臺灣博碩士論文加值系統

利用射頻磁控濺鍍將氧化鋅薄膜沉積在36°和42°Y切X傳播的鉭酸鋰上，以製造拉福波壓力感測器。通過X光繞射分析儀，掃描電子顯微鏡和網絡分析儀檢查了氧化鋅薄膜的晶體結構，表面形態和壓電性能。研究了氧化鋅薄膜的厚度對拉福波元件壓力敏感性的影響。通過在感測區域上施加壓力，可以靈敏地偏移元件的插入損耗、相位和中心頻率。結果表明，隨著氧化鋅膜厚度的增加，元件的壓力靈敏度顯著提高。對於36°和42°的鉭酸鋰，氧化鋅薄膜厚度與波長的最佳比值相同，為0.123時具有最高的壓力敏感性。

The ZnO thin film was deposited on 36° and 42° Y-cut, X-propagation lithium tantalate by radio frequency magnetron sputtering to fabricate a Love wave pressure sensor. The crystalline structure, surface morphology, and piezoelectric properties of ZnO film were examined by X-ray diffraction, scanning electron microscopy, and network analyzer. The effect of thickness of ZnO thin film on pressure sensitivity of Love wave device was investigated. The insertion loss, phase, and center frequency of device were shifted sensitively by adding force on sensing area. The results show that as the thickness of the ZnO film increases, the pressure sensitivity of the device was enhanced significantly. The optimal ratio of ZnO film thickness to wavelength for 36° and 42° lithium tantalate is the same at 0.123, which has the highest pressure sensitivity.

摘要...............................................i
Abstract..........................................ii
誌謝..............................................iii
目錄................................................iv
表目錄...............................................vi
圖目錄................................................vii
第一章、緒論............................................1
1.1前言.................................................1
第二章、基礎理論........................................3
2.1壓電效應與材料.......................................3
2.1.1正壓電效應.........................................3
2.1.2逆壓電效應.........................................4
2.1.3壓電材料............................................4
2.1.4壓電基板特性.......................................5
2.2表面聲波元件與相關參數.................................6
2.2.1波速與中心頻率.......................................7
2.2.2插入損耗(Insertion Loss).............................7
2.2.3機電耦合係數........................................8
2.2.4溫度頻率係數(TCF)....................................8
2.3表面聲波...............................................9
2.3.1雷利波(Rayleigh wave).................................9
2.3.2水平剪切聲波(Shear Horizontal Acoustic Waves).........10
2.3.3表面飄移塊體波(Surface Skimming Buck Waves, SSBW).....10
2.3.4拉福波(Love Waves)...................................10
2.4氧化鋅薄膜沉積方法......................................12
2.4.1射頻磁控濺鍍..........................................12
2.4.2薄膜成長機制..........................................14
2.5氧化鋅..................................................15
2.6壓力感測器..............................................16
2.6.1表面聲波壓力感測原理...................................16
2.6.2聲電效應(Acoustoelectric effect).......................17
第三章、實驗步驟與分析.......................................19
3.1實驗流程架構..............................................19
3.2表面聲波元件製作..........................................20
3.2.1黃光微影製程...........................................20
3.2.2氧化鋅薄膜濺鍍.........................................22
3.2.3光罩設計...............................................24
3.3分析與量測儀器介紹.........................................25
3.3.1場發射型掃描式電子顯微鏡（Field Emission Scanning Electron Microscope , FE-SEM）.....................................................25
3.3.2 X光繞射儀(X-ray Diffraction,XRD).........................25
3.3.3網路分析儀(Network Analyzer)...............................26
3.4表面聲波元件之壓力量測.........................................27
3.5實驗藥品、耗材及儀器介紹......................................28
3.5.1實驗藥品及耗材..............................................28
3.5.2實驗儀器...................................................29
第四章、結果與討論...............................................30
4.1氧化鋅薄膜形貌分析............................................30
4.2氧化鋅晶體結構XRD分析.........................................35
4.3表面聲波元件量測與分析........................................36
4.3.1沉積不同厚度氧化鋅薄膜於36˚和42˚鉭酸鋰基板上之頻率響應.........37
4.4表面聲波元件之壓力量測與分析...................................46
4.4.1不同氧化鋅薄膜厚度之壓力影響..................................46
4.4.2不同氧化鋅薄膜厚度對於壓力感測3、5、10秒時相位和頻率影響........47
4.4.3壓力感測總變化量表和圖........................................48
4.4.4壓力感測3、5、10秒時相位和頻率變化表和圖.......................63
第五章、結論......................................................76
參考文獻..........................................................77
Extended Abstract.................................................84

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