal Acoustic Waves)...........................7
2.3.3表面飄移塊體波(Surface Skimming Buck Waves).............................7
2.3.4拉福波(Love Surface Acoustic Waves)..................................7
2.4表面聲波元件概述與相關參數...............................................8
2.4.1表面聲波元件...............................................8
2.4.2指叉狀電極設計參數...............................................8
2.4.3波速與中心頻率...............................................10
2.4.4機電耦合係數(Electromechanical Coupling Coefficient).................10
2.4.5插入損耗(Insertion Loss)............................................11
2.4.6溫度頻率係數(Temperature Coefficients of Frequency)................11
2.5氧化鋅...............................................11
2.6氧化鋅薄膜沉積方式...............................................12
2.6.1射頻磁控濺鍍法...............................................13
2.6.2薄膜的成長機制...............................................14
2.7熱退火原理...............................................16
2.8氧化鋅奈米柱結構合成...............................................17
2.8.1水熱法...............................................17
2.9鋰...............................................18
2.9.1鋰摻雜...............................................18
2.10 液體感測原理...............................................19
2.10.1液體感測靈敏度...............................................19
2.11紫外光感測原理...............................................20
2.11.1聲電效應(Acoustoelectric effect).................................21
2.11.2質量負載效應(Mass-loading effect).................................23
2.11.3光吸收...............................................24
2.11.4紫外光靈敏度...............................................25
第三章、實驗步驟與分析...............................................26
3.1實驗流程與架構...............................................26
3.2鋰摻雜粉靶製作...............................................27
3.3表面聲波元件製作...............................................28
3.3.1氧化鋅薄膜濺鍍與參數............................................28
3.3.2黃光微影製程...............................................30
3.3.3生長氧化鋅奈米柱...............................................32
3.4分析與量測儀器介紹...............................................34
3.4.1場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscopy)...34
3.4.2網路分析儀(Network Analyzer).......................................35
3.5表面聲波元件液體量測................................................36
3.6表面聲波元件紫外光量測...............................................37
3.7實驗藥品、耗材及儀器介紹...............................................38
3.7.1實驗藥品及耗材...............................................38
3.7.2實驗儀器...............................................39
第四章、結果與討論...............................................40
4.1氧化鋅表面分析...............................................40
4.1.1氧化鋅結構XRD形貌分析.............................................40
4.1.2不同氧化鋅薄膜厚度之表面形貌分析......................................41
4.1.3不同硝酸鋰摻雜之表面形貌分析.........................................46
4.1.4不同硝酸鋰摻雜氧化鋅奈米柱之表面形貌分析..............................51
4.2氧化鋅頻率響應分析...............................................58
4.2.1不同厚度純氧化鋅薄膜退火後與氧化鋅奈米柱頻率響應......................59
4.2.2不同濃度鋰摻雜氧化鋅薄膜退火後與氧化鋅奈米柱頻率響應................72
4.2.3不同濃度鋰摻雜氧化鋅奈米柱於1M鋰摻雜氧化鋅薄膜頻率響應................82
4.3表面聲波元件之液體感測分析............................................88
4.3.1不同厚度純氧化鋅薄膜與不同濃度鋰摻雜氧化鋅薄膜液體感測 88
4.4表面聲波元件之紫外光感測分析............................................93
4.4.1不同厚度純氧化鋅薄膜退火後與純氧化鋅奈米柱之紫外光影響................99
4.4.2不同濃度鋰摻雜氧化鋅薄膜退火後與純氧化鋅奈米柱之紫外光影響.............108
4.4.3不同濃度鋰摻雜氧化鋅奈米柱於1M鋰摻雜氧化鋅薄膜之紫外光影響.............117
第五章、結論.............................................................120
參考文獻................................................................121
Extended Abstract.....................................................127

[1]Mohd Javaid, et al., 2021, “Significance of sensors for industry 4.0: Roles, capabilities, and applications”, Sensors International, 100110.
[2]Bonnie Gance-Cleveland PhD, et al., 2020, “Use of theory to guide development and application of sensor technologies in Nursing”, Nursing Outlook, pp.698-710.
[3]Xing Lu, et al., 2022, “Sensor impact evaluation in commercial buildings: The case of occupancy-centric controls”, Energy and Buildings, 112134.
