臺灣博碩士論文加值系統

摘　　要
隨著空氣污染日漸嚴重，人們開始對於空氣品質的檢定更加注重，針對氣體檢測的相關感測器需求也逐漸增加。
本研究主要的目第在於開發一感測器，用來量測SO2，且可以檢測到較低的濃度，並且有良好的穩定性及靈敏度。本研究主要利用半導體式的感氣體感測器作為研究主軸，利用SnO2作為感測器之感測薄膜，白金作為半導體式氣體感測器的加熱電極。
本研究之氣體感測器主要透過MEMS製程來完成感測器的製作，其中包含微加熱電極的製作流程，以及利用磁控濺鍍來濺鍍SnO2感測層，在利用ICP進行深蝕刻，開發出懸浮式的薄膜，可以降低感測器的熱散失進而減少功率的損耗達到結能的效果。
本研究透過透過添加金屬催化物的方式使感測器之量測更加穩定，並增加對氣體之響應，在添加Au後明顯可以使氣體感測器的量測更加穩定且比NiO獲得的響應更高。
透過SEM、XRD、EDS等儀器分析薄膜材料SnO2、催化劑等來作為感測器製作之參考找到適合之實驗參數。

With the increasing air pollution, people began to pay more attention to the verification of air quality, and the demand for related sensors for gas detection has gradually increased.
The main goal of this research is to develop a sensor for measuring SO2, which can detect lower concentrations and has good stability and sensitivity. In this study, a semiconductor-type sensible gas sensor is mainly used as a research spindle, and SnO2 is used as a sensing film of a sensor, and platinum is used as a heating electrode of a semiconductor gas sensor.
The gas sensor of this research mainly completes the fabrication of the sensor through the MEMS process, including the fabrication process of the micro-heated electrode, and the sputtering of the SnO2 sensing layer by magnetron sputtering, and deep etching by ICP. The floating film can reduce the heat loss of the sensor and reduce the power loss to achieve the junction energy.
In this study, by adding a metal catalyst to make the measurement of the sensor more stable and increase the response to the gas, the addition of Au can obviously make the measurement of the gas sensor more stable and more responsive than NiO. high.
The SEM, XRD, EDS and other instruments were used to analyze the thin film material SnO2, catalyst, etc. as a reference for the fabrication of the sensor to find suitable experimental parameters.

目　　錄
摘　　要 I
Abstract II
目　　錄 IV
表目錄 VII
圖目錄 VIII
第一章　緒論 1
1.1　研究背景 1
1.2　研究動機 3
1.3　研究目的 5
第二章　文獻回顧與理論 6
2.1　氣體感測器 6
2.1.1觸媒燃燒式氣體感測器 7
2.1.2電化學式氣體感測器 9
2.1.3紅外線式氣體感測器 10
2.1.4金屬氧化薄膜式 12
2.2　氣體吸附之原理 17
2.3　電阻式微加熱器原理 18
2.4　添加金屬催化劑原理 18
2.5　二氧化硫氣體介紹 19
第三章　研究方法 21
3.1　氣體感測器製作流程 22
3.1.1　氣體感測器光罩設計 22
3.1.2　晶圓清洗 23
3.1.3絕緣層 23
3.1.4第一道光罩 24
3.1.5第二道光罩 25
3.1.6第三道光罩 26
3.1.7第四道光罩 28
3.1.8第五道光罩 28
3.2後處理 30
3.3量測實驗 31
3.4　儀器設備使用介紹 31
3.4.1 TSRI之儀器設備 32
3.4.2成大貴儀量測分析儀器 41
第四章　實驗結果 43
4.1 SEM、EDS、XRD分析 43
4.2熱影像儀分析 44
4.3氣體量測 44
4.4不同催化劑之量測結果 45
4.5小結 46
第五章　結果討論與未來展望 71
5.1 結果與討論 71
5.2未來展望 73
參考文獻 74

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