臺灣博碩士論文加值系統

本論文結合重心計算機晶片與重力加速度感測器來實現一種整合重心計算器與重力感測器之運算平台，兩款晶片透過國家實驗研究院台灣半導體研究中心(Taiwan Semiconductor Research Institute, TSRI)實作課程採用聯電(UMC) 0.18-μm Mixed-Mode and RFCMOS 1P6M 1.8V/3.3V製程來以實現了重心計算機晶片，並再藉由實作課程中的MEMS後製程實現重力加速度感測器。本論文藉由現場可程式邏輯閘陣列(Field Programmable Gate Array, FPGA)整合此兩晶片來實現計算重心的運算平台，重心計算機晶片可藉由重力加速度感測器所回傳的資訊來進行計算推估出實際的重心位置。
為了評估本文所提出運算平台之效能，我們設計一模擬飛行載具、車輛、船舶於駕駛當中所會遇到之顛簸運動情形，我們可以利用本文所提出之運算平台來對於此運動情形計算出重心位置，並量測驗證該運算平台能夠正確地計算出重心座標之位置。

In this paper, we combine a gravity center calculator chip and a G-sensor chip to implement a platform. The designs and measurements of the two chips are supported by the TSRI (Taiwan Semiconductor Research Institute). The two chips were fabricated using a 0.18-μm Mixed-Mode and RFCMOS 1P6M 1.8V/3.3V technology and a 0.18-μm MEMS technology, respectively. A FPGA (Field Programmable Gate Array) was adopted to integrate the two chips to realize a detection platform that calculates the center of gravity. The gravity center calculator chip takes the information returned by the G-sensor to calculate and estimate the actual center of gravity position.
In order to evaluate the effectiveness of the proposed platform, we simulate motion encountered by plane, vehicles, and ships during driving, and then we use the platform to calculate the center’s location of gravity for those motion situations. The measured results show the functionality provided by the platform.

摘 要 I
ABSTRACT II
致謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章 緒論 1
1.1 前言 1
1.2 論文架構 2
第二章 TSRI實作課程晶片介紹 3
2.1 計算重心座標晶片介紹[3] 3
2.1.1 計算重心座標晶片設計規格 4
2.1.2 計算重心座標晶片設計流程 6
2.2 CMOS MEMS重力感測器晶片介紹[4] 8
2.2.1 CMOS MEMS重力感測器晶片設計規格 8
2.2.1.1 電容式重力感測器彈簧設計 9
2.2.1.2 電容式重力感測器鰭片狀電容設計 10
2.2.1.3 電容式重力感測器懸浮質量塊設計 12
2.2.1.4 電容式重力感測器規格 14
第三章整合開發環境平台 15
3.1 計算重心座標晶片驗證 15
3.1.1 開發平台評選 15
3.1.2 驗證平台設計 23
3.1.3 以驗證平台驗證計算重心座標晶片 29
3.2 CMOS MEMS重力感測器晶片驗證 34
3.2.1 CMOS MEMS重力感測器晶片量測印刷電路板 34
3.2.3 CMOS MEMS重力感測器晶片加速度量測 38
3.3 一種整合重心計算器與重力感測器之運算平台 42
第四章 運算平台的發展與應用 53
4.1 應用方向 53
4.2 模擬測試系統平台搭建 55
4.3 運算平台應用示範 59
4.4 應用成果 61
第五章 結論與未來研究方向 63
5.1 結論 63
5.2 未來研究方向 63
參考文獻 65

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