[4]Kenny Paul, et al., 2022, “Viable smart sensors and their application in data driven agriculture”, Computers and Electronics in Agriculture, 107096.
[5]Anindya Das Antar, Masud Ahmed, Md Atiqur Rahman Ahad, 2021, “Recognition of human locomotion on various transportations fusing smartphone sensors”, Pattern Recognition Letters, pp. 146-153.
[6]José Manuel Costa-Fernández, et al., 2022, “Optical (Bio)Sensors in Medical Diagnosis”, Reference Module in Biomedical Sciences.
[7]V.Hemamalini, et al., 2022, “Integrating bio medical sensors in detecting hidden signatures of COVID-19 with Artificial intelligence”, Measurement, 111054.
[8]B. Drafts, 2001, “Acoustic wave technology sensors”, IEEE Transactions on Microwave Theory and Techniques, pp.795-802.
[9]R.Tao, et al., 2019, “Thin film flexible/bendable acoustic wave devices: Evolution, hybridization and decoupling of multiple acoustic wave modes”, Surface and Coatings Technology, pp.587-594.
[10]Franz L.Dickert, et al., 1998, “SAW devices-sensitivity enhancement in going from 80 MHz to 1 GHz”, Sensors and Actuators B: Chemical, pp.120-125.
[11]Qin peng Liu, et al., 2020, “Temperature-insensitive optical fiber reflective micro-liquid level sensor base on the drop shape quasi-Mach Zehnder interferometer”, Optik, 216, August.
[12]T.Malini, et al., 2020, “The role of RTD and liquid sensors in electric arc furnace for melting of aluminium”, Materialstoday:Proceedings, 33, Part 7, pp. 4793-4796.
[13]Dong HaoZhuo, et al., 2020, “A micromachined vector light sensor”, Sensors and Actuators A: Physical, 311, 15 August.
[14]Peng Wang, et.al., 2019, “Ultraselective acetone-gas sensor based ZnO flowers functionalized by Au nanoparticle loading on certain facet”, Sensors and Actuators B: Chemical, 288, pp. 1-11, 1 June.
[15]V. Hinrichsen, et al., 1999, “Online monitoring of high-voltage metal-oxide surge arresters by wireless passive surface acoustic wave (SAW) temperature sensors”, Eleventh International Symposium, 2, pp. 238-241.
[16]L. Reindl, et al., 2003, “Wireless measurement of temperature using surface acoustic waves sensors”, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, pp. 935-941.
[17]Qiang Zou, et al., 2020, “Highly sensitive ionic pressure sensor with broad sensing range based on interlaced ridge-like microstructure”, Sensors and Actuators A: Physical, 313, 1 October.
[18]Olamikunle Osinimu Ogunleye, et al., 2019, “Investigation of the sensing mechanism of dual-gate low-voltage organic transistor based pressure sensor”, Organic Electronics, 75, December.
[19]Xifang Li, et al., 2020, “High sensitive and fast response humidity sensor based on polymer composite nanofibers for breath monitoring and non-contact sensing”, Sensors and Actuators B: Chemical, 22 November.
[20]M.V.Arularasu, et al., 2020, “PVDF/ZnO hybrid nanocomposite applied as a resistive humidity sensor”, Surfaces and Interfaces, 21, December.
[21]L. Salgado-Conrado, 2018, “A review on sun position sensors used in solar applications”, Renew. Sustain. Energy Rev, 82, pp. 2128-2146, February.
[22]A. Venema, et al., 1986, “Design aspects of SAW gas sensors”, Sensors and Actuators, 10, pp. 47-64.
[23]A. Mauder, 1995, “SAW gas sensors: Comparison between delay line and two port Resonator”, Sensors Actuators B: Chem, 26, pp. 187-190.
[24]Ahmed Mishaal Mohammed , Ibraheem Jaleel Ibraheem, A.S.Obaid M.Bououdina, 2017, “Nanostructured ZnO-based biosensor: DNA immobilization and hybridization”, Sensing and Bio-Sensing Research, 15, pp. 46-52, September.
[25]Lamanna.L, et al., 2020, “Conformable surface acoustic wave biosensor for E-coli fabricated on PEN plastic film”, BIOSENSORS & BIOELECTRONICS, 163, 1 September.
[26]Colin Campbell, 1989, “Surface Acoustic Wave Devices and Their Signal Processing Applications”, pp.1-7.
