臺灣博碩士論文加值系統

在精密加工領域中，工件的尺寸及其精度表現，往往取決於機台在加工作業時的定位精確度和準確度，若要使產品達到微奈米甚至奈米級的高精度品質，其機台的設計與之控制方法將會是提升精度品質的關鍵所在。本研究在於設計與開發一套三自由度X-Y-Z長行程可控範圍(2 mm × 2 mm × 2 mm)且具備奈米等級定位精度(±20 nm)之精密平台系統，其架構主要由鋁合金平台與線性導軌建構而成。控制方法則藉由Matlab- Simulink軟體編譯控制器，控制音圈馬達使平台產生預期之制動位移，並利用雷射干涉儀量作為量測系統觀測各軸向之位移變化，以測試平台控制性能與特性表現。

通常此類精密平台容易受到摩擦力等負面干擾影響其控制精度，因此本論文應用所設計的PI控制器與積分型順滑模控制器來進行循跡與定位控制實驗，透過多種短行程及長行程且不同頻率下之控制波形來測試其控制性能，藉此分析平台系統在遭遇非線性干擾情況下，控制器是否能夠有效地估測並補償摩擦力等不確定量。經由實驗證明順滑模態控制器在估測摩擦力等非線性量有優異的效果，相較於PI控制器擁有較低的循跡控制誤差，且能夠更加快速地達到系統穩態。

In the precision machining field, the size of workpiece and its accuracy performance often depend on the positioning accuracy and accuracy of the machine during processing operations, in order to make the product reach micro-nano or even nanoscale precision quality, therefore the design of processing machine and its control method will be the key to improving precision and quality.

This research is to design and develop a three-degree-of-freedom based long range nanopositioning precision platform with stroke of 2mm.This equipment is composed of an aluminum alloy platform and linear slide, then we utilize voice coil motor as driver and laser interferometer as measure device to evaluate the performance of this stage.

Usually, such precision platforms are susceptible to interference of friction that affects control accuracy. Therefore, we use PI controller and integral sliding mode controller to carry out tracking and positioning control experiment, and to test the stage’s control performance by a variety of stroke and frequency waveforms. Experimental results show that the integral sliding mode controller has excellent performance in estimating nonlinear effects such as friction, and compare sliding mode controller with PI conptroller, it has lower tracking control error and can reach the system steady state more quickly.

摘要...i
Abstract...ii
誌謝...iii
目錄...iv
表目錄...vii
圖目錄...viii
符號表...xvi
第一章 緒論...1
1.1 前言...1
1.2 研究動機與目的...1
1.3 文獻回顧...2
1.4 論文架構...4
第二章 系統架構介紹...5
2.1 平台系統介紹...6
2.1.1 X-Y交叉滾子導軌平台...6
2.1.2 Z軸升降平台...7
2.1.3 平台材質選用與模擬...8
2.2 量測系統介紹...12
2.3 回授控制系統介紹...14
2.3.1 音圈馬達及驅動器...14
2.3.2 dSPACE控制介面板...15
2.4 使用軟體介紹...16
第三章 系統架構組裝及光路校正...18
3.1 平台系統安裝與校正...18
3.2 量測系統安裝與光路調校...21
3.2.1 光學反射鏡組架設...21
3.2.2 雷射干涉儀架設與光路調校...22
3.3 干涉程度測試...23
第四章 系統數學模型與控制器設計...26
4.1 系統數學模型建立...26
4.1.1 繼電器回授法...26
4.1.2 繼電器回授測試結果...29
4.1.3 步階響應測試法...31
4.1.4 步階響應測試結果...32
4.2 控制器理論與設計...33
4.2.1 PID控制器理論與設計...33
4.2.2 順滑模態控制理論...34
4.2.3 積分型順滑模態控制器設計...38
第五章 實驗控制結果與分析...42
5.1 PI控制器測試結果...42
5.1.1 PI控制器測試(單軸控制)-X軸...42
5.1.2 PI控制器測試(單軸控制)-Y軸...46
5.1.3 PI控制器測試(單軸控制)-Z軸...50
5.1.4 PI控制器測試(三軸控制)-XYZ軸...57
5.2 積分型順滑模態控制器測試結果...61
5.2.1 積分型順滑模態控制器測試(單軸控制)-X軸...61
5.2.2 積分型順滑模態控制器測試(單軸控制)-Y軸...65
5.2.3 積分型順滑模態控制器測試(單軸控制)-Z軸...69
5.2.4 積分型順滑模態控制器測試(三軸控制)-XYZ軸...75
第六章 結論與未來展望...79
6.1 結論...79
6.2 未來展望...79

