氧化鋅為II-VI族化合物半導體，具有直接能隙的能帶結構(能隙3.37eV)，且激子束縛能為60meV。由於氧化鋅具有高透光率以及低電阻率的特性，所以氧化鋅被認為是非常具有未來性的光電材料。本研究以濺鍍法於ITO基板沉積氧化鋅薄膜，再透過水熱法生長鑭摻雜氧化鋅奈米柱結構。接著透過場發射掃掃描式電子顯微鏡(FE-SEM)、穿透式電子顯微鏡(TEM)分析鑭摻雜氧化鋅奈米柱的型態；X光能譜散佈分析儀(EDS)；X光繞射分析儀(XRD)、光激發螢光光譜儀(PL)分析鑭摻雜氧化鋅奈米柱結晶與光學特性。
本研究以雷射雕刻定義圖形，在透過濺鍍法於ITO基板沉積銀薄膜備製電極，然後與鑭摻雜氧化鋅奈米柱組裝成奈米發電機，利用超聲波驅動其奈米發電機。

Zinc oxide (ZnO) is II-VI compound semiconductor with a direct bandgap energy band structure (energy gap of 3.37 eV) and it also has large exction binding energy 60 meV. In addition, ZnO has the characteristic of low resistivity and high transparency, therefore, it is considered as a promising material for the application of the optoelectronics. In this study, ZnO film is deposited on ITO glass substrate by RF sputter, and Lanthanum-doped ZnO nanorod arrays structure are grown by hydrothermal method. Then, the morphology of Lanthanum-doped ZnO nanorod arrays was analyzed by field emission scanning electron Microscope (FE-SEM) and transmission electron microscope (TEM). Content analysis of Lanthanum-doping into ZnO nanorod arrays was characterized by energy-dispersive spectroscopy (EDS). Crystallization and optical property of Lanthanum-doping ZnO nanorod arrays were measured by X-ray diffraction spectrum analysis (XRD) and photoluminescence spectroscopy (PL).
In this study, the ITO etching paste was used to define the pattern and an electrode of sliver film was deposited on the ITO substrate by sputtering, then assembled with a Lanthanum-doped ZnO nanorod Arrays to form a nanogenerators,

摘要…………………………………………………………i
Abstract………………………………………………ii
誌謝…………………………………………………………iii
目錄………………………………………………………………iv
表目錄…………………………………………………………vi
圖目錄……………………………………………………………………vii
第一章 緒論…………………………………………………………1
1.1 前言………………………………………………………………1
1.2 研究動機………………………………………………………2
第二章 基礎概念……………………………………………………3
2.1 氧化鋅的基本特性…………………………………………3
2.1.1 氧化鋅不同型態的結構…………………………4
2.1.2 氧化鋅之光學特性……………………………………4
2.2 雷射雕刻…………5
2.3 水熱法……………………5
2.3.1 水熱法的優點…………………………5
2.4 成長氧化鋅奈米柱摻鑭的反應流程…………6
2.5 濺鍍原理…………………………7
2.5.1 射頻磁控濺鍍原理……………………7
2.5.2 射頻濺鍍的優點………………7
2.6 壓電效應原理…………………………7
2.6.1 壓電效應的介紹……………………9
第三章 實驗步驟………………………………15
3.1 實驗架構………………………………15
3.2 使用的機台與藥品…………………………15
3.3 基板的準備………………………………16
3.4 上電極的製作…………………………………………16
3.5 場發射掃描式電子顯微鏡…………………………16
3.6 穿透式電子顯微鏡…………………………………………17
3.7 X光能譜散佈分析儀……………………17
3.8 X光繞射分析儀………………………………18
3.10光激發螢光光譜儀………………………………18
第四章 結果與討論…………………………………………23
4.1 鑭摻雜氧化鋅奈米柱備制………………………………23
4.2鑭摻雜氧化鋅奈米柱之表面型態分析………………………………23
4.3鑭摻雜氧化鋅奈米柱之穿透式電子顯微鏡分析…………………………24
4.4鑭摻雜氧化鋅奈米柱之X光能譜散佈分析……………………………………24
4.5鑭摻雜氧化鋅奈米柱之X光繞射分析…………………………………………24
4.6鑭摻雜氧化鋅奈米柱之光激發螢光光譜分析……………………25
4.7鑭摻雜氧化鋅奈米柱之自發電元件特性分析……………………25
4.8結論……………………26
4.9未來展望…………………………26
參考文獻………………………………52
Extended Abstract……………………………………55

1] L. Vayssieres, “Growth of Arrayed Nanorods and Nanowires of ZnO from Aqueous Solutions” Adv. Mater., vol. 15, no. 5, pp. 464-466, 2003.
