臺灣博碩士論文加值系統

本文探討使用超音波輔助各種不同形狀的矽橡膠研磨墊對模具鋼表面改善的可行性和效果分析。通過田口實驗方法分析，可知研磨墊形狀和研磨液比例對模具鋼的表面粗糙度有非常顯著的影響；當材料表面被較硬的表面研磨時，就會發生磨料磨損，並在較硬的表面上留下軟碎屑。而交錯面的研磨墊研磨工件的形式為點接觸，通過研磨墊表面的凹槽形狀，借助超音波震動研磨液，維持輸送的研磨液循環流的更新，使研磨後的雜質和反應物得以消除，有效地維持研磨顆粒的鋒利度，達到預期的連續穩定研磨目的。表面粗糙度是判斷磨損的重要參考指標之一，更光滑的表面粗糙度可減少二物體間之相對運動的磨損。通過田口實驗表明，在最佳因子組合條件下 (A3B3C2D3E2F1G1 - 網墊形狀，SiC混合比70%，SiC粒度#2000，主軸轉速4000 rpm，負載5 Kgf，漿料比（水：水溶性油）2:1，超聲波振幅0.03 μm)，SKD 61模具鋼的初始表面粗糙度可以從（Sa 1.596μm / Smax 2.951 μm）成功降低到（Sa 0.504 μm / Smax 1.289 μm），大大降低表面粗糙度；此外，從微接觸理論計算的結果，由於塑性指數降低，SKD61 的表面塑性面積得到改善，實際接觸面積因為波峰粗糙半徑的增加而增加。進行磨損分析後，與其他參數組合結果相比，最優參數組合結果的去除率明顯更好。 結果，數據清楚地表明，隨著 RR 的增加，表面變得更光滑。

This research focused on the feasibility and impact of Ultrasonic-assisted silicon rubber polishing pads with varied shapes on the surface enhancement of mold steel. After analysis using the Taguchi experimental method, it has been discovered that mold steel's surface roughness is significantly influenced by the design of the grinding pad and the quantity of grinding fluid. And the Mesh polishing pad can grind the workpiece in the form of point contact, through the groove shape of the polishing pad surface. In order to effectively maintain the grinding particles, eliminate impurities and reactants after grinding, when a harder surface removes material from a softer one, the softer surface is left with soft debris as a result of abrasive wear. It is possible to maintain the renewal of the circulating flow of the conveyed grinding liquid with the help of ultrasonic amplitude. This allows for the achievement of the desired constant and sustainable grinding goal. Another significant factor in wear is surface roughness. Two-body abrasion is reduced by smoother surface roughness. The outcomes of two body wear trials demonstrate that the SiC rubber pads are effective in reducing surface roughness. The micro-contact mechanism also shows that surface roughness increases as normal force decreases. The study demonstrated that, under the conditions of the optimum factor level, the initial surface roughness of the SKD 61 die steel can be successfully reduced from (1.596 μm Sa / 2.951 μm Smax) to (0.504 μm Sa / 1.289 μm Smax), and the degree of surface uniformity has also been significantly increased with the best parameter combination (A3B3C2D3E2F1G1 - pad shape of mesh, SiC mixing ratio of 70%, SiC particle size of #2000, spindle speed of 4000 rpm, load of 5 Kgf, slurry ratio (water: water soluble oil) of 2:1, and ultrasonic amplitude of 0.03 μm). The surface roughness is greatly reduced; in addition, from the results calculated from the micro-contact theory, the surface plastic area of SKD61 is improved due to the reduction of the plastic index, and the actual contact area is increased due to the increase of the peak roughness radius. After performing wear analysis, compared to other parameter combination outcomes, the removal rate of the optimal parameter combination result is significantly better. As a result, the data clearly show that the surface becomes smoother as the RR increases.