[27]K.Hashimoto, 2012, “11 - Surface acoustic wave (SAW) devices”, Ultrasonic Transducers, pp.331-373.
[28]ChunliZhang, et al., 2014, “Two-dimensional theory of piezoelectric shells considering surface effect”, European Journal of Mechanics - A/Solids, pp.109-117.
[29]ZhenyingJian, XianjunTan, YuxiongHuang, 2022, “Piezoelectric effect enhanced photocatalysis in environmental remediation: State-of-the-art techniques and future scenarios” Science of The Total Environment, 150924.
[30]NasrinAfsarimanesh, et al., 2020, “Interdigital sensors: Biomedical, environmental and industrial applications” Sensors and Actuators, 11192.
[31]ZhangliangXu, Yong J.Yuan, 2018, “Implementation of guiding layers of surface acoustic wave devices: A review” Biosensors and Bioelectronics, 500-512.
[32]D. S. Ballantine, et al., 1997, “Acoustic Wave Sensors: Theory, Design and Physicochemical Applications”, Academic Press.
[33]R. M.White, 1985, “Surface Acoustic Wave Sensors”, IEEE 1985 Ultrasonics Symposium, San Francisco, pp. 490-494.
[34]Y. Dake, M. Tokai, 1991, “Development of SAW pressure sensor using stainless steel diaphragm”, International Conference on Solid-State Sensors and Actuators.
[35]A. Talbi, et al., 2006, “ZnO/quartz structure potentiality for surface acoustic wave pressure sensor” Sensors and Actuators A, pp.128 78–83.
[36]L.Le Brizoua, et al., 2006, “High frequency SAW devices based on third harmonic generation”, Ultrasonics, pp.100-103.
[37]AyanaA, et al., 2022, “Microstructural and piezoelectric properties of ZnO films” Materials Science in Semiconductor Processing, 106680.
[38]B.P. Zhang, et al., “Optical properties of ZnO rods formed by metalorganic chemical vapor deposition” Appl. Phys. Lett, pp. 1635-1637.
[39]O. Yamazaki, T. Mitsuyu, K. Wasa, 1980, “ZnO thin-film SAW devices”, IEEE Trans. Sonics Ultrason, 6, pp. 369-378.
[40]Zaid. T. Salim, U. Hashim, M. K. Md. Arshad, 2016, “FEM modeling and simulation of a layered SAW device based on ZnO/128˚YX LiNbO3”, IEEE International Conference on Semiconductor Electronics (ICSE).
[41]SeunghunChoi, et al., 2021, “Dendrite-suppressing separator with high thermal stability by rod-like ZnO coating for lithium batteries”, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 127722.
[42]Małgorzata Norek ,2019, “Approaches to enhance UV light emission in ZnO nanomaterials”,Current Applied Physics, pp. 867-883.
[43]Igor Sherstov, Lyana Chetvergova, 2020, “Experimental researches of acoustical modes of various types of resonant photo-acoustic detectors”, Optics Communications, 462.
[44]Wei Gao, Yangsi Liu, Junzhe Dong, 2021, “Immobilized ZnO based nanostructures and their environmental applications”, Progress in Natural Science: Materials International, pp.821-834
[45]AsmaTadji, et al, 2022, “Facile preparation of nanostructured ZnO via low-temperature hydrothermal method upon changing the precursor anion: The study of structural, morphological, and optical properties”, Materials Today Communications, 103789.
[46]Arakelova, E. , et.al., 2010, “Zinc oxide nanocomposites with antitumor activity”, Natural Science, 2, pp. 1341-1348.
[47]C. Jagadish, S.J. Pearton (Eds.), 2006, “ZnO Bulk, Thin Films and Nanostructures”, Elsevier, Oxford, UK.
[48]Weiwei Tie, et al., 2019, “Covalent bonding of ZnO nanostructures with dispersible carbon nanotubes for self-assembly photocatalytic heterostructures”, Applied Surface Science, pp.219-227.
[49]Chukwudi E.Iheomamere, et al., 2021, “Bonding and stoichiometry in low-energy radio frequency magnetron sputtered ZnO thin films on flexible substrate”, Vacuum, 109869.
[50]Hanearl Jung, Doyoung Kim, Hyungjun Kim, 2014, “The electrical properties of low pressure chemical vapor deposition Ga doped ZnO thin films depending on chemical bonding configuration”, Applied Surface Science, pp.125-129.
