近年來，AlTiN和AlCrN硬質塗層已經被廣泛應用於切削工具。加工難削材已經成為一種趨勢，為了增強這些材料的加工性能，可以添加適量的硼（B）元素來改善AlTiN和AlCrN塗層的硬度、韌性、熱穩定性和耐磨性。硼（B）原子的添加導致金屬氮化物多層結構AlTiN與AlCrN形成固溶體，則奈米晶AlTiN與AlCrN形成非晶的BN相，使變成奈米複合材料。
Ti-6Al-4V合金是一種目前廣泛應用的材料，以其高斷裂韌性和硬度而聞名，因此成為航空航太、生醫科技和汽車等行業的首選，其卓越的加工性質使其受到青睞。然而，在Ti-6Al-4V的加工過程中，由於其相對較低的彈性模數和導熱性，會產生大量的熱，這種多餘的熱會加速刀具的磨損並可能導致刀具失效。
本研究將使用Al60Ti30B10、Al60Cr30B10與Cr99三種靶材的組合，透過陰極電弧沉積系統鍍製單層合金氮化物硬質薄膜AlTiBN與AlCrBN及奈米多層合金氮化物硬質薄膜AlTiBN/AlCrBN，探討B元素對於薄膜的硬度、韌性、熱穩定性及耐磨性，然而調整AlTiBN與AlCrBN靶電流比例(80：80、100：60、60：100)改變薄膜元素比例並且對薄膜進行機械性質分析，探討薄膜的機械性能。然而使用場發射掃描式電子顯微鏡、場發射穿透式電子顯微鏡，觀察薄膜截面形貌，並使用EPMA進行元素分析，在使用低掠角XRD進行晶體結構分析，最後鍍製在碳化鎢刀具上，用電腦數值控制加工機以往復式銑削的方式加工Ti-6Al-4V合金，並探討薄膜是否有效提高刀具在加工時的熱穩定性及刀具壽命。
根據研究結果顯示，多層CTB3塗層的設計在性能上表現出色。從SEM與TEM截面觀察中發現，由於硼的加入，晶粒細化有效抑制了晶粒的成長，形成了更緻密的奈米多層膜結構。這種結構受到了多層薄膜強化機制的影響，使得CTB3薄膜獲得了最高硬度(37.8 GPa)，由於其設計CTB3薄膜中AlCrB靶的靶電流較高，因此在耐磨性方面會優於其他薄膜，有較低的磨耗率(8.7x10-7 mm3/Nm)。此外，多層薄膜還展現出優異的抗破裂韌性與H3/E2抗塑性變形能力，在經歷70萬次動態衝擊後，仍顯示出卓越的抗衝擊疲勞能力。
在使用乾式和濕式切削Ti-6Al-4V合金時，多層CTB3薄膜均展現了出色的切削性能。在高溫切削過程中，CTB3薄膜會生成Al2O3、TiO2、Cr2O3、B2O3等氧化物，這些氧化物能有效阻止氧原子向薄膜內部擴散，並在表面形成自潤滑層，從而顯著提高薄膜的抗氧化性與抗沾黏性，進一步降低切削過程中的磨耗量。在乾式切削條件下，多層CTB3薄膜能有效將刀具壽命延長至300%；而在濕式切削條件下，則能將刀具壽命延長至200%。這些結果顯示，多層CTB3薄膜在不同切削條件下均具有優異的性能，顯著提升了刀具的使用壽命。

