臺灣博碩士論文加值系統

本研究開發主要是以甲醇為氣體的氣體感測器做為研究目的，為了有效改善原始氧化鋅感測元件的效率，利用金奈米粒子吸附於氧化鋅奈米柱上，進而提升氧化鋅本身的電化學特性。本篇論文採用的研究方法可區分為兩個步驟，第一步是使用了低溫、方便且容易合成的水熱法用於生長氧化鋅奈米柱。接著第二步再藉由濺射鍍膜系統將金奈米粒子濺鍍於氧化鋅奈米柱表面上，並將其製作為氣體感測元件以利於電化學量測，後續將其與第一步驟做相互比較。
透過精密儀器的分析，觀察其表面型態(場發射掃描電子顯微鏡)、材料的結晶度(X-射線繞射分析)、光學反應(光致發光光譜)以及元素含量的分布(穿透式電子顯微鏡、能量色散X射線譜與化學分析電子光譜儀)，並進一步證實了影響感測器的因素。
研究結果顯示，有無金奈米粒子吸附的氧化鋅奈米柱對甲醇1000 ppm響應值分別為63 %與41 %，並且在工作溫度150℃和甲醇濃度為1000 ppm下呈現出良好的特性，證實了金奈米粒子不但可以有效的提升感測器的靈敏度也增強了對感測元件的穩定度。

This research and development is mainly based on the gas sensor with methanol as the gas as the research purpose. In order to effectively improve the efficiency of the original zinc oxide sensing element, Au nanoparticles are used to adsorb on the zinc oxide nanorods, thereby improving the electrochemical properties of the zinc oxide itself. The research method used in this paper can be divided into two steps. The first step is to use a low-temperature, convenient and easy-to-synthesize hydrothermal method to grow zinc oxide nanorods. Then in the second step, the Au nanoparticles are sputtered on the surface of the zinc oxide nanorods by a sputtering coating system, and they are made into gas sensing elements to facilitate electrochemical measurement. Then compare it with the first step.
Through the analysis of precision instruments, we observed the surface morphology (FE-SEM), the crystallinity of the material (XRD), the optical response (PL) and the distribution of element content (TEM, EDS, XPS), and further confirmed the factors affecting the sensor.
The results of the study showed that the response values of zinc oxide nanorods with or without Au nanoparticle adsorption to methanol 1000 ppm were 63 % and 41 %, respectively. And it shows Au characteristics at a working temperature of 150°C and a methanol concentration of 1000 ppm, which proves that Au nanoparticles can not only effectively improve the sensitivity of the sensor, but also enhance the stability of the sensor element.

摘要.................................................i
Abstract............................................ii
誌謝................................................iii
目錄.................................................iv
表目錄...............................................vi
圖目錄..............................................vii
第一章 緒論..........................................1
1.1 前言..........................................1
1.2 研究動機......................................3
第二章 文獻回顧........................................4
2.1 氧化鋅奈米材料簡介.................................4
2.1.1 原子晶格結構.....................................4
2.1.2 壓電特性與極性/非極性面...........................5
2.1.3 光學特性.........................................6
2.1.4 能帶結構.........................................7
2.1.5 奈米結構.........................................9
2.2 薄膜成核成長理論...................................11
2.3 氧化鋅奈米結構之合成方式............................14
2.3.1 氣-液-固生長法(Vapor-Liquid-Solid, VLS)..........14
2.3.2 化學氣相沉積法（Chemical Vapor Deposition, CVD）..15
2.3.3 模板法(Template-based method)....................16
2.3.4 熱蒸鍍法(Thermal evaporation).....................16
2.3.5 溶膠-凝膠法(Sol-Gel method).......................17
2.3.6 水溶液法(Aqueous solution method).................18
2.3.7 水熱法(Hydrothermal method).......................20
2.4 水熱法成長氧化鋅奈米結構機制..........................22
2.5 金屬半導體氣體感測器.................................23
2.6 半導體元件結構與原理.................................26
2.6.1 半導體元件結構.....................................26
2.6.2 金屬半導體氣體感測器之原理..........................28
2.6.3 蕭特基接觸(Schottky contact).......................28
2.7 揮發性有機化合物(Volatile Organic Compounds, VOCs)....32
2.7.1 甲醇的介紹.........................................32
第三章 實驗步驟與量測機台分析..............................34
3.1 實驗室化學藥品與貴重儀器...............................34
3.1.1 實驗室化學藥品......................................34
3.1.2 貴重儀器............................................35
3.2 儀器分析原理與介紹.....................................36
3.2.1 射頻磁控濺鍍系統(RF magnetic sputtering system)......36
3.2.2 場發射掃描式電子顯微鏡(Field-Emission Scanning Electron Microscope, FE-SEM)......................................................38
3.2.3 能量色散X射線譜(Energy-Dispersive X-ray Spectroscopy, EDS).....39
3.2.4 X-射線繞射儀(X-ray diffraction, XRD).................40
3.2.5化學分析電子光譜儀(Electron Spectroscopy for Chemical Analysis, ESCA)..41
3.2.6 穿透式電子顯微鏡(Transmission Electron Microscopy, TEM)..............42
3.2.7 光致發光(Photoluminescence, PL)......................43
3.2.8 高真空I-V量測系統(High vacuum I-V measurement system).......44
3.3 實驗步驟...............................................45
3.3.1 基板清洗.............................................46
3.3.2 氧化鋅晶種層沉積......................................47
3.3.3 金奈米粒子吸附與氧化鋅奈米柱成長........................48
3.3.4 電化學量測系統.........................................50
第四章 結果與討論............................................51
4.1 氧化鋅奈米柱特徵分析.....................................51
4.1.1 氧化鋅奈米柱場發射電子顯微鏡分析(FE-SEM)................51
4.1.2 能量色散X射線譜分析金奈米粒子吸附氧化鋅奈米柱............54
4.1.3 金奈米粒子吸附氧化鋅奈米柱之穿透式電子顯微鏡分析..........57
4.1.4 X-射線繞射儀之氧化鋅奈米柱分析..........................59
4.1.5 光致發光之氧化鋅奈米柱分析..............................61
4.1.6 化學分析電子光譜之金奈米粒子吸附氧化鋅奈米柱分析..........62
4.2 氣體感測器之電性分析......................................65
4.2.1 不同鍍金厚度之氣體感測器分析.............................65
4.2.2 不同溫度之氣體感測器分析.................................66
4.2.3 不同濃度之氣體感測器疊加性分析............................69
4.2.4 氣體感測對不同氣體的選擇性................................71
4.2.5 氣體感測元件之再現性......................................71
4.2.6 氣體感測元件之穩定性......................................73
4.2.7 氣體感測原理.............................................73
第五章 結論....................................................75
5.1 結論.......................................................75
5.2 未來展望...................................................75
參考文獻.......................................................76
Exctended Abstract............................................83

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