English Abstract......i
Chinese Abstract......iii
Acknowledgement......iv
Contents......v
List of Tables......ix
List of Figures......xi
Symbols......xv
CHAPTER 1 INTRODUCTION......1
1.1 Research background and motivation......1
1.2 Research purposes......10
1.3 Thesis organization structure......13
CHAPTER 2 LITERATURE SURVEY......14
2.1 Surface treatment technology......14
2.2 Literature review on SKD61 tool material......17
2.3 Taguchi-style experimental planning method......18
2.4 Tribology analysis......19
CHAPTER 3 EXPERIMENTAL EQUIPMENT AND MATERIALS......22
3.1 Experimental equipment......22
3.1.1 Ultrasonic-assisted grinding fixture......22
3.1.2 Ultrasonic cleaning machine......28
3.1.3 Precision electronic roof weight machine......29
3.1.4 white light interferometer......29
3.1.5 GS pointer hardness tester......30
3.1.6 Scanning Electron Microscope (SEM)......31
3.1.7 Electron microscope......32
3.1.8 Tachometer......32
3.2 Introduction of experimental materials......33
3.2.1 Experimental test piece material......33
3.2.2 Grinding pad raw materials......34
3.3 Preparation of silicon rubber grinding pad......37
3.3.1 Description of the preparation process of silicone rubber polishing
pad......37
3.3.2 Mixing the abrasive grains in rubber......41
3.3.3 Hot-press forming......41
3.3.4 Silicone rubber grinding pad......42
3.3.5 Hardness testing......45
3.4 Slurry......46
3.5 Experimental processing mechanism......47
3.5.1 Ultrasonic assisted silicone rubber pad grinding mechanism......47
3.6 Taguchi-style experimental design......49
3.6.1 Introduce......49
3.6.2 Selection of orthogonal table and calculation of degrees of freedom......49
3.6.3 Quality characteristics......50
3.6.4 Analysis of variance and F test......51
3.6.5 Experimental verification......51
3.7 Introduction and explanation of the Two-body wear formula......52
3.7.1 Two-body wear theory......52
3.7.2 Micro-contact mechanism......55
3.7.3 Wear Formula......58
CHAPTER 4 RESULTS AND DISCUSSION......60
4.1 Experimental parameter design......60
4.2 Optimal combination of factors......62
4.2.1 ANOVA analysis and F test......66
4.2.2 Verification experiment results......70
4.3 Observation of surface properties......71
4.3.1 Surface improvement effect......71
4.3.2 Surface topography......73
4.4 Two-body wear......76
CHAPTER 5 CONCLUSION......103
REFERENCES......105
EXTENDED ABSTRACT......115

[1]Lu, H., Y. Obeng, and K. A. Richardson. "Applicability of dynamic mechanical analysis for CMP polyurethane pad studies." Materials Characterization 49, no. 2 (2002): 177-186.
[2] Kim, Jeong-du, and Ill-hwan Noh. "Magnetic polishing of three dimensional die and mold surfaces." The International Journal of Advanced Manufacturing Technology 33, no. 1 (2007): 18-23.
[3]Wang, Yongguang, Yong-Wu Zhao, and Jian Gu. "A new nonlinear-micro-contact model for single particle in the chemical–mechanical polishing with soft pad." Journal of Materials Processing Technology 183, no. 2-3 (2007): 374-379.
[4]Tsai, F. C., B. H. Yan, C. Y. Kuan, and F. Y. Huang. "A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel." International Journal of Machine Tools and Manufacture 48, no. 7-8 (2008): 932-945.
[5] Park, Kihyun, Jaehong Park, Boumyoung Park, and Haedo Jeong. "Correlation between break-in characteristics and pad surface conditions in silicon wafer polishing." Journal of Materials Processing Technology 205, no. 1-3 (2008): 360-365.
[6]Tsai, Ming-Yi, and Li-Wei Yan. "Characteristics of chemical mechanical polishing using graphite impregnated pad." International Journal of Machine Tools and Manufacture 50, no. 12 (2010): 1031-1037.
[7] Shiou, Fang-Jung, Pham Huu Loc, and Nguyen Hai Dang. "Surface finish of bulk metallic glass using sequential abrasive jet polishing and annealing processes." The International Journal of Advanced Manufacturing Technology 66, no. 9 (2013): 1523-1533.
[8]Skubal, L. R., and D. R. Walters. "Chemical polishing of aluminum coupons in support of vacuum chambers." Vacuum 96 (2013): 1-6.
[9]Kumar, S. Santhosh, and Somashekhar S. Hiremath. "A review on abrasive flow machining (AFM)." Procedia Technology 25 (2016): 1297-1304.
