目錄
摘要............................................................................................................................... i
ABSTRACT ................................................................................................................... iii
致謝.................................................................................................................................. v
目錄................................................................................................................................. vi
表目錄........................................................................................................................... viii
圖目錄............................................................................................................................. ix
第 1 章 緒論.................................................................................................................... 1
1.1 常壓電漿簡介與原理........................................................................................... 1
1.2 黑色二氧化鈦簡介............................................................................................... 2
1.3 研究動機與目的................................................................................................... 3
第 2 章 文獻回顧............................................................................................................ 4
2.1 摻雜銀之黑色二氧化鈦........................................................................................ 4
2.2 製備方法................................................................................................................ 4
2.2.1 氫氣還原........................................................................................................ 4
2.2.2 氫化物還原..................................................................................................... 5
2.2.3 電化學還原.................................................................................................... 6
2.2.4 氫氣電漿........................................................................................................ 7
第 3 章 實驗方法............................................................................................................ 8
3.1 實驗流程................................................................................................................ 8
3.2 薄膜製備方法........................................................................................................ 9
3.2.1 前驅懸浮液配製............................................................................................. 9
3.2.2 基板前處理及旋轉塗佈............................................................................... 10
3.3 常壓微波電漿處理............................................................................................. 10
3.4 分析檢測............................................................................................................. 12
3.4.1 X 光繞射儀(X-ray Diffractometer, XRD) ................................................. 12
3.4.2 色差儀(Colorimeter)................................................................................... 13
3.4.3 光學顯微鏡(Optical microscope, OM)...................................................... 14
3.4.4 場發射掃描電子顯微鏡(Field emission scanning electron microscope,
FE-SEM)................................................................................................................ 15
3.4.5 紫外光-可見光吸收光譜儀(Ultraviolet and visible absorption)............. 16
vii
第 4 章 結果與討論...................................................................................................... 18
4.1 常壓電漿溫度測量結果..................................................................................... 18
4.2 表面顏色變化...................................................................................................... 20
4.3 X 光繞射結果 ...................................................................................................... 23
4.3.1 常壓電漿轟擊前後之比較.......................................................................... 23
4.3.2 常壓電漿轟擊對不同樣品之比較.............................................................. 25
4.4 光學顯微鏡分析................................................................................................. 27
4.5 電子顯微鏡分析結果......................................................................................... 29
4.5.1 表面微結構分析.......................................................................................... 29
4.5.2 背向散射電子分析...................................................................................... 33
4.5.3 EDS 分析 ...................................................................................................... 35
4.5.4 橫截面微結構分析...................................................................................... 41
4.6 電性分析............................................................................................................. 43
4.7 X 光光電能譜分析 .............................................................................................. 45
4.8 紫外光/可見光分析儀分析................................................................................ 51
4.8.1 光學吸收率分析............................................................................................... 51
4.8.2 光學能隙分析............................................................................................... 52
4.9 光降解實驗......................................................................................................... 55
第 5 章 結論.................................................................................................................. 57
參考文獻........................................................................................................................ 59

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