臺灣博碩士論文加值系統

本論文使用基於嚴格耦合波分析(RCWA)之Rsoft軟體研究導模共振元件之參數對共振與感測器特性的影響，首先探討參數對橫向磁場(TM)波與橫向電場(TE)波的共振角間距的影響，模擬結果顯示元件的波導厚度、光柵的調製深度、週期與占寬比與折射率皆會影響TM波與TE波的共振角間距，其中影響最大參數為波導厚度；在感測器特性方面，模擬結果也顯示波導厚度對感測器的靈敏度影響最大，因此我們比較了波導厚度為228 nm與129 nm 之導模共振元件的模擬與實驗結果。此外，若使用低成本的奈米壓印二氧化鈦溶膠凝膠溶液來製作導模共振元件的光柵結構，可以先壓印光柵結構後再濺鍍波導層或先濺鍍波導層再壓印光柵結構，兩種製程會有不同的佔寬比的光柵結構，模擬結果顯示兩種製程造成的佔寬比差異對導模共振元件的感測靈敏度影響很小。

This paper uses the Rsoft software based on Rigorous Coupled Wave Analysis (RCWA) to study the influence of the parameters of the guided mode resonant element on the resonance and sensor characteristics. Firstly, the parameters affect the transverse magnetic (TM) wave and transverse electric (TE) wave The influence of the resonant angular spacing, the simulation results show that the waveguide thickness of the component, the modulation depth of the grating, the period, the duty ratio and the refractive index will all affect the resonant angular spacing between the TM wave and the TE wave, and the most influential parameter is the waveguide thickness; In terms of sensor characteristics, the simulation results also show that the thickness of the waveguide has the greatest impact on the sensitivity of the sensor, so we compared the simulation and experimental results of the guided mode resonance element with a waveguide thickness of 228 nm and 129 nm. In addition, if the low-cost nano-imprinted titanium dioxide sol-gel solution is used to make the grating structure of the guided mode resonance element, the grating structure can be imprinted first and then the waveguide layer can be sputtered or the waveguide layer can be sputtered first and then the grating structure can be imprinted. The two processes will have grating structures with different duty ratios, and the simulation results show that the difference in duty ratios caused by the two processes has little effect on the sensing sensitivity of the guided mode resonance element.

摘要......i
Abstract......ii
誌謝......iii
目錄......iv
表目錄......vii
圖目錄......viii
第一章 導論......1
1.1研究目的與動機......1
1.2文獻回顧......2
1.3研究方法......6
1.4論文架構......6
第二章 導模共振原理......7
2.1 平面波導理論......7
2.2 橫向電場(TE)模態[8]......8
2.3 橫向磁場(TM)模態[8]......9
2.4 導模共振效應......10
第三章 元件結構參數模擬及分析......11
3.1 Rsoft模擬軟體介紹......11
3.2導模共振元件參數討論......18
3.3改變參數對TE&TM波的共振角度偏移效果......19
3.3.1改變玻璃折射率......19
3.3.2改變TiO2折射率......21
3.3.3改變調製深度......23
3.3.4改變波導厚度......25
3.3.5改變光柵週期......27
3.4結構改變測試......29
3.4.1光柵占寬比70%......30
3.4.2光柵占寬比50%......33
3.4.3光柵占寬比30%......36
第四章 量測與實驗結果......39
4.1量測架構......39
4.2量測結果......40
4.2.1波導厚度230 nm的試片測量......40
4.2.2波導厚度130 nm的試片測量......44
4.3改變葡萄糖濃度之模擬及分析......48
4.3.1實驗架構......48
4.3.2 波導厚度130 nm試片測量及模擬比較......49
4.3.3 波導厚度230 nm試片測量及模擬比較......51
第五章 結論與未來展望......53
參考文獻......54
Extended Abstract......55

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