臺灣博碩士論文加值系統

隨著科技日益增長，在量測技術上，已朝著精確、快速、穩定度高和非侵入式的測量來發展。光學同調斷層掃描（Optical Coherence Tomography，稱為OCT）是一種非侵入式的光學成像技術，可以用來量測樣品表面的輪廓、厚度以及折射率等資訊，目前這項技術已廣泛用於許多生物醫學成像研究、電子工程工業檢測、半導體製程等領域。相較於其他接觸式表面輪廓技術，OCT的技術優勢主要能夠進行深度解析度、高解析度，以及快速的量測速度，過程中不會受到溫度、濕度等影響，也不需要探針等耗材的優點。本研究旨在探討OCT技術在液晶(Liquid Crystal，稱為LC)樣本缺陷檢測方面的研究。我們使用光學同調斷層掃描對半透明的液晶樣本進行掃描量測，透過干涉原理得到樣本內部液晶樣本三個不同維度圖像，通過質化分析，建構3D圖像，可以直接液晶樣本的缺陷位置；透過量化分析，以不同電場下檢測液晶圖像的變化，並使用Matlab將圖像轉換，以得到更精準的液晶層厚度，再計算求出折射率，將結果對比具有缺陷情況下液晶樣本的折射率，實驗結果顯示，透過OCT技術可以準確地檢測液晶樣本缺陷，且具有高靈敏度、解析度以及能夠深度解析的優點，對於液晶樣本缺陷檢測上的發展具有重要意義。

With the rapid advancement of technology, measurement techniques have been developed towards precision, speed, high stability, and non-invasive measurements. Optical Coherence Tomography (OCT) is a non-invasive optical imaging technique that can be used to measure surface contour, thickness, and refractive index of samples. Currently, this technology is widely used in various fields such as biomedical imaging research, electronic engineering industry inspection, and semiconductor processing. Compared to other contact-based surface profiling techniques, OCT offers advantages in terms of depth resolution, high resolution, and fast measurement speed. It is not affected by factors like temperature and humidity during the process, and it does not require consumables like probes.This research aims to investigate the application of OCT technology in defect detection of Liquid Crystal (LC) samples. We performed scans and measurements on translucent LC samples using Optical Coherence Tomography. By utilizing the principle of interference, we obtained three-dimensional images of the internal LC sample. Through qualitative analysis, we constructed 3D images that directly revealed the positions of defects in the LC sample. Through quantitative analysis, we detected changes in the LC images under different electric fields and used Matlab to transform the images to obtain more accurate LC layer thickness. We then calculated the refractive index and compared it with the refractive index of LC samples with defects. The experimental results showed that OCT technology can accurately detect defects in LC samples. It offers high sensitivity, resolution, and the ability to perform deep analysis, which is significant for the development of defect detection in LC samples.

摘要.......i
Abstract.......ii
誌謝.......iii
目錄.......iv
表目錄.......v
圖目錄.......vi
第一章 緒論.......1
1. 1 前言.......1
1. 2 研究動機和目的.......2
1. 3 論文架構.......2
1. 4 文獻探討.......3
第二章 光學同調斷層掃描技術背景與原理介紹.......5
2. 1 簡介.......5
2. 2 OCT與其他成像模型比較.......6
2. 3 OCT干涉原理.......7
2. 4 時域光學同調斷層掃描(Time-domain OCT).......9
2. 5 頻域光學同調斷層掃描(Frequency-domain OCT).......11
2. 6 光學同調斷層掃瞄系統解析度說明.......16
第三章 樣本特性與光路長度.......17
3. 1 液晶分子結構.......17
3. 2 液晶光學特性.......18
3. 3 樣本製程.......19
3. 5 光路長度.......21
3. 6 補償係數.......22
第四章 實驗內容與研究結果.......23
4. 1 實驗儀器.......23
4. 2實驗架構.......24
4.2. 1 頻域光學同調斷層掃描系統.......24
4.2. 2 量測圖像.......25
4. 3 研究結果.......28
4.3. 1 缺陷檢測.......28
4.3. 2 折射率量測.......30
液晶樣本的理論值.......33
第五章 結論.......40
參考資料.......41
Extended Abstract.......43

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