[51]Ho Viet Thang, Thong Le Minh Pham, Gianfranco Pacchioni, 2022, “DFT study of electronic properties of N-doped ZnO and ZnO/Cu(111) bilayer films”, Surface Science, 121978.
[52]XinhuaPan, et al., 2019, “The enhancement of near-band-edge emission by hydrogen plasma treatment for Ga-doped ZnO, ZnO and ZnMgO films”, Optical Materials, pp.11-15.
[53]Sabrina Roguai, Abdelkader Djelloul, 2022, “Sn doping effects on the structural, microstructural, Seebeck coefficient, and photocatalytic properties of ZnO thin films”, Solid State Communications, 114740.
[54]Jin-HengLiu, et al., 2022, “Geochronology of the Chakabeishan Li–(Be) rare-element pegmatite, Zongwulong orogenic belt, northwest China: Constraints from columbite–tantalite U–Pb and muscovite–lepidolite 40Ar/39Ar dating”, Ore Geology Reviews, 104930.
[55]A. J. Slobodnik, 1978, “Materials and their inlluence on performance.” Chapter 6 in Acoustic Surface Waves, pp. 226 303.
[56]Shih-Han Wang, Shih-Hao Kuo, Chi-Yen Shen, 2011, “A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation”, Sensors and Actuators B: Chemical, pp.668-672.
[57]Shih-Han Wang, et al., “Rayleigh surface acoustic wave sensor for ppb-level nitric oxide gas sensing”, Sensors and Actuators A: Physical, pp.237-242.
[58]Chen Fu, et al., “Investigation of Rayleigh wave and Love wave modes in (11 2̅ 0) ZnO film based multilayer structure”, Surface and Coatings Technology, pp.s 330-337.
[59]Leonardo Lamanna, et al., “GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate”, Sensors and Actuators A: Physical, 112268.
[60]Jingting Luo, et al., “Shear-horizontal surface acoustic wave characteristics of a (110) ZnO/SiO2/Si multilayer structure”, Journal of Alloys and Compounds, pp. 558-564.
[61]Kourosh Kalantar Zadeh, et al., 2002, “A novel Love-mode device based on a ZnO/ST-cut quartz crystal structure for sensing applications”, Sensors and Actuators A: Physical, pp. 135-143.
[62]Xi Chen, Dali Liu, 2009, “Temperature stability of ZnO-based Love wave biosensor with SiO2 buffer layer”, Sensors and Actuators A 156, pp.317–322.
[63]XuHan, et al, 2022, “Effect on coupling coefficient of diamond-based surface acoustic wave devices using two layers of piezoelectric materials of different widths”, Diamond and Related Materials, 109041.
[64]C.S.Hartmann, D.T.Bell, R.C.Rosenfeld, 1973, “Impulse model design of acoustic surface wave filters”, IEEE Trans.
[65]Antti Jaakkola, Mika Prunnila, Tuomas Pensala, 2012, “Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators”, 2012 IEEE International Frequency Control Symposium Proceedings
[66]Min Jin, Shuaijiang Yan, Dazhi Chen, 2020, “Adsorption mechanism of water molecules on the surface of ZnO-SAW sensors”, Chemical Physics, 110915.
[67]Nelsa Abraham, et al., “Simulation studies on the responses of ZnO-CuO/CNT nanocomposite based SAW sensor to various volatile organic chemicals”, Journal of Science: Advanced Materials and Devices, pp.125-131.
[68]Zahra Rafiee, Hossein Roshan, “Mohammad Hossein Sheikhi, Low concentration ethanol sensor based on graphene/ZnO nanowires”, Ceramics International
[69]M. A. Borysiewicz, 2019, “ZnO as Functional Material, A Review”, Crystals 2019, 505.
[70]James A.Stewart, 2022, “Recent progress on the mesoscale modeling of architected thin-films via phase-field formulations of physical vapor deposition”, Computational Materials Science, 111503.
[71]PierreTomasini, 2021, “Vapor – Solid distribution of silicon germanium chemical vapor deposition determined with classical thermodynamics”, Journal of Crystal Growth, 126106.