In recent years, AlTiN and AlCrN hard coatings have been widely used in cutting tools. Machining of difficult-to-cut materials has become a trend, and to enhance the machining performance of these materials, a suitable amount of boron (B) can be added to improve the hardness, toughness, thermal stability, and wear resistance of AlTiN and AlCrN coatings. The addition of boron (B) atoms leads to the formation of solid solutions in the multilayered metal nitride structures of AlTiN and AlCrN, transforming nanocrystalline AlTiN and AlCrN into amorphous BN phases, thereby creating nano-composite materials.
Ti-6Al-4V alloy is currently widely used due to its high fracture toughness and hardness, making it a preferred choice in industries such as aerospace, biomedical technology, and automotive. However, during the machining of Ti-6Al-4V, excess heat is generated due to its relatively low modulus of elasticity and thermal conductivity. This excess heat accelerates tool wear and may lead to tool failure.
This study aims to use combinations of three types of targets: Al60Ti30B10, Al60Cr30B10, and Cr99, to deposit single-layer alloy nitride hard films AlTiBN and AlCrBN, as well as nano-multilayer alloy nitride hard films AlTiBN/AlCrBN, using a cathodic arc deposition system. The influence of the B element on the hardness, toughness, thermal stability, and wear resistance of the films will be investigated. Additionally, adjustments in the target current ratio (80:80, 100:60, 60:100) of AlTiBN and AlCrBN will vary the elemental composition of the films, followed by mechanical property analysis. The films' cross-sectional morphology will be observed using field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM), and elemental analysis will be conducted using EPMA. Crystal structure analysis will be performed using low-angle X-ray diffraction (XRD). Finally, the films will be deposited on tungsten carbide tools, and computer numerical control (CNC)
milling of Ti-6Al-4V alloy will be conducted in a reciprocating manner to investigate whether the films effectively enhance tool thermal stability and tool life.
According to the research results, the multi-layer CTB3 coating design exhibits excellent performance. From SEM and TEM cross-sectional observations, it is found that the addition of boron effectively inhibits grain growth, resulting in a denser nano-multilayer film structure. This structure benefits from a multi-layer film strengthening mechanism, achieving the highest hardness (37.8 GPa) in the CTB3 film. Due to the higher target current of AlCrB in the CTB3 film design, it also shows superior wear resistance with a lower wear rate (8.7x10-7 mm3/Nm). Furthermore, the multi-layer film demonstrates excellent fracture toughness and H3/E2 resistance to plastic deformation, maintaining outstanding resistance to impact fatigue even after 700,000 dynamic impacts.
The multi-layer CTB3 films show excellent cutting performance in dry and wet machining of Ti-6Al-4V alloy. During high-temperature cutting, the CTB3 films generate oxides such as Al2O3, TiO2, Cr2O3, and B2O3, which effectively prevent oxygen atoms from diffusing into the film interior, forming a self-lubricating layer on the surface. This significantly improves the film's oxidation resistance and anti-adhesion properties, further reducing wear during cutting processes. Under dry cutting conditions, the multi-layer CTB3 films extend tool life by up to 300%, while under wet cutting conditions, they extend tool life by up to 200%. These results demonstrate that the multi-layer CTB3 films exhibit outstanding performance under different cutting conditions, significantly enhancing tool longevity.

摘要...i
Abstract...iii
誌謝...v
目錄...vi
表目錄...viii
圖目錄...ix
第一章 緒論...1
1.1 前言...1
1.2研究動機與目的...1
第二章 文獻回顧...2
2.1 難削材加工...2
2.2 刀具磨損機制...6
2.3 刀具硬質薄膜種類與市場趨勢...8
2.4 硬質薄膜機械性質、熱穩定性與切削特性...10
2.4.1 氮化鋁鈦...10
2.4.2 氮化鋁鉻...14
2.4.3 氮化鋁鈦硼...20
2.4.4 氮化鋁鉻硼...25
2.5 薄膜強化...29
2.5.1 固溶強化...29
2.5.2 晶粒細化強化...30
2.5.3 多層薄膜強化、奈米晶與非晶複合結構強化...31
2.6 陰極電弧蒸鍍系統...40
2.6.1 陰極電弧蒸鍍原理...40
2.6.2 陰極電弧蒸鍍弧源設計與鍍膜品質...41
第三章 實驗方法...44
3.1 實驗流程...44
3.2 薄膜設計與實驗方法...45
3.2.1 前處理與鍍膜步驟...45
3.2.2 單層AlTiBN及AlCrBN薄膜製程設計...47
3.2.3 奈米多層AlTiBN/AlCrBN薄膜製程設計...49
3.3 微觀結構分析...50
3.3.1 場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscope, FESEM)...50
3.3.2 場發射穿透式電子顯微鏡(Field Emission Transmission Electron Microscope,FETEM)...52
3.3.3 場發射電子微探儀(Field Emission Electron Probe Microanalyzer,EPMA)...54
3.3.4 X光繞射分析儀(X-Ray Diffractometer, XRD)...55
3.4 機械性質分析...57
3.4.1 洛式硬度試驗機(Rockwell Hardness)...57
3.4.2 維克氏壓痕試驗機(Vickers Indentaion)...59
3.4.3 奈米壓痕試驗機(Nano-indentation)...61
3.4.4 磨耗試驗機(Tribometer)...62
3.4.5 刮痕試驗機(Scratch Test)...63
3.4.6 動態衝擊疲勞試驗機(Cyclic Loading Device)...65
3.5 薄膜表面分析...66
3.5.1 水接觸角量測分析(Water Contact Angle, WCA)...66
3.5.2 雷射顯微鏡(Laser Microscope)...67
3.6 鈦合金切削測試...68
第四章 結果與討論...71
4.1 薄膜微結構分析...71
4.1.1 SEM微結構...71
4.1.2 EPMA元素成分定量分析...73
4.1.3 X光繞射分析...74
4.1.4 TEM分析...77
4.2 薄膜機械性質分析...79
4.2.1 洛式壓痕分析...79
4.2.2 刮痕試驗分析...79
4.2.3 奈米壓痕分析...80
4.2.4 破裂韌性分析...81
4.2.5 磨耗試驗分析...83
4.2.6 動態衝擊試驗分析...85
4.3 薄膜表面分析...87
4.3.1 水接觸角量測分析...87
4.4 鈦合金切削測試...88
第五章 結論...98
5.1 薄膜微結構及表面分析...98
5.2 薄膜機械性質與表面分析...99
5.3 切削性能分析...100
第六章 未來展望...101
參考文獻...102
Extended Abstract...108

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