[2] L. Vayssieres, K. Keis, A. Hagfeldt, and S. E. Lindquist, Chem., “Three-Dimensional Array of Highly Oriented Crystalline ZnO Microtubes” Mater. vol. 13, no. 12, pp.4395-4398, 2001.
[3] L. Vayssieres, K. Keis, S. E. Lindquist, and A. Hagfeldt, “Purpose-Built Anisotropic
MetalOxide Material: 3D Highly Oriented Microrod Array of ZnO” J. Phys.Chem.B, vol. 105, no. 17, pp.3350-3352, 2001.
[4] Q. Li, V. Kumar, Y. Li, H. Zhang, T. J. Marks, and R. P. H. Chang, “Fabrication of ZnO Nanorods and Nanotubes in Aqueous Solutions” Chem. Mater. vol. 17, no. 5, pp. 1001-1006, 2005.
[5] L. E. Greene, M. Law, J. Goldberger, F. Kim, J. C. Johnson, Y. Zhang, R. J. Saykally, and P. D.Yang, “Low-Temperature Wafer-Scale Production of ZnO Nanowire Arrays” Angew. Chem.Int. vol. 42, no. 26, pp. 3031-3034, 2003.
[6] K. Govender, D. S. Boyle, P. B. Kenway and P. O’Brien, “Understanding the factors thatgovern the deposition and morphology of thin films of ZnO from aqueous solution” J. Mater. Chem., vol. 14, pp. 2575-2591, 2004.
[7]J. Lin,P. Fei,J. Song,X. Wang,C. Lao,R. Tumala,and Z. L. Wang, “Carrier density and schottky barrier on the performance of DC nanogenerator” Nano Lett. vol. 8, no. 1, pp. 328-332, 2008.
[8]Z. L. Wang,X. D. Wang,J. Song,J. Liu,and Y. F. Gao, “Piezoelectric nanogenerators for self-powered nanodevices” IEEE Perv.Comp. vol. 7, no. 49, pp.135-172, 2008.
[9] M. Law, L. E. Green, J. C. Johnson et al., “Nanowire dye-sensitized solar cells” Nat. Materr., vol. 4, pp. 455-459, 2005.
[10] Foreman, J. V. ,Li, J. ,Peng, H.; Choi, S. , Everitt, H. O. , Liu, J., “Time-resolved investigation of bright visible wavelength luminescence from sulfur-doped ZnO nanowires and micropowders. ” Nano Lett. vol. 6, no. 6, pp. 1126–1130, 2006.
[11] Djurišić, A. B. , Leung, Y. H., “Optical properties of ZnO nanostructures”
Small, vol. 2, no.8-9, pp. 944–961 , 2006.
[12] Foreman, J. V. , Everitt, H. O. ,Yang, J. , Liu, J., “Influence of temperature and photoexcitation density on the quantum efficiency of defect emission in ZnO powders. ” Appl. Phys. Lett. vol. 91, no. 1, pp. 1902, 2007.
[13] Özgür, Ü. , Alivov, Y. I.; Liu, C. , Teke, A. , Reshchikov, M. A. , Doğan, S. , Avrutin. V. ,Cho, S. J. , Morkoç, H. , “A comprehensive review of ZnO materials and devices. ” J. Appl. Phys. vol. 98, no. 4, pp. 1301, 2005.

[14] J. J. Wu, S. C. Liu, C. T. Wu, K. H. Chen and L. C. Chen, “Heterostructures of ZnO–Zn coaxial nanocables and ZnO nanotubes.”, Appl. Phys. Lett. vol, 81, pp. 1312, 2002.
[15] H.E. Unalan, P. Hiralal, N. Rupesinghe, S. Dalal, W.I. Milne, G.A.J. “Amaratunga,Rapid synthesis of aligned zinc oxide nanowires”, vol. 2011, pp. 6, 2008.
[16] C.H. Lu, Y.C. Lai, R.B. Kale, “Influence of alkaline sources on the structural and morphological properties of hydrothermally derived zinc oxide powders” Alloys Compd. vol. 477, no. 1, pp. 523-528, 2009.
[17]X. Y. Kong, Y. Ding and Z. L. Wang, J. Phys. Chem. B, “Metal−Semiconductor Zn−ZnO Core−Shell Nanobelts and Nanotubes.”, vol. 108, no. 2, pp. 570-574, 2004.