[72]Neeraj Jain, Renu Kumawat, Shashi Kant Sharma, 2020, “Effect of substrate temperature on the microstructural and optical properties of RF sputtered grown ZnO thin films”, Materials Today: Proceedings, pp.93-99.
[73]R.S.Gonçalves, et al., 2018, “The effect of thickness on optical, structural and growth mechanism of ZnO thin film prepared by magnetron sputtering”, Thin Solid Films, pp.40-45.
[74]Mahmood H.Majeed, 2022, “Influence of annealing process on structural, optical and electronic properties of nano-structured ZnO films synthesized by hydrothermal technique: Supported by DFT study”, Materials Science and Engineering: B, 115793.
[75]G.Nagaraju, et al., 2010, “Surfactant free hydrothermally derived ZnO nanowires, nanorods, microrods and their characterization”, Materials Science in Semiconductor Processing, pp.21-28.
[76]L.Z.Pei, et al., 2010, “Hydrothermal oxidization preparation of ZnO nanorods on zinc substrate”, Physica E: Low-dimensional Systems and Nanostructures, pp.1333-1337.
[77]SikaiZhao, et al., 2019, “Complex-surfactant-assisted hydrothermal synthesis of one-dimensional ZnO nanorods for high-performance ethanol gas sensor”, Sensors and Actuators B: Chemical, pp.201-511.
[78]Lidan TangBing, WangYue, ZhangYousong Gu, 2011, “Structural and electrical properties of Li-doped p-type ZnO thin films fabricated by RF magnetron sputtering” Materials Science and Engineering, 548-551.
[79]K. Meziane, et al., 2021, “Effect of lithium salt precursors on the physical properties of ZnO-Li thin films” Thin Solid Films, 138644.
[80]Veronique Bornand, 2015, “Ferroelectric and dielectric properties in Li-doped ZnO nanorods” Thin Solid Films, 152-155.
[81]Manoj K. Gupta, Binay Kumar, 2011,“Enhanced ferroelectric, dielectric and optical behavior in Li-doped ZnO nanorods” Journal of Alloys and Compounds, pp.208-212.
[82]Walter Water, et al., 2002, “Li2CO3-doped ZnO films prepared by RF magnetron sputtering technique for acoustic device application” Materials Letters, pp.998 – 1003.
[83]J. K. Srivastava, Lily Agarwal, A. B. Bhattachryya, 1989, “Electrical Characteristics of Lithium-doped ZnO Films”, J. Electrochem, pp.3414.
[84]P. Bonasewicz, W. Hirschwald, Neumann, 1986, “Influence of surface processes on electrical, photochemical, and thermodynamical properties of zinc oxide films”, J.Electrochem, pp. 2270.
[85]F. Herrmann, M. Weihnacht, S. Büttgenbach, 1999, “Properties of Shear-horizontal surface acoustic waves in different layered quartz-SiO2 structures”, Ultrasonics, pp.335-341.
[86]Chin-Chong Tseng, 1967, “Elastic surface wave on free surface and metallized surface of CdS, ZnO, and PZT-4”, Journal of Applied Physics 38 (11), pp.4281-4283.
[87]R. Yukawa, et al., “Electron-hole recombination on ZnO(0001) single-crystal surface studied by time-resolved soft X-ray photoelectron spectroscopy” Appl. Phys. Lett, 151602.
[88]R. H. Parmenter, 1953, “The Acousto-electric effect”, Phys Rev, pp.990-998.
[89]A. Wixforth, et al., 1989, “Surface acoustic waves on GaAs/AlxGa1–xAs heterostructures”, Phys Rev B, pp. 7874-7887.
[90]M. Rotter, et al., 1998, “Giant acoustoelectric effect in GaAs/LiNbO3 hybrids”, Appl Phys Lett, pp. 2128-2130.
[91]D.S.Ballantine, R.M. White, 1997, “Acoustic Wave Sensors—Theory, Design and Physico- chemical Applications”, Academic Press.
[92]J.D.N. Cheeke, Z. Wang, 1999, “Acoustic wave gas sensors”, Sens Actuator B-Chem, pp. 146-15.
[93]BenG. Streetman, Sanjay Kμmar Banerjee,2000, “Solid state electronic devices”,6th ed.
[94]Y. J. Guo, et al., 2015, “Ultraviolet sensing based on nanostructured ZnO/Si surface acoustic wave devices”, Smart Materials and Structures, 125015.