臺灣博碩士論文加值系統

在本論文中,進行了三種奈米碳管(CNT)Ni/CC、Ni/Ti/CC、Ni/Al/CC 在
場發射特性的實驗,在軟性碳布開放式羧化多壁奈米碳管的場發射性能實驗
中,粒子的 3D 數值模擬和實驗顯示開放式羧化多壁奈米碳管在實際場發射應
用中有更好的功能性和應用潛力。而在不同夾層軟性碳布基研究中電子顯微鏡
的照片分析結果表明,在含 Al 中間層上形成的催化劑顆粒具有最高密度和最
小尺寸,因此促進了多壁奈米碳管(MWCNT)生長所需的成核,並且獲得了
比其他中間層更好的結果。另外在場發射器研究中也利用一種新步驟,在沒有
催化劑的情況下通過氫電漿蝕刻製造開放式的矽奈米線,這個過程使奈米線的
幾何形狀變得更加銳利並提升了它們的功能性。希望這些在長度,直徑和分佈
奈米線方面均勻高度,在許多場發射奈米電子器件中具有很大的應用潛力。

In this paper, we conducted experiments on the field emission characteristics of three kinds of CNTs. In the field emission performance experiment of open
carboxylated multi-walled carbon nanotubes on soft carbon cloth, 3D numerical
simulation of particle online parallel computing technology and our experiment
shows its functionality and potential in real field emission applications. The results of FE SEM in different interlayer soft carbon cloths show that the catalyst particles formed on the Al-containing intermediate layer have the highest density and the smallest size, thus promoting the nucleation required for MWCNT growth and obtaining better intermediate layers. In addition, the field emitter study takes advantage of a new step in the fabrication of a tantalum-free nanowire by hydrogen plasma etching without a catalyst, which makes the geometry of the nanowire sharper and reduce their functionality. We hope that these uniform heights in terms of length, diameter and distribution of nanowires have great potential for application in many field-emitting nano-electronic devices.

摘要
第 1 章 介紹...........................................................1
1.1 應用.............................................................1
1.2 製作方法..........................................................4
第 2 章 實驗與模擬模組..................................................6
2.1 場發射............................................................6
2.2 場發射理論........................................................7
2.3 場發射方法.......................................................10
第 3 章 結果與討論....................................................13
3.1 軟性碳布基上開放羧化多壁奈米碳管的場發射性能改善.....................13
3.2 不同夾層軟性碳布基上多壁奈米碳管的場發射特性.........................15
3.3 奈米/微電子場發射器的研究..........................................18
第 4 章 結論..........................................................21

參考文獻..............................................................22

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