[10]Ma, Lei, Tatsuya Furuki, Wei Wu, Eiichi Aoyama, and Toshiki Hirogaki. "Elucidation of polishing mechanism used in magnetic polishing brush." In 2016 International Symposium on Flexible Automation (ISFA), IEEE, (2016); 31-37.
[11]Guo, Jiang, Kui Liu, Zhenfeng Wang, and Guan Leong Tnay. "Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips." Tribology International 114 (2017): 306-314.
[12]Shan, Kun, Ping Zhou, Yunsheng Zuo, Renke Kang, and Dongming Guo. "Analysis of the polishing ability of electrogenerated chemical polishing." Precision Engineering 47 (2017): 122-130.
[13] Zhou, Yan, Guoshun Pan, Chunli Zou, and Lei Wang. "Chemical mechanical polishing (CMP) of SiC wafer using photo-catalyst incorporated pad." ECS Journal of Solid State Science and Technology 6, no. 9 (2017): P603.
[14]Deng, Tian-tian, Jian-jun Li, and Zhi-zhen Zheng. "Micro-beam plasma polishing of ground alloy steel surfaces." Procedia Manufacturing 15 (2018): 1678-1686.
[15] Yuan, Zewei, Kai Cheng, Yan He, and Meng Zhang. "Investigation on Smoothing Silicon Carbide Wafer with a Combined Method of Mechanical Lapping and Photocatalysis Assisted Chemical Mechanical Polishing." In International Manufacturing Science and Engineering Conference, vol. 51388, p. V004T03A002. American Society of Mechanical Engineers, 2018.
[16]Han, Wei, and Fengzhou Fang. "Fundamental aspects and recent developments in electropolishing." International Journal of Machine Tools and Manufacture 139 (2019): 1-23.
[17]Suratwala, Tayyab, Rusty Steele, Philip E. Miller, Lana Wong, Joel F. Destino, Eyal Feigenbaum, Nan Shen, and Michael Feit. "Influence of partial charge on the material removal rate during chemical polishing." Journal of the American Ceramic Society 102, no. 4 (2019): 1566-1578.
[18]Wysocki, Bartłomiej, Joanna Idaszek, Joseph Buhagiar, Karol Szlązak, Tomasz Brynk, Krzysztof J. Kurzydłowski, and Wojciech Święszkowski. "The influence of chemical polishing of titanium scaffolds on their mechanical strength and in-vitro cell response." Materials Science and Engineering: C 95 (2019): 428-439.
[19]Bezuidenhout, Martin, Gerrit Ter Haar, Thorsten Becker, Sabrina Rudolph, Oliver Damm, and Natasha Sacks. "The effect of HF-HNO3 chemical polishing on the surface roughness and fatigue life of laser powder bed fusion produced Ti6Al4V." Materials Today Communications 25 (2020): 101396.
[20]Xiao, Hang, Yifan Dai, Jian Duan, Ye Tian, and Jia Li. "Material removal and surface evolution of single crystal silicon during ion beam polishing." Applied Surface Science 544 (2021): 148954.
[21] Yan, B. H., F. C. Tsai, L. W. Sun, and R. T. Hsu. "Abrasive jet polishing on SKD61 mold steel using SiC coated with Wax." Journal of Materials Processing Technology 208, no. 1-3 (2008): 318-329.
[22] Masami, Ikeyama, Choi Junho, Nakao Setsuo, and Miyajima Tatsuya. "Evaluation of elastoplastic properties of DLC coating on SKD61 steel by optical indentation microscopy." Surface and Coatings Technology 203, no. 17-18 (2009): 2571-2574.
[23] Chen, Y. C., and K. Nakata. "Evaluation of microstructure and mechanical properties in friction stir processed SKD61 tool steel." Materials characterization 60, no. 12 (2009): 1471-1475.
[24]Lin, Yu-Chi, Han-Ming Chen, and Yong-Chwang Chen. "Analysis of microstructure and wear performance of SiC clad layer on SKD61 die steel after gas tungsten arc welding." Materials & Design 47 (2013): 828-835.
[25]Chang, Chang-Shuo, Ting-Hsuan Chen, Tse-Chang Li, Shih-Lung Lin, Sung-Ho Liu, and Jen-Fin Lin. "Influence of laser beam fluence on surface quality, microstructure, mechanical properties, and tribological results for laser polishing of SKD61 tool steel." Journal of Materials Processing Technology 229 (2016): 22-35.
