臺灣博碩士論文加值系統

本研究使用射頻磁控濺鍍法於矽基板上沉積氧化鋅薄膜以製造Sezawa模態的壓力感測器。透過X光繞射分析儀、場發射掃描電子顯微鏡和網路分析儀對氧化鋅薄膜進行結晶構造、表面形貌分析及壓力敏感度分析。探討氧化鋅薄膜的厚度和元件的工作頻率對壓力靈敏度的影響。通過在元件的感測區域上施加力以改變元件的插入損耗、相位和中心頻率。結果表明，隨著氧化鋅薄膜厚度的增加，元件對於壓力的靈敏度也會增強。在氧化鋅薄膜厚度與波長的比率為0.48時，具有最高的對於壓力的靈敏度。

The ZnO thin film was deposited on silicon substrate by radio frequency magnetron sputtering to fabricate a Sezawa wave pressure sensor. The crystalline structure, surface morphology, and pressure sensitivity of ZnO films were examined by X-ray diffraction, scanning electron microscopy, and network analyzer. The effects of thickness of the ZnO thin film and work frequency of the device on pressure sensitivity were investigated. The insertion loss, phase, and center frequency of device were shifted by adding force on sensing area. The results show that as the thickness of the ZnO film increases, the pressure sensitivity of the device enhances. The optimal ratio of ZnO film thickness to wavelength for silicon is 0.48, which has the highest pressure sensitivity.

摘要... i
Abstract....... ii
誌謝....iii
目錄... iv
表目錄.. vii
圖目錄.. viii
第一章、緒論.... 1
1.1前言 1
第二章、基礎理論 3
2.1壓電理論..... 3
2.1.1壓電效應... 3
2.1.2正壓電效應. 3
2.1.3逆壓電效應. 4
2.2壓電材料..... 5
2.2.1壓電材料分類....... 5
2.2.2壓電材料特性....... 5
2.3表面聲波..... 6
2.3.1表面聲波概論....... 6
2.3.2表面聲波... 7
2.4 表面聲波元件 8
2.4.1表面聲波元件概論... 8
2.4.2表面聲波元件設計... 9
2.4.3表面聲波相關參數... 11
2.5聲電效應..... 13
2.6壓力感測靈敏度....... 13
2.7氧化鋅介紹... 15
2.8薄膜沉積..... 16
2.8.1薄膜沉積... 16
2.8.2薄膜濺鍍... 16
2.8.3薄膜成長機制....... 18
2.9熱退火處理原理....... 19
2.10壓力感測器.. 20
2.10.1壓力感測器的相關應用....... 21
第三章、實驗步驟與分析... 22
3.1實驗流程架構. 22
3.2表面聲波元件製作..... 23
3.2.1氧化鋅薄膜濺鍍..... 23
3.2.2 IDTs指叉狀電極製作 25
3.3分析與量測儀器介紹.... 28
3.3.1場發射掃描式電子顯微鏡分析.. 28
3.3.2 X光繞射儀（X-ray Diffraction, XRD）...... 28
3.3.3網路分析儀（Network Analyzer）..... 28
3.4表面聲波元件壓力感測.. 30
3.5實驗藥品、耗材及儀器介紹...... 31
3.5.1實驗藥品及耗材..... 31
3.5.2實驗儀器... 32
第四章、結果與討論....... 33
4.1氧化鋅物理特性分析.... 33
4.1.1不同氧化鋅薄膜厚度之形貌分析. 33
4.1.2不同氧化鋅薄膜厚度之特性分析. 38
4.2表面聲波元件量測與分析 39
4.2.1指叉狀電極線寬10μm/5μm成長在不同氧化鋅薄膜厚度之頻率響應...... 40
4.3表面聲波元件之壓力感測與分析... 50
4.3.1不同指叉狀電極線寬對氧化鋅薄膜厚度壓力感測之插入損耗... 50
4.3.2不同指叉狀電極線寬對氧化鋅薄膜厚度壓力感測之相位/頻率變化...... 52
4.3.3壓力感測靈敏度..... 64
4.3.4不同指叉狀電極線寬對氧化鋅薄膜厚度5、10秒壓力感測之相位/頻率變化....... 65
第五章、結論.... 72
參考文獻 73
Exctended Abstract..... 79

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