臺灣博碩士論文加值系統

本研究使用快速電動圖紋法(Rapid Electrokinetic Patterning, REP)進行微粒的操控與速度分析，粒子的部分使用聚苯乙烯微粒直徑3, 6, 11及20 μm與紅血球直徑約6~9 μm進行實驗。微流體晶片製作部分，上下基板使用ITO導電玻璃，微流道部分使用光學膠帶厚度為100 μm，聚苯乙烯微粒使用DI-water作為溶液，紅血球則使用生理食鹽水作為溶液。首先利用多重物理量耦合軟體(COMSOL Multiphysics )模擬微流體晶片上之溫度梯度、電場強度、介電泳力、熱泳力及粒子速度等。實驗結果顯示晶片受到近紅外光雷射(波長1064 nm)照射後會產生1 °C的溫度變化，而粒子於不同的雷射強度下在微流道內會受到對應不同的環形流場影響往雷射點中心移動將其範圍定義為環形流場(toroidal flow)，而粒子聚集的位置與雷射強度有關，將其定義為聚集範圍(cluster range)。實驗聚苯乙烯微粒電壓設為20, 25及35 Vpp，紅血球電壓設為10 Vpp，頻率均為25 kHz，雷射功率從25~125 W/cm^2，結果顯示其環形流場的影響範圍隨著雷射功率的增強而變大，聚集範圍則隨著功率的增強而變小，微粒的移動速度也隨著功率的增強而加快。聚苯乙烯微粒直徑3及11 μm分選實驗，透過電壓設為35 Vpp及10 Vpp可分別操控11 μm及3 μm的粒子往雷射點中心移動並收集於聚集區，達到微粒分選的目的。

In this study, Rapid Electrokinetic Patterning (REP) was used for particle manipulation and velocity analysis. The particles were tested by using polystyrene particles with diameters of 3, 6, 11 and 20 μm, together with erythrocytes which diameter is about 6 to 9 μm. The microfluidic chip is composed of ITO conductive glass made upper and lower substrates, and the microchannel using an optical tape having a depth of 100 μm; polystyrene particles use DI-water as the solution, while erythrocyte uses physiological saline. First of all, COMSOL Multiphysics are utilized to simulate the temperature gradient, electric field strength, dielectrophoresis, thermophoresis and particle velocity on the microfluidic chip. The experimental result shows that when the chip is exposed to a near-infrared laser (wavelength 1064 nm), there will be an about 1°C temperature change. While particles under different laser intensities will be affected by different toroidal flow in the microfluidic channel and then move to the center of the laser point, this range is defined as toroidal flow. On the other hand, the range of particle aggregation is related to the intensity of the laser and is defined as cluster range. The experimental polystyrene particle voltage is set to 20, 25 and 35 Vpp, and the erythrocyte voltage is set to 10 Vpp, the frequency is 25 kHz, and the laser power ranges from 25 to 125 W/cm^2. The results show that as laser power increase, the influence range of toroidal flow increase and the cluster range is decrease; the moving velocity of particle is also accelerated with the increase of power. Regarding the diameter of 3 and 11 μm polystyrene particle sorting experiment, by setting up the voltage to 35 Vpp and 10 Vpp, respectively. The 11 μm and 3 μm particles can be manipulated to the center of the laser point and collected in the cluster range to achieve the purpose of particle sorting.