[26]Nguyen, Trung-Thanh. "Prediction and optimization of machining energy, surface roughness, and production rate in SKD61 milling." Measurement 136 (2019): 525-544.
[27]Tsai, F. C., B. H. Yan, C. Y. Kuan, and F. Y. Huang. "A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel." International Journal of Machine Tools and Manufacture 48, no. 7-8 (2008): 932-945.
[28]Kumar, Vikas, and Hari Singh. "Optimization of rotary ultrasonic drilling of optical glass using Taguchi method and utility approach." Engineering Science and Technology, an International Journal 22, no. 3 (2019): 956-965.
[29]Karthik, A., R. Karunanithi, S. A. Srinivasan, and M. Prashanth. "The optimization of squeeze casting process parameter for AA2219 alloy by using the Taguchi method." Materials Today: Proceedings 27 (2020): 2556-2561.
[30]Vellingiri, S., R. Soundararajan, N. Mohankumar, K. Nithyananthakumar, and K. Muthuselvam. "Exploration on WEDM process parameters effect on LM13 alloy and LM13/SiC composites using Taguchi method." Materials Today: Proceedings 45 (2021): 997-1003.
[31] Singh, Maninder, and Shankar Singh. "Multiple response optimization of ultrasonic assisted electric discharge Machining of Nimonic 75: A Taguchi-Grey relational analysis approach." Materials Today: Proceedings 45 (2021): 4731-4736.
[32]Nguyen, Huu-Phan, and Van-Dong Pham. "Single objective optimization of die-sinking electrical discharge machining with low frequency vibration assigned on workpiece by taguchi method." Journal of King Saud University-Engineering Sciences 33, no. 1 (2021): 37-42.
[33] Charan, A. Kalyan, R. Uday Kumar, and B. Balunaik. "Heat transfer enhancement through perforated fin made by MMC by reinforcing Aluminium with SiC & Graphite and optimization of design parameters using Taguchi method." Materials Today: Proceedings (2022).
[34]Abbas, G., and U. Ghazanfar. "Two-body abrasive wear studies of laser produced stainless steel and stainless steel+ SiC composite clads." Wear 258, no. 1-4 (2005): 258-264.
[35]Suresha, B., B. N. Ramesh, K. M. Subbaya, BN Ravi Kumar, and G. Chandramohan. "Influence of graphite filler on two-body abrasive wear behaviour of carbon fabric reinforced epoxy composites." Materials & Design 31, no. 4 (2010): 1833-1841.
[36]Narayanaswamy, Balaji, Peter Hodgson, and Hossein Beladi. "Effect of particle characteristics on the two-body abrasive wear behaviour of a pearlitic steel." Wear 354 (2016): 41-52.
[37] Srisattayakul, Parinya, Charnnarong Saikaew, Anurat Wisitsoraat, and Ditsayut Phokharatkul. "Reciprocating two-body abrasive wear behavior of DC magnetron sputtered Mo-based coatings on hard-chrome plated AISI 316 stainless steel." Wear 378 (2017): 96-105.
[38] Kershah, Tarek, Stan FSP Looijmans, Patrick D. Anderson, and Lambèrt CA van Breemen. "Temperature dependent two-body abrasive wear of polycarbonate surfaces." Wear 440 (2019): 203089.
[39]Moghaddam, P. Valizadeh, M. Rinaudo, J. Hardell, E. Vuorinen, and B. Prakash. "Influence of fracture toughness on two-body abrasive wear of nanostructured carbide-free bainitic steels." Wear 460 (2020): 203484.
[40]Schmeiser, Felix, Fee Arbogast, Hendrik Ruppel, Felicitas Mayinger, Marcel Reymus, and Bogna Stawarczyk. "Methodology investigation: Impact of crown geometry, crown, abutment and antagonist material and thermal loading on the two-body wear of dental materials." Dental Materials 38, no. 2 (2022): 266-280.
[41] Umesh, G. L., B. M. Rudresh, N. J. Krishnaprasad, and D. Madhu. "Micro fillers effect on two body abrasive wear behavior of Polyamide 66, Polyamide 6 blend based composites." Materials Today: Proceedings 54 (2022): 217-222.