[1]Y. Egashira, K. Kosaka, S. Takada, T. Iwabuchi, T. Baba, S. Moriyama, T. Harada, K. Nagamoto, A. Nakada, H. Kubota and T. Ohmi, “0.69 nm Resolution Ultrasonic Motor for Large Stroke Precision Stage,” IEEE-NANO, T.12 Nano-Structure I, pp. 397-402, 2001.
[2]J. S. Chen and I. C. Dwang, “A Ballscrew Drive Mechanism with Piezo-electric Nut for Reload and Motion Control,” International Journal of Machine Tools & Manufacture 40, pp. 513–526, 2000.
[3]M. Holmes, R. Hocken and D. Trumper, “The Long-range Scanning Stage: A Novel Platform for Scanned-probe Microscopy,” Precision Engineering, Vol. 24, pp. 191-209, 2000.
[4]S. Verma, W. J. Kim, and J. Gu, “Six-axis Nanopositioning Device with Precision Magnetic Levitation Technology,” IEEE/ASME Transactions On Mechatronics, Vol. 9, NO. 2, pp. 384-391, 2004.
[5]W. J. Kim, “Six-axis Nano-positioning with Planar Magnetic Levitation,” IEEE-NANO, pp. 174-179, 2001.
[6]J. R. Matey, R. S. Crandall and B. Brycki, “Bimorh-driven X-Y-Z Translation Stage for Scanned Image Microscopy,” Rev. Sci. Instrum., Vol. 58, No. 4, April, 1987.
[7]P. Gao and S. M. Swei, “A Six-degree-of-freedom Micro-manipulator Based on Piezo-electric Translators”, Nanotechnology 10, pp.447 452, 1999.
[8]張所鋐、朱怡名，“奈米級XYZ三自由度微定位平台”，民國89年。
[9]張所鋐、蔡奇陵，“六自由度超精密奈米定位平台研製”，民國90年。
[10]黃宜正、劉保國，“應用電腦輔助分析於設計壓電致動撓性鉸鏈平台之精準位移”，民國90年。
[11]S. Awtar and G. Parmar, “Design of a Large Range XY Nanopositioning System,” ASME Journal of Mechanisms and Robotics, Vol. 5, pp. 021008-1~021008-13, 2013.
[12]廖正文、沈金鐘，“3D列印奈米級精密平台之研製”，中國機械工程學會第三十五屆全國學術研討會論文集，pp. 2418-2423，2018。
[13]P. Gao and S. M. Swei, “A Six-degree-of-freedom Micro-manipulator Based on Piezoelectric Translators,” Nanotechnology 10, pp. 447-452, 1999.
[14]J. C. Shen, W, Y. Jywe, Q, Z. Lu, C. H. Wu and P. Y. Chen, “Control of A High Precision Positioning Stage,” IEEE Conference on Industrial Electronics and Applications (ICIEA), July, 18-20, 2012.
[15]沈金鐘、覺文郁、吳家鴻、盧群中，“六自由度奈米測量機之量測系統組裝及校正”，第四屆現代切削與測量工程國際研討會（ISMCME2010），北京，12月10～12日，2010年。
[16]Y. Kim and B. Sohn., “Voice Coil Motor Nano Stage with An Eddy Current Damper,” 10th Intl. Conf. on Control, Automation, Robotics and Vision, Hanoi. pp. 1714-1717, 2008.
[17]張昫揚，“長行程奈米定位系統研究”，國立中興大學機械工程研究所，碩士論文，2002年。
[18]周昌翰，“以電磁驅動之二維高精度定位平台設計與控制”，國立臺灣師範大學機電科技系，碩士論文，2008年。
[19]K. J. Astrom and C. Canudas de Wit, “Revisiting The LuGre Friction Model,” IEEE Control System Magazine, December, pp. 101-114, 2008.
[20]J. Swevers, F. Al-Bender, C. G. Ganseman and T. Projogo, “An Integrated Friction Model Structure with Improved Presliding Behavior for Accurate Friction Compensation,” IEEE Trans. Automat. Contr., Vol. 45, pp. 675-686, April, 2000.
[21]K. Worden, C. X. Wong, U. Parlitz, A. Hornstein, D. Engster, T.Tjahjowidodo, F. Al-Bender and D. D. Rizos, “Identification of Pre-sliding and Sliding Friction Dynamics: Grey Box and Black-box Models,” Mechan. Syst. Signal Process, Vol. 21, No. 1, pp. 514-534, 2007.