[18] P. D. Yang, H. Q. Yan, S. Mao, R. Russo, J. Johnson, R. Saykally, N. Morris, J.Pham, R. He and H. J. Choi, “Controlled growth of ZnO nanowires and their optical properties Adv. Funct. ” Mater. vol. 12, no. 5, pp. 323-331, 2002.
[19] L. Vayssieres, “Growth of Arrayed Nanorods and Nanowires of ZnO from Aqueous Solutions. ”, Adv. Mater. vol. 15, no. 5, pp. 464, 2003.
[20] T.M. Shang, J.H. Sun, Q.F. Zhou, M.Y. Guan, “ Controlled synthesis of various morphologies of nanostructured zinc oxide: flower, nanoplate, and urchin, Cryst. ” Res. Technol. vol. 42, no. 10, pp. 1002-1006, 2007.
[21] X. T. Zhang, Y. C. Liu, Z. Z. Zhi, J. Y. Zhang, Y. M. Lu, D. Z. Shen, X. G. Kong,
“ Journal of Luminescence.” , issn 0022-2313, 2002.
[22] 洪連輝，劉立碁，魏榮君，固態物理學導論，高立圖書有限公司 (1997).
[23] K.Vanheusden, W. L. Warren, C. H. Seager, D. R. Tallant, J. A. Voigt, B. E. Gnade, J. Appl. Phys, “Mechanisms behind green photoluminescence in ZnO phosphor powders.”, vol. 79, no. 10, pp. 7983, 1996.
[25] 呂嘉俊，以水熱法成長二氧化鈦奈米線之研究，國立成功大學化學工程研究所碩士論文，2006。
[26]Hongfang Li, Xiaohua Zhang, Yunqing Zhu, Ru Li,Hongyuan Chen, Peng Gao,Yongyi Zhang,Taotao Li,Yongning Liuc and Qingwen Li “Hydrothermal deposition of a zinc oxide nanorod array on a carbon nanotube film as a piezoelectric generator”, vol. 4, no. 82, pp. 43772-43777, 2014.
[27] 蘇亦龍，鑭摻雜氧化鋅奈米線合成於軟性PET機板成長之壓電元件研究，國立台南大學電機工程學系碩士班，2014。
[28]田民波，薄膜技術與薄膜材料，五南圖書出版有限公司(2007)。
[29]高琨，壓電材料原理、應用及現狀，江西省信息產業廳電子知識。
[30] A. Mishra, M. K. R. Fischer, P. Bäuerle, “Metal-Free Organic Dyes for Dye-Sensitized Solar Cells: From Structure: Property Relationships to Design Rules” Angew. Chem. Int. Ed.,vol. 48, no. 14, pp. 2474-2499, 2009.
[31] T. Horiuchi, H. Miura, S. Uchida, “Metal-Free Organic Dyes for Dye-Sensitized Solar Cells: From Structure: Property Relationships to Design Rules”, Chem. Commun., no. 24, pp.3036-3037, 2003.
[32] T. Horiuchi, H. Miura, K. Sumioka, S. Uchida, “High Efficiency of Dye-Sensitized Solar Cells Based on Metal-Free Indoline Dyes” J. Am. Chem. Soc. vol. 126, no. 39, pp. 12218, 2004.
[33] “新型含雙噻吩環戊烷之有機小分子光敏化染料的合成與性質探討”國立中
央大學化學研究所碩士論文，薛惟聰，2008。
[34] Z. L. Wang and J. Song, 2006, “Piezoelectric Nanogenerators Based on Zinc Oxide
Nanowire Arrays” Science S10, vol. 312, no. 5771, pp.242-246, 2014 April.
[35] ISBN7-81034-105-7，譚增魯編，醫學細胞生物學，北京醫科大學出版社，
2000。
[36]Kim, K. J.; Park, Y. R. Appl. Phys. Lett, “Optical investigation of Zn1−xFexO films grown on Al2O3(0001) by radio-frequency sputtering”, vol. 96, no. 8, pp.4150-4153, 2004.
[37]Guozhen Shen, Jung Hee Cho, Jin Kyoung Yoo,Gyu-Chul Yi,and Cheol Jin Lee,
“Synthesis and Optical Properties of S-Doped ZnO Nanostructures: Nanonails and
Nanowires” J. Phys. Chem. B.vol. 109, no. 12, pp. 5491-5496 , 2005.
[38]研製NiO/AZO NRs p-n接面之壓電式奈米發電機”國立虎尾科技大學光電工
程系光電與材料科技碩士班碩士論文，陳柏豪，2019。