臺灣博碩士論文加值系統

隨著奈米科技的進步，電子元件的尺寸以及功耗都逐漸變小，傳統電池因為有著電量有限且老化的問題，而透過自供電系統自己產生電量，就不再需要倚靠外部電源，讓元件保持在可連續工作的狀態。壓電材料因其可將生活中的機械能轉化為電能，達到自供電系統所需的條件，因此常被製備成自供電奈米發電機。氧化鋅為II-VI族寬能隙(能隙=3.37eV)半導體材料，合成容易且低成本，因具有壓電特性，常被當作壓電材料使用。通過摻雜可以加強壓電材料的電性進而提高發電機的效率，這篇研究證明氧化鋅奈米柱陣列摻雜鎵可以提高壓電式奈米發電機的性能。本研究先在ITO玻璃上以八癸基三甲氧矽烷生長一層自組裝分子薄膜後，透過水熱法生長低密度鎵摻雜氧化鋅奈米柱結構，並在奈米結構上濺鍍一層Pt薄膜後組裝成奈米發電機，利用超聲波驅動奈米發電機來進行電性量測，探討金屬摻雜對奈米柱的影響。摻雜鎵的ZnO奈米發電機的最佳I-V特性為3.39×10-7A和1.13×10-3A。

With the advancement of nanotechnology, the size and power consumption of electronic components has been reduced. Conventional batteries have limited power and aging problems. The self-powered system gets rid of the dependency on an external power supply and allows continuous working. For such systems, piezoelectric materials are used as self-powered nanogenerators as they convert mechanical energy into electrical energy. Zinc oxide is a group II-VI semiconductor material with a wide energy gap (Eg=3.37eV), easy synthesis, and low cost. Owing to its piezoelectric properties, zinc oxide is often used for a self-powered system. In general, doping enhances electrical properties and improves the efficiency of piezoelectric materials. This study was carried out to prove that Ga-doped with ZnO nanorod arrays improved the performance of a piezoelectric nanogenerator. First, a self-assembly monolayer (SAM) was grown by Octadecyltrichlorosilane on the indium tin oxide (ITO). Then, the low-density Ga-doped ZnO nanorod structure was grown by hydrothermal growth. After sputtering Pt film on ZnO nanorod arrays, the ZnO nanorod arrays with Pt film were assembled into a nanogenerator, which was conducted by ultrasonic waves for measurement. Finally, the effect of metal doping on the nanorods was investigated. The best I-V characteristics of gallium-doped ZnO nanogenerators were found at 3.39×10-7A和1.13×10-3A.

摘要……………………………………………………………………………i
Abstract…………………………………………………………………ii
誌謝……………………………………………………………………………iii
目錄……………………………………………………………………………iv
表目錄……………………………………………………………………………vi
圖目錄……………………………………………………………………………vii
第一章 緒論…………………………………………………………………1
1.1 前言………………………………………………………………………1
1.2 研究動機與目的………………………………………………3
第二章 文獻探討與理論………………………………………4
2.1 氧化鋅的基本特性…………………………………………4
2.1.1 氧化鋅不同型態的結構…………………………5
2.2 自組裝分子薄膜………………………………………………6
2.3 水熱法…………………………………………………………………8
2.3.1 水熱法優點……………………………………………………9
2.4 成長氧化鋅奈米柱的化學反應流程……………………10
2.5 成長鎵摻雜氧化鋅奈米柱的化學反應流程…………11
2.6 薄膜沉積原理……………………………………………………………………11
2.6.1 離子濺射儀濺鍍原理………………………………………12
2.7 奈米發電機的介紹…………………………………………………………………14
2.7.1 壓電式奈米發電機……………………………………………………………14
2.7.2 摩擦式奈米發電機…………………………………………………………15
2.8 金屬與半導體接觸理論……………………………………………………15
2.9 壓電效應……………………………………………………………………………20
2.9.1 壓電效應的起源………………………………………………………………20
2.9.2 壓電效應的種類…………………………………………………………………20
2.9.3 壓電材料的介紹與應用……………………………………………………20
2.9.4 氧化鋅奈米線壓電原理………………………………………………………22
第三章 實驗步驟與儀器……………………………………………………………………………24
3.1 實驗藥品與實驗設備……………………………………………………………………………24
3.1.1 實驗藥品……………………………………………………………………………24
3.1.2 實驗設備……………………………………………………………………………25
3.2 實驗架構……………………………………………………………………………26
3.3 製作奈米發電機……………………………………………………………………………27
3.3.1 ITO玻璃基板切割與清洗………………………………………………………………………27
3.3.2 熱蒸鍍自組裝分子薄膜……………………………………………………………………………27
3.3.3 調配水溶液……………………………………………………………………………28
3.3.4 低溫水熱法生長氧化鋅奈米柱……………………………………………………………………28
3.3.5 對電極製作……………………………………………………………………………30
3.3.6 組裝奈米發電機……………………………………………………………………………30
3.4 材料特性分析儀器……………………………………………………………………………32
3.4.1 掃描式電子顯微鏡(Scanning Electron Microscope, SEM)…………………………32
3.4.2 能量散射光譜儀(Energy Dispersive Spectrometry, EDS)……………………………33
3.4.3 X光繞射分析儀(X-Ray Diffraction, XRD)……………………………………………………………………33
第四章 結果與討論……………………………………………………………………………35
4.1 鎵摻雜氧化鋅奈米柱表面型態分析(SEM)……………………………………………………………………………35
4.2 鎵摻雜氧化鋅奈米柱X光能譜散佈分析(EDS)……………………………………………………………………………42
4.3 鎵摻雜氧化鋅奈米柱X光繞射分析(XRD)……………………………………………………………………………47
4.4 鎵摻雜氧化鋅奈米柱製備壓電式奈米發電機之電性分析………………………………………………………48
第五章 結論與未來展望……………………………………………………………………………56
5.1 結論……………………………………………………………………………56
5.2 未來展望……………………………………………………………………………56
參考文獻……………………………………………………………………………57
Extended Abstract……………………………………………………………………………62

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