[22]D. D. Rizos and S. D. Fassois, “Friction Indentification Based upon The Lugre and Maxwell Slip Models,” IEEE Trans. On Control Systems Technology, Vol. 17, No. 1, pp. 153-160, 2009.
[23]K. J. Lee, H. M. Kim and J. S. Kim, “Design of A Chattering-free Sliding Mode Controller with A Friction Compensator for Motion Control of A Ball-screw System,” Proceedings of the Institution od Mechanical Engineers, Part 1: Journal of Systems and Control Engineering, Vol. 218, No. 5, pp. 369-380, 2004.
[24]C. L. Chen, M. J. Jang and C. K. Lin, “Modeling and High-precision Control of A Ball-screw-driven Stage,” Precision Engineering, Vol. 28, pp. 483-495, 2003.
[25]C. J. Lin, H. T. Yau and Y. C. Tian, “Identification and Compensation of Nonlinear Friction Characteristics and Precision Control for A Linear Motor Stage,” IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 4, August, 2013.
[26]J. J. Chol, S. I. Han and J. S. Kim, “Development of A Novel Dynamic Friction Model and Precise Tracking Control Using Adaptive Back-stepping Sliding Mode Controller,” Mechatronics, Vol. 16, pp. 97-104, 2006.
[27]S. N. Huang, K. K. Tan and T. H. Lee, “Adaptive Friction Compensation Using Neural Network Approximations,” IEEE Transactions on System, Man, and Cybernetics-Part C: Applications and Reviews, Vol. 30, No. 4, pp. 551-557, 2000.
[28]S. Hwang and K. K. Tan, “Intelligent Friction Modeling and Compensation Using Neural Network Approximations,” IEEE Transactions on Industrial Electronics, Vol. 59, No. 8, pp. 3342-3349, 2012.
[29]楊櫂嘉，“含摩擦力補償之奈米級循跡控制法”，國立虎尾科技大學自動化工程系，碩士論文，2012年。
[30]葉佳碩，“基於DNLRX摩擦力模型的精密適應模糊類神經順滑膜循跡控制”，國立虎尾科技大學自動化工程系，碩士論文，2018年。
[31]THK-LM導軌綜合產品型錄.
[32]HIWIN-微小型線性滑軌技術手冊.
[33]Aluminum-6061 properties-ASM Material Data Sheet-Matweb.
[34]RENISHAW-RLE10 Data sheets.
[35]范光照、張郭益，“精密量測”，高立圖書，台北縣，2015年。
[36]J. C. Shen, “PID controllers: Theory, Turning and Implementation”, 2001.
[37]K. J. Astrom and T. Hagglund, “Automatic Tuning of Simple Regulators with Specifications on Phase and Amplitude Margins,” Automatica, Vol. 20, No. 5, pp. 645-651, 1984.
[38]K. J. Astrom and T. Hagglund, “PID Controllers: Theory, Design and Turning,” Research Triangle Park, NC: Instrum. Soc. Amer. 1995.
[39]Norman S. Nise, “Control Systems Engineering,” 5th ed, 2008.
[40]陳永平、張浚林，“可變結構控制設計(修訂版)”，全華圖書，2002年。
[41]J. J. E. Slotine and S. S. Sastry, “Tracking Control of Nonlinear Systems Using Sliding Surfaces with Application to Robot Manipulators,” Int. J. Control, Vol. 38, pp. 465-492, 1983.
[42]J. J. E. Slotine and W. Li, “Application Nonlinear Control,” 1991.
[43]R. C. Dorf and R. H. Bishop “Modern Control Systems,” 10th Edition, NJ: Pearson Education, 2005.