摘要............................................................ i
Abstract.......................................................ii
誌謝...........................................................iii
目錄...........................................................iv
表目錄.........................................................vii
圖目錄.........................................................viii
符號說明........................................................xii
第一章 緒論.....................................................1
1.1 前言.....................................................1
1.2 研究動機與目的............................................1
1.3 文獻回顧..................................................2
1.3.1介電泳(Dielectrophoresis)....................................2
1.3.2光介電泳(Optically-induced dielectrophoretic technology).....4
1.3.3快速電動圖紋法(Rapid Electrokinetic Patterning, REP)..........5
1.4 論文架構..................................................7
第二章 系統介紹..................................................8
2.1 系統設備..................................................8
2.2 晶片材料及粒子溶液........................................15
第三章 光電動力學...............................................20
3.1 電泳(Electrophoresis)...................................20
3.2 電偶極(Dipole)..........................................21
3.3 介電泳(Dielectrophoresis, DEP)..........................23
3.4 電滲流(Electroosmosis flow, EOF) ........................25
3.5 交流電熱(AC Electrothermal, ACET).......................25
3.6 熱泳(Thermophoresis)....................................26
第四章 數值分析與晶片設計.......................................28
4.1 模型建模 ................................................29
4.2 溫度梯度 ................................................30
4.3 電場梯度 ................................................31
4.4 電滲流..................................................32
4.5 環形流場..................................................33
4.6 介電泳力..................................................33
4.7 熱泳力..................................................35
4.8 拖曳力..................................................36
4.9 聚集力..................................................37
4.10 粒子速度..................................................38
4.11 晶片設計與架構.............................................39
第五章 實驗結果與討論..............................................41
5.1 粒子受力分析..................................................41
5.2 晶片溫度 ..................................................42
5.3 聚苯乙烯微粒操控範圍與速度...................................43
5.3.1聚苯乙烯微粒3 μm實驗及其操控範圍與速度...........................43
5.3.2聚苯乙烯微粒6 μm實驗及其操控範圍與速度.............................46
5.3.3聚苯乙烯微粒11 μm實驗及其操控範圍與速度............................49
5.4 聚苯乙烯微粒不同尺寸對各頻率的作用區間........................52
5.4.1粒子尺寸對頻率的影響................................................52
5.4.2粒子尺寸對環形流場和速度的影響........................................53
5.5 聚苯乙烯微粒分選3 μm與11 μm........................................55
5.6 紅血球細胞操控範圍與速度........................................57
第六章 結論與未來展望................................................60
6.1 結論........................................................60
6.2 未來展望........................................................61
參考文獻...............................................................62
Extended Abstract........................................................68

[1]J. Kimbrough et al., "Deposition and alignment of carbon nanotubes with dielectrophoresis for fabrication of carbon nanotube field-effect transistors," 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Hangzhou, pp. 308-311, 2018.
[2]R. Manczak et al., "High-frequency dielectrophoresis characterization of differntiated vs undifferentiated medulloblastoma cells," 2018 EMF-Med 1st World Conference on Biomedical Applications of Electromagnetic Fields (EMF-Med), Split, pp. 1-2, 2018.
[3]T. Provent et al., "Ultra-high frequencies continuous biological cell sorting based on repulsive and low dielectrophoresis forces," 2019 IEEE MTT-S International Microwave Symposium (IMS), Boston, MA, USA, pp. 224-227, 2019.
[4]F. D. Gudagunti, L. Velmanickam, D. Nawarathna and I. T. Lima, "Biosensor for pancreatic cancer biomarker based on dielectrophoresis and image processing," 2018 IEEE Research and Applications of Photonics In Defense Conference (RAPID), Miramar Beach, FL, pp. 1-2, 2018.
[5]X. Du, X. Ma, H. Li, Y. Ning, X. Cheng and J. C. M. Hwang, "Validation of clausius-mossotti function in single-cell dielectrophoresis," 2018 IEEE International Microwave Biomedical Conference (IMBioC), Philadelphia, PA, pp. 94-96, 2018.
[6]B. Y. Teoh, P. F. Lee, Y. L. Thong and Y. M. Lim, "Design of dc-dielectrophoresis microfluidic channel for particle and biological cell Separation using 3d printed PVA material," 2018 IEEE-EMBS Conference on Biomedical Engineering and Sciences (IECBES), Sarawak, Malaysia, pp. 566-570, 2018.
[7]C. H. Chiou, L. J. Chien"Nanoconstriction-based electrodeless dielectrophoresis chip for nanoparticle and protein preconcentration,"Applied Physis Express, vol. 8 , pp.8, 2015.
[8]D. Miura, Y. Taguchi and Y. Nagasaka, "Nanoparticle sorting technique using laser induced dielectrophoresis with phase modulated interference," 2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), pp. 100-101, 2019.
[9]P. Y. Chiou, A. T. Ohta and M. C. Wu,"Massively parellel manipulation of Single cells and microparticles using optical images," Nature,vol.436, pp.370-372, 2005.
[10]Z. Yong, S. Hu and Q. Wang,"Study on the assembly and separation of biological cell by optically induced dielectrophoretic technology,"Microfluidics and Nanofluidics, vol.17,pp. 287-294, 2014.
[11]A. Kumar, S. J. Williams and S. T. Wereley,"Experiments on opto-electrically generated microfluidic vortices,"Microfluidics and Nanofluidics, vol.6, pp.637-646, 2008.
[12]A. Kumar, J. S. Kwon,S. J. Williams, N. G. Green,N. K. Yip and S. T. Wereley,"Optically modulated electrokinetic manipulation and concentration of colloidal particles near an electrode surface,"Langmuir:the ACS journal of surfaces and colloids, vol.26, pp.5262-5272, 2010.
[13]J. C. Wang, H. Y. Ku,Y. S. Chen and H. S. Chuang ,"Detection of low-abundance biomarker lipocalin 1 for diabetic retinopathy using optoelectrokinetic bead-based immunosensing,"Biosens Bioelectron, vol.89, pp.701-709, 2017.
