臺灣博碩士論文加值系統

氮化矽（Si3N4）具有高溫強度高、導熱係數低、耐腐蝕、耐磨性好、斷裂韌性高、強度重量比高、抗彎強度好等優越性能，是一種很有前途的先進工程陶瓷。低密度。由於這些品質，氮化矽已廣泛用於航空航天、國防和其他關鍵工業領域。
本研究採用PCD立銑刀和金剛石電鍍磨棒在不同輔助系統下對氮化矽進行銑磨實驗。這些系統包括無輔助、混合輔助和激光輔助。混合輔助是激光輔助和三軸超聲的組合。本實驗方案基於田口法 L9 正交表。探索了各種輔助系統下各種刀具的切削性能和加工表面質量，以及銑削和磨削的優缺點，以期找到最佳的輔助切削系統，以備將來試驗。並利用田口法的“越小越好”的特點，尋找氮化矽複合材料磨削和銑削工藝參數的最佳組合，目標函數和受約束條件為加工表面粗糙度和材料邊緣附近的加工缺陷，意義不大刀具磨損，分別。結果表明，與無輔助相比，混合輔助可產生出色的表面粗糙度、更長的刀具壽命、更少的加工缺陷和更低的切削力。 PCD 立銑刀比金剛石磨棒產生更好的加工表面，但它們的刀具壽命不如金剛石磨棒。三軸超聲輔助結合激光對切削性能的影響是最好的，因為超聲波有助於同時振動刀具和工件，有助於有效去除切屑，而激光預熱輔助系統可能會降低複合材料的層間結合強度，從而降低切削力。各種情況下不同組合切削性能的交叉比較表明，混合輔助系統是本研究中氮化矽複合材料磨削和銑削的最佳輔助策略。在這項研究中獲得的最佳加工參數是高主軸轉速、低進給率和低切削深度。

Silicon nitride (Si3N4) is a promising advanced engineering ceramic due to its superior properties such as high strength at elevated temperatures, low thermal conductivity, corrosion resistance, excellent wear resistance, high fracture toughness, high strength to weight ratio, good flexural strength, and low-density. Silicon nitride has been widely used in aerospace, national defense, and other critical industrial domains due to these qualities.
In this study, PCD end mills and diamond electroplated grinding rods are used to conduct milling and grinding experiments for silicon nitride under different assisted systems. These systems consist of unassisted, hybrid assisted and laser assisted. Hybrid assisted is combination of laser assisted and three axis ultrasound. This experiment plan is based upon Taguchi method L9 orthogonal table. The cutting performance and machined surface quality of various cutting-tools under various assisted systems are explored, as well as the advantages and disadvantages of milling and grinding, in order to find the best assisted cutting systems for future trials. And the Taguchi method's smaller-is-better characteristics are used to find the best combination of process parameters for silicon nitride composites grinding and milling, with the objective function and subjecting constraint being machined surface roughness and machined defects near the material's edge, and less significant cutting-tool wear, respectively. The results reveal that hybrid assisted produces superior surface roughness, longer tool life, fewer machining defects, and lower cutting force than unassisted. PCD end mills produce superior machined surfaces than diamond grinding rods, but their tool life is inferior to that of diamond grinding rods. The effect of triaxial ultrasonic assisted combined with laser on cutting performance is the best because ultrasonic waves help to vibrate the cutting tool and workpiece simultaneously, which helps to effectively remove chips, and the laser preheating aided system may reduce the interlayer bonding strength of the composites, lowering the cutting force as a result. Cross-comparisons of cutting performance with different combinations of various situations show that the hybrid aided system is the best assisted strategy for silicon nitride composites grinding and milling in this study. The best processing parameters obtained in this study is high spindle speed, low feed rate and low cutting depth.

Abstract............................................................................................i
摘要................................................................................................iii
Acknowledgement.....................................................................................v
Table of Contents ..................................................................................vi
List of tables......................................................................................viii
List of figures.....................................................................................x
Chapter 1. Introduction.............................................................................1
1.1 Ceramics........................................................................................1
1.2 Advance Ceramics................................................................................1
1.3 Silicon Nitride (Si3N4).........................................................................2
1.4 Research Motivation and Purpose.................................................................3
1.5 Literature Review...............................................................................5
1.6 Paper structure.................................................................................8
Chapter 2. Theoretical Background...................................................................9
2.1 Back-and-Forth Preheating Method................................................................9
2.2 Ultrasonic assisted technology..................................................................9
2.3 Laser assisted cutting technology...............................................................11
2.4 Material removal rate...........................................................................12
2.5 Taguchi experimental method.....................................................................13
Chapter 3. Experimental methods and planning........................................................16
3.1. Workpiece material and tool characteristics....................................................17
3.1.1. Silicon nitride workpiece....................................................................17
3.1.2. Diamond grinding rod.........................................................................17
3.1.3. PCD milling cutter...........................................................................18
3.2. Experimental equipment and specifications......................................................19
3.2.1. TC-500 processing machine....................................................................19
3.2.2. Ultrasonic spindle module....................................................................21
3.2.3. Biaxial ultrasonic oscillation platform......................................................23
3.2.4. Three-axis tool microscope digital imaging system............................................24
3.2.5. Contact surface roughness measuring machine..................................................24
3.2.6. Kistler type 9257B power meter...............................................................25
3.2.7. Kistler type 5070A charge amplifier..........................................................26
3.2.8. NI-9215 Data acquisition card................................................................27
3.2.9. Kistler 6187B5 signal transmission line......................................................28
3.2.10. Laser assisted cutting system...............................................................29
3.2.11. MET-TG2000 Infrared thermometer.............................................................30
3.2.12. Rotation and dual-axis ultrasound (Three-axis ultrasonic) hybrid auxiliary system...........31
3.2.13. Rotation and dual-axis ultrasound Combined with dual-axis laser (three-axis ultrasonic + dual-axis laser) hybrid auxiliary system.................................................................32
3.3. Experimental method and execution steps........................................................33
Chapter 4. Results and discussion...................................................................37
4.1 Surface roughness comparison....................................................................37
4.2. Cutting force comparison.......................................................................51
4.3. Edge morphology comparison.....................................................................59
4.4. Tool wear comparison...........................................................................67
Chapter 5. Conclusion and suggestion................................................................74
References..........................................................................................76
Appendix............................................................................................87
Extended Abstract...................................................................................99

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