臺灣博碩士論文加值系統

本次研究通過溶膠凝膠法及靜電紡絲技術製備鑭鉛鐵氧(La0.8Pb0.2FeO3；LPFO)/氧化鎢(WO3)的異質結構並用於氣體檢測，LPFO/WO3奈米結構將製備於指叉式電極基板上，實驗將通過電極進行氣體感測測試。WO3奈米纖維的氣體感測結果顯示出對二氧化氮(NO2)及硫化氫(H2S)皆有相當高的響應，其最高響應值分別為107.8%及99.5%。而在WO3與LPFO結合形成LPFO/WO3的異質結構後抑制了對於NO2的響應性能，其最高響應值下降至3.56%。LPFO/WO3也顯示出了對H2S優異的氣體選擇性，LPFO/WO3在最佳工作溫度175˚C下對1.25ppm的H2S顯示出了89.5%的優異響應。在進行氣感性能測試後，發現隨溫度提升其所需的響應時間會隨之縮短，但其最高響應值會隨之下降，而對H2S濃度的最小偵測極限可達12.5 ppb。

In this study, a sol-gel method and an electrospinning method were used to prepare La0.8Pb0.2FeO3 (LPFO)/WO3 heterostructures for gas sensing application. The LPFO/WO3 nanostructures were grown on interdigitated gold electrode substrates and then used in gas sensors. The sensing shows that pure WO3 nanofibers exhibited high response of NO2 and H2S. The pure WO3 exhibits the of semiconductor characteristics and sensing response of NO2 and H2S are 107.8% and 99.5%, respectively. The NO2 response performance of LPFO/WO3 nanostructures was suppressed, and dropped to 3.56%. The LPFO/WO3 showed excellent gas selectivity to H2S. The best H2S gas response of LPFO/WO3 nanostructures was 89.5% at 1.25 ppm H2S at 175 C, with good recovery and reproducibility. The response time required would be shortened as the temperature increased, but the highest response value would decrease. The minimum detection limit of H2S concentration was reported to be 12.5 ppb.

目錄
摘要 i
ABSTRACT ii
誌謝 iii
表目錄 vi
圖目錄 vi
第1章 緒論 1
1.1 前言 1
1.2 研究動機與目的 3
第2章 基礎原理與文獻回顧 4
2.1 氣體感測器 4
2.1.1 簡介 4
2.1.2 半導體氣體感測器及其工作原理 7
2.1.3 異質結合氣體感測器 10
2.1.4 氣體感測器響應值 12
2.2 半導體金屬氧化物 13
2.2.1 簡介 13
2.2.2 氧化鎢 13
2.3 鈣鈦礦材料(Perovskite) 15
2.3.1 簡介 15
2.3.2 鑭鉛鐵氧 15
2.4 靜電紡絲 18
第3章 實驗方法與設備 20
3.1 實驗架構 20
3.2 實驗藥品 22
3.3 實驗方法及流程 23
3.3.1 氧化鎢電紡纖維 23
3.3.2 鑭鉛鐵氧製備及與氧化鎢結合形成異質結構 25
3.4 實驗製程設備 26
3.4.1 超音波洗淨機 26
3.4.2 磁石攪拌器 26
3.4.3 靜電紡絲機 27
3.4.4 精密烘箱 28
3.4.5 高溫爐 28
3.5 實驗分析儀器 29
3.5.1 分析型場發掃描式電子顯微鏡 29
3.5.2 高解析穿透式電子顯微鏡 29
3.5.3 高溫二維X-ray廣角繞射儀 30
3.5.4 氣體感測響應量測系統 31
第4章 結果與討論 32
4.1 靜電紡絲法製備之WO3奈米纖維 32
4.1.1 WO3奈米纖維之掃描式電子顯微鏡分析 32
4.1.2 WO3奈米纖維之X光繞射分析 34
4.1.3 WO3奈米纖維之穿透式電子顯微鏡分析 35
4.1.4 WO3奈米纖維用於氣體感測器之選擇性測試 37
4.1.5 WO3奈米纖維用於不同工作溫度響應性能測試 40
4.2 溶膠凝膠法製備之LPFO鈣鈦礦型氧化物 43
4.2.1 LPFO之掃描式電子顯微鏡分析 43
4.2.2 LPFO之X光繞射分析 44
4.3 氧化鎢及鑭鉛鐵氧(WO3/LPFO)異質結合薄膜 45
4.3.1 WO3/LPFO異質結合薄膜之掃描式電子顯微鏡分析 45
4.3.2 WO3/LPFO異質結合薄膜之X光繞射分析 48
4.3.3 WO3/LPFO異質結合薄膜用於氣體感測器之選擇性測試 49
4.3.4 WO3/LPFO異質結合薄膜於不同工作溫度響應性能測試 51
4.3.5 WO3/LPFO異質結合薄膜在不同硫化氫濃度下響應性能測試 54
4.4 氧化鎢及鑭鉛鐵氧異質結合薄膜可能的感測機制 57
4.5 氧化鎢及鑭鉛鐵氧異質結合薄膜氣體感測結果比較 59
第5章 結論 62
5.1 結論 62
5.2 未來展望 63
參考文獻 64

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