[42]Greenwood, Jim A., and J. Hl Tripp. "The elastic contact of rough spheres." (1967): 153-159.
[43]Greenwood, James A., and J. H. Tripp. "The contact of two nominally flat rough surfaces." Proceedings of the institution of mechanical engineers 185, no. 1 (1970): 625-633.
[44]Chang, W. R., I. Etsion, and D. BASME Bogy. "An elastic-plastic model for the contact of rough surfaces." (1987): 257-263.
[45] Zhao, Yongwu, David M. Maietta, and Liming Chang. "An asperity microcontact model incorporating the transition from elastic deformation to fully plastic flow." J. Trib. 122, no. 1 (2000): 86-93.
[46] Kogut, Lior, and Izhak Etsion. "A finite element based elastic-plastic model for the contact of rough surfaces." Tribology transactions 46, no. 3 (2003): 383-390.
[47] Brizmer, V., Y. Kligerman, and I. Etsion. "The effect of contact conditions and material properties on the elasticity terminus of a spherical contact." International journal of solids and structures 43, no. 18-19 (2006): 5736-5749.
[48] Bozkaya, Dinçer, and Sinan Müftü. "The effects of interfacial particles on the contact of an elastic sphere with a rigid flat surface." (2008): 041401.
[49]Cohen, D., Y. Kligerman, and I. Etsion. "A model for contact and static friction of nominally flat rough surfaces under full stick contact condition." (2008): 031401.
[50]Cohen, D., Y. Kligerman, and I. Etsion. "The effect of surface roughness on static friction and junction growth of an elastic-plastic spherical contact." (2009): 021404.
[51] Li, L., I. Etsion, and F. E. Talke. "Contact area and static friction of rough surfaces with high plasticity index." (2010): 031401.
[52] “Wikipedia”[online].Available: https://www.yhabrasives.com/News/Advantages-and-disadvantages-of-three-polishing-methods-for-stainless-steel.html 12.06.2019
[53] “Wikipedia”[online].Available:
https://autocarehq.com/foam-vs-microfiber-polishing-pads-which-to-use/
[54]“Wikipedia”[online].Available: https://www.daenotes.com/electronics/industrial-electronics/ultrasonic-waves
[55]“Wikipedia”[online].Available: https://instrumentationandcontrollers.blogspot.com/2011/11/ultrasonics-introduction.html
[56]“Wikipedia”[online].Available: https://www.fujibo.co.jp/en/division/polishingpad/product/1283/
[57] Maurya, Preeti, Dr Khwaja Moeed, and Mohd Shadab Khan. "Study and analysis of abrasive wear properties of 60Cu40Zn." Int. Res. J. Eng. Technol.(IRJET) 3, no. 4 (2016): 1997-2008.
[58]Pawlus, P., W. Zelasko, R. Reizer, and M. Wieczorowski. "Calculation of plasticity index of two-process surfaces." Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 231, no. 5 (2017): 572-582.
[59]Rashid, Waleed Bin, and Saurav Goel. "Advances in the surface defect machining (SDM) of hard steels." Journal of Manufacturing Processes 23 (2016): 37-46.
[60]Nguyen, Trung-Thanh, Quoc-Hoang Pham, Xuan-Phuong Dang, Tat-Khoa Doan, and Xuan-Hung Le. "Optimization parameters of milling process of mould material for decreasing machining power and surface roughness criteria." Tehnički vjesnik 26, no. 5 (2019): 1297-1304.
[61]dos Santos de Almeida, Elisangela Aparecida, Julio Cesar Giubilei Milan, César Edil da Costa, Cristiano Binder, José Daniel Biasoli de Mello, and Henara Lillian Costa. "Combined use of surface texturing, plasma nitriding and DLC coating on tool steel." Coatings 11, no. 2 (2021): 201.
[62] Hutchings, Ian. "Wear by hard particles." Tribology International 22.6 (1989): 412-413.
[63]Wei, Chin-Chung, Jeng-Haur Horng, An-Chen Lee, and Jen-Fin Lin. "Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical–mechanical polishing (CMP) process with pattern geometry of concentric groove pads." Wear 270, no. 3-4 (2011): 172-180.