臺灣博碩士論文加值系統

氧化鋅擁有寬的直接能隙、高的熱穩定性、大的激子束縛能、低的功率函數並且成本低廉易於製備等優點，相當適合用來做為場發射元件的材料。場發射的應用一般須具備以下特徵:較低的導通電場、較高的電流密度、較高的場增強因子以及良好的場發穩定性。
本篇論文是採用石墨烯修飾氧化鋅奈米柱的結構，進而增強其場發射特性。首先會透過低溫水熱法在高壓釜中生長氧化鋅奈米柱，接著再將加工過的石墨烯溶液以滴管滴至氧化鋅奈米柱上，最後進行熱退火來完成元件的製備。後續分別以各種儀器觀察其結構的形貌、材料的分析、元素的含量分布以及光學電學的特性。
研究的結果表明，純的氧化鋅奈米柱在石墨烯材料的修飾下場發特性有了顯著的提升，其初始(Turn-on)電場由6.0625V/μm下降至4.125V/μm，而場增強因子(β)也由3682增加到了7462。後續也對兩個樣品照射紫外光，進行紫外光對其影響的探討，其初始電場由5.25V/μm下降至2.875V/μm，而場增強因子(β)也由6837增加到了10164，並且也對所有樣品進行穩定度的量測，可以從文中看到所有樣品的穩定度都相當好。藉由數據證實了氧化鋅奈米柱透過石墨烯材料修飾以及紫外光的照射可以有效的提升場發射特性。

ZnO has the advantages of wide direct energy gap, high thermal stability, large exciton binding energy, low cost and easy preparation, and is quite suitable for use as a material for field emission devices. The application of field emission generally must have the following characteristics: lower conduction electric field, higher current density, higher field enhancement factor and good field stability.
This paper uses graphene to decorate the structure of ZnO nanorods and enhance field emission characteristics. First, a low-temperature hydrothermal method is used to grow ZnO nanorods in an autoclave, and then the processed graphene solution is dropped onto the ZnO nanorods with a dropper. Finally, the thermal annealing is performed to complete the preparation of the device. Various instruments were used to observe the structure morphology, material analysis, element content distribution, and optical and electrical properties.
The results of the study show that the field characteristics of pure ZnO nanorods have been significantly improved under the decoration of graphene materials, and the Turn-on electric field has decreased from 6.0625V/μm to 4.125V/μm, while the field enhancement factor (β) has also increased from 3682 to 7462. Afterwards, two samples were also measured by UV light. The initial electric field decreased from 5.25V/μm to 2.875V/μm, and the field enhancement factor (β) was also increased from 6837 to 10164. The stability of all samples is measured, and it can be seen from the text that the stability of all samples is good. The data confirms that ZnO nanorods can effectively improve the field emission characteristics through graphene material decoration and UV light irradiation.

摘要...i
Abstract...ii
誌謝...iii
目錄...iv
表目錄...vii
圖目錄...viii
第一章 緒論...1
1.1 前言...1
1.2研究動機...2
第二章 文獻回顧...3
2.1氧化鋅奈米材料簡介...3
2.1.1氧化鋅介紹...3
2.1.2晶體結構...3
2.1.3氧化鋅奈米結構...5
2.1.4氧化鋅之光學性質...7
2.1.5氧化鋅之電學性質...7
2.2薄膜成核成長理論...7
2.3熱退火原理...9
2.4氧化鋅奈米結構之合成方式...9
2.4.1化學氣相沉積法(Chemical Vapor Deposition，CVD)...10
2.4.2熱蒸鍍法(Thermal evaporation)...10
2.4.3溶膠-凝膠法 (Sol-Gel method)...11
2.4.4水溶液法 (Aqueous solution method)...12
2.4.5水熱法 (Hydrothermal method)...12
2.5電子場發射特性...14
2.5.1場發射理論...14
2.5.2 Fowler-Nordheim 方程式...17
第三章 實驗步驟與量測設備分析...19
3.1實驗室藥品...19
3.2使用儀器介紹...20
3.2.1場發射掃描式電子顯微鏡(Field-Emission Scanning Electron Microscope，FE-SEM)...20
3.2.2射頻磁控濺鍍系統(RF Magnetron Sputtering)...21
3.2.3能量散佈分析儀(Energy Dispersive Spectrometer，EDS)...23
3.2.4穿透式電子顯微鏡(Transmission Electron Microscopy，TEM)...24
3.2.5 X射線繞射儀(X-ray diffraction，XRD)...25
3.2.6拉曼光譜分析儀(Raman scattering spectrometer)...27
3.2.7 X射線光電子能譜學 ( X-ray photoelectron spectroscopy,XPS)...28
3.2.8場發射量測系統 ( Field Emission measurement system )...29
3.3氧化鋅奈米柱實驗步驟...30
3.3.1玻璃基板清洗...31
3.3.2沉積氧化鋅晶種層...32
3.3.3氧化鋅奈米柱成長...33
3.3.4石墨烯溶液的製備與使用...35
3.3.5材料分析與場發射量測...36
第四章 結果與討論...37
4.1石墨烯材料修飾氧化鋅奈米柱之材料分析...37
4.1.1石墨烯材料修飾氧化鋅奈米柱之場發射電子顯微鏡分析...37
4.1.2石墨烯材料修飾氧化鋅奈米柱之能量散佈分析...40
4.1.3石墨烯材料修飾氧化鋅奈米柱之穿透式電子顯微鏡分析...41
4.1.4石墨烯材料修飾氧化鋅奈米柱之X光繞射分析...44
4.1.5石墨烯材料修飾氧化鋅奈米柱之拉曼光譜分析...46
4.1.6化學分析電子光譜之石墨烯材料修飾氧化鋅奈米柱分析...47
4.2場發射分析...49
4.2.1黑暗中之場發射分析...49
4.2.2照紫外光之場發射分析...51
4.2.3場發射之電流穩定度...52
第五章 結論...56
5.1結論...56
5.2未來展望...56
參考文獻...57

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