臺灣博碩士論文加值系統

本研究選用製程上較PZT(piezoelectric ceramic transducer)環保、製作費用較便宜，在製作過程上也較容易的ZnO(Zinc oxide)來作為壓電元件的材料。首先，使用DC濺鍍機(DC sputtering system)並設定已知的參數在玻璃基板上濺鍍氧化鋅薄膜作為晶種層，之後浸泡於硝酸鋅與環六亞甲基四胺溶液中，放入恆溫水槽加熱使薄膜表面成長出氧化鋅奈米柱結構作為壓電薄膜，然後使用不同曲率之玻璃與壓電材料黏貼形成大小不同的共振腔，在水槽中進行實際量測，比較其中的差異，找到一組最適合應用於水中聽音器的模式，我們發現ZnO壓電薄膜製作之水聽器的頻率響應比B&K8104水聽器平穩，而且使用直徑9.8mm、曲率5.7mm-1共振腔接收到的訊號強度比其他樣本來的好。

This paper studies the selection and use of ZnO (Zinc oxide) piezoelectric material due to lower cost and easier process than PZT(piezoelectric ceramic transducer). Firstly, DC sputter system was used for sputtering zinc oxide film as a seed layer on the glass substrate. Then the ZnO seed layer was immersed in zinc nitrate(Zn(NO3)2) and Methenamine(C6H12N4) solution. Immersed ZnO film was put into a heating circulating water bath to heat the surface of the film for growing a zinc oxide nanocolumn structure as a piezoelectric film. Then, we use different curvatures of glass adhering to piezoelectric material to form various sizes of the resonant cavity. In order to find a model that is most suitable for the hydrophone, we measure in the sink and compare the different characteristics. Hydrophones produced by ZnO piezoelectric film frequency response was smoother than B&K8104. The curvature of 5.7 mm-1 resonance cavity with the decimeter of 9.8 mm receives a better signal intensity than other samples.

摘 要............................................................................................................................... i
ABSTRACT .................................................................................................................. ii
致謝.............................................................................................................................. iii
目錄............................................................................................................................... iv
圖目錄........................................................................................................................... vi
表目錄............................................................................................................................ x
第一章 緒論............................................................................................................ 1
1-1 前 言 ............................................................................................................ 1
1-2 研究動機與目的........................................................................................ 1
第二章 理論基礎.................................................................................................... 3
2-1 壓電材料.................................................................................................... 3
2-2 氧化鋅基本特性[8] ................................................................................... 5
2-3 氧化鋅奈米結構材料製作方法................................................................ 5
2-4 共振腔........................................................................................................ 5
第三章 實驗方法.................................................................................................... 7
3-1 結構設計 .................................................................................................... 7
3-2 實驗用品 .................................................................................................... 8
3-2-1 實驗藥品........................................................................................ 8
3-2-2 實驗靶材........................................................................................ 8
3-2-3 實驗溶液........................................................................................ 8
3-2-4 實驗設備........................................................................................ 8
3-3 實驗流程.................................................................................................. 13
3-4 DC濺鍍ZnO種子層以及電極 ................................................................. 14
3-5 快速熱退火使氧化鋅[002]結構更加突出 ............................................. 15
3-6 水熱法成長氧化鋅奈米柱...................................................................... 16
3-7 共振腔製作.............................................................................................. 17
第四章 結果與討論.............................................................................................. 18
4-1 材料分析.................................................................................................. 18
4-1-1 XRD分析 ..................................................................................... 18
4-1-2 SEM分析 ..................................................................................... 19
4-2 訊號分析.................................................................................................. 20
4-2-1 頻譜量測分析.............................................................................. 20
4-2-2 37.5KHz訊號量 ........................................................................... 38
4-2-3 頻率響應...................................................................................... 42
參考文獻...................................................................................................................... 47

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