[14]M. R. Buyong et al., "Tapered dielectrophoresis microelectrodes: device, operation, and application," 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), Genting Highland, Pahang, Malaysia, pp. 172-175, 2019.
[15]A. A. Ali, W. Waheed, F. Alhammadi, E. Abu-Nada and A. Alazzam, "A dielectrophoresis based microdevice for separation of cancer cells from blood cells," 2019 IEEE International Conference on Sensors and Nanotechnology, Penang, Malaysia, pp. 1-4, 2019.
[16]V. Shirmohammadli and N. Manavizadeh, "Application of differential electrodes in a dielectrophoresis-based device for cell separation," in IEEE Transactions on Electron Devices, vol. 66, no. 9, pp. 4075-4080, Sept. 2019.
[17]F. Alhammadi, W. Waheed, B. E. Khasawneh and A. Alazzam,"Mathematical model and verification of electric field and dielectrophoresis in a microfluidic device," 2018 Advances in Science and Engineering Technology International Conferences (ASET), Abu Dhabi, pp. 1-5, 2018.
[18]Z. Huan, W. M. Xie, H.Yang and X. Li,"Automated cell manipulation through 3D bio-scaffold via dielectrophoresis*," 2018 13th World Congress on Intelligent Control and Automation (WCICA), Changsha, China, pp.49-52, 2018.
[19]Y. H. Lin and G. B. Lee,"An optically induced cell lysis device using dielectrophoresis," Applied Physics Letters, vol. 94, pp. 03391, 2009.
[20]W. Wang, Y. H. Lin, R. S. Guan, T. C. Wen, T. F. Guo and G. B. Lee,"Bulk-heterojunction polymers in optically-induced dielectrophoretic devices for the manipulation of microparticle," Optics Express 17603, vol. 17, pp. 17603-17613, 2009.
[21]Y. H. Lin, K. S. Ho, C. T. Yang, J. H. Wang and C. S. Lai,"A highly flexible platform for nanowire sensor assembly using a combination of optically induced and conventional dielectrophoresis," Optics Express, vol. 22, pp. 13812-13824, 2014.
[22]N. Liu et al., "Automated parallel electrical characterization of cells using optically-induced dielectrophoresis," in IEEE Transactions on Automation Science and Engineering, vol. 17, no. 2, pp. 1084-1092, April 2020.
[23]Y. H. Lin, C. M. Chang and G. B. Lee,"A new platform for manipulating a single DNA molecule by using opticallay-induced dielectrophoresis," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, CO, pp. 1590-1593, 2009.
[24]L. Miccio, V. Marchesano, M. Mugnano, S. Grilli and P. Ferraro,"Light induced DEP for immobilizing and orienting escherichia coli bacteria," Optics and Lasers in Engineering,vol. 76,pp.34-39, 2016.
[25]H. H. Chen et al,"High-purity separation of cancer cells by optically induced dielectrophoresis, "Journal of biomedical optics,vol.19,2019.
[26]H. A. Phol,"The motion and precipitation of suspensoids in divergent electric fields,"J. Applied Physics, vol. 22, No. 7, pp. 869-871, 1978.
[27]C. F. Chou,"Nanofluidic pre-concentration device for enhancing the detection sensitivity and selectivity of biomarkers for human performance monitoring," Asian Office of Aerospace Research and Development, Academia Sinica, Taiwan, 2012.
[28]Y. H. Su et al.,"Quantitative dielectrophoretic tracking for characterization and separation of persistent subpopulations of Cryptosporidium parvum,"Analyst, vol. 139, pp.66-73, 2014.
[29]N. A. Azzam, B. Mathew and W. Waheed,"A microfluidic device with penetrating microelectrode array for focusing of cells using dielectrophoresis," 2019 Advances in Science and Engineering Technology International Conferences (ASET), Dubai, United Arab Emirates, pp. 1-4, 2019,.
[30]P. Y. Chiou, A. T. Ohta and M. C. Wu," Massively parallel manipulation of single cells and microparticles using optical images," Nature, vol. 436, pp.370-372, 2005.
[31]W. Wang, Y. H. Lin, T. C. Wen, T. F. Guo and G. B. Lee,"Selective manipulation of microparticles using polymer-based optically induced dielectrophoretic devices," Applied Physics Letters, vol. 96, pp. 113302, 2010.
[32]Y. Liu, C. Wu, H. S. S. Lai, Y. T. Liu, W. J. Li and Y. J. Shen,"Three-dimensional calcium alginate hydrogel assembly via TiOPc-based light-induced controllable electrodeposition," Micromachines , vol. 8, pp. