超疏水表面通常具有大於150°的水滴接觸角(CA)和小於10°的滑動角。超疏水表面通常具有奈米或微米級的表面結構，或以低表面能材料可達成疏水效果，而另外塗佈特殊材料的成本高且常有汙染。另一簡易且環保的方式降低表面能，可採超精密切削成微結構或雷射加工(LBM)出微結構紋理，另經過時間老化的金屬表面會產生疏水性，或經低溫烘烤的處理下，亦能快速形成表面疏水性；而線切割放電加工(WEDM)類似LBM是一種快速切割表面的熱加工技術。本實驗研究以線切割放電加工對SUS304不鏽鋼切削成微結構；首先以0.05及0.25mm兩種線徑製備各尺度的週期性圖形，對照其對面粗度與疏水性影響。其次，以100-200℃低溫烘烤提升CA角，並檢測WEDM加工後的金屬表面形貌與元素分布，以驗證其微結構與沉積於表面之化合物。本研究證實WEDM製程在金屬表面形成第一尺度微結構圖形，EDM重鑄層與沉積物成為第二尺度結構，樣本在線切割二周至三周老化及本文所首創的低溫烘烤WEDM工件使其能達成更高疏水性；並於基礎研究上，針對結構尺度的相對峰高比值Hr，相對間距比Ar及材料比Mr分析。從實驗樣本之幾何比例與結構深度，發現304不銹鋼表面結構深度0.3-0.4mm柱寬0.15-0.25mm間寬0.25-0.3mm的方波結構最易達近超疏水性，其中CA角最大為142°。經XPS和FTIR檢測證實線切割放電加工面經放置大氣中老化再加熱烘烤後，能更進一步使碳氫化合物固著增生，經過碳與碳氫化合物沉積後的微結構開始提升疏水性進而提高CA角，甚至可接近150°角。
關鍵詞: 線切割放電加工,低溫烘烤,疏水性,微結構,第二尺度,碳沉積,碳氫化合物

Super-hydrophobic surface typically refers to a water droplet contact angle (CA) greater than 150° and a sliding angle (SA) less than 10°. They have been extensively studied for their unique features such as water repellency, self-cleaning, anti-corrosion, anti-icing, anti-biofouling, and oil-water separation. Hydrophobic surfaces are usually made of low surface energy materials or possess micro- or nanometer-scale surface structures, which can easily trap air and minimize the CA of the droplet. Other simple and environmentally friendly ways include cutting or laser processing to induce microstructures or dual-scale structures on the surface. Moreover, the metal surface becomes hydrophobic after time aging or is treated with low-temperature baking, which succeeds in forming structures. These inspire a study on the associated processes of WEDM with baking because WEDM is similar to laser beam processing (LBM) as a thermal processing technology for rapid surface cutting.
First of all, WEDM is adopted to fabricate microstructures. The experiment is designed from the wire diameter and periodic structure; and the relationship between geometric scale ratio and surface roughness of the microstructures with hydrophobicity. Secondly, low-temperature baking at 100°C-200°C helps to increase the CA angle, and the surface micro-morphology and chemical elements on the metal surfaces are detected to verify hydrocarbon deposition. In this study, WEDM is used to initiate forming of a first-scale microstructure and a partial second-scale structure by the recast layer from EDM. As a result, the samples achieved hydrophobicity after two weeks of aging and one more week after baking. The maximum CA angle is 142°. It reveals that the square wave structure with a depth of 0.4mm and a column width of 0.15-0.25 mm, and a gap width of 0.25-0.3 mm is an excellent window to achieve hydrophobicity. The relative geometric ratio of height and the column width over gap width are investigated. XPS and FTIR testing confirmed that the hydrocarbons are further increased and solidified after baking, and the maximum CA may arise even close to 150°.
Keywords: WEDM, low-temperature baking, hydrophobicity, microstructure, second-scale, carbon deposition, hydrocarbons

目錄
摘要 2
ABSTRACT 3
致謝 5
學位論文考試審定書 6
學位論文著作權歸屬協議書 7
目錄 8
圖目錄 11
表目錄 11
附錄 14
第1章 緒論 20
1.1 前言 20
1.2 文獻回顧 21
1.3 研究動機與目的 34
1.4 論文架構 35
第2章 微結構加工原理與量測 36
2.1 放電加工 36
2.1.1 放電加工原理 36
2.1.2 線切割放電加工原理 37
2.1.3 線切割加工參數 39
2.2 多尺度結構 43
2.2.1 多尺度結構定義 43
2.2.2 幾何層次結構的雙重尺度與水接觸角之間的關聯性 44
2.3 表面接觸角介紹 46
2.3.1 表面張力與接觸角 46
2.3.2 表面接觸角量測 46
2.3.3 遲滯角 48
2.3.4 滾動角 48
第3章 實驗設備與製程規劃 49
3.1 實驗設備 49
3.1.1 線切割加工機(WEDM) 49
3.1.2 微細線切割加工機(Micro-WEDM) 50
3.1.3 共軛焦雷射顯微鏡(LSCM) 52
3.1.4 掃描式電子顯微鏡(SEM) 53
3.1.5 接觸角量測儀(SEO) 55
3.1.6 傅立葉轉換紅外線光譜儀 56
3.1.7 歐傑電子能譜儀 57
3.1.8 熱風箱環烘箱 57
3.1.9 超聲清洗機 58
3.2 實驗材料 60
3.2.1 不鏽鋼材 60
3.3 實驗設計 60
3.3.1 微結構設計與線切割製備工件樣本 60
3.3.2 低溫烘烤前後量測接觸角實驗 67
3.3.3 掃描式電子顯微鏡(SEM)量測 67
3.3.4 X射線光電子能譜儀(XPS)量測 67
3.3.5 傅立葉轉換紅外線光譜儀(FTIR)量測 67
3.3.6 清洗表面量測接觸角實驗 67
3.3.7 共軛焦顯微鏡尺度形狀量測 68
3.4 實驗流程 68
第4章 微結構形狀/粗度與低溫烘烤前後之水接觸角 70
4.1 樣品尺度形狀量測 71
4.1.1 共軛焦量測尺度形狀 71
4.1.2 各形結構之面粗度比較 71
4.2 低溫烘烤前後量測水接觸角實驗 73
4.2.1 各形結構量測水接觸角實驗 73
4.3 小結 86
4.3.1 微結構結構的幾何比值水接觸角之影響 86
4.3.2 不同線徑及放電電流對加工尺度之影響 89
第5章 微結構表面形貌與化學元素分析 90
5.1 共軛焦鏡量測 90
5.1.1 表面放電坑形貌 90
5.2 掃描式電子顯微鏡(SEM)量測 92
5.2.1 0.25mm線徑SEM表面形貌 92
5.2.2 0.05mm線徑SEM表面形貌 94
5.3 X射線光電子能譜儀(XPS)量測 96
5.4 傅立葉轉換紅外線光譜儀(FTIR)量測 101
5.5 表面清洗實驗 102
第6章 結論與未來展望 107
6.1 結論 107
6.2 未來展望 108
參考文獻 109
附錄 Appendix 112
A.1 共軛焦拍攝圖形結構及尺度量測 112
A.2 共軛焦量測圖形結構面粗度 133
A.3 共軛焦量測表面放電坑尺度及面粗度 154
A.4水接觸角量測照 158
作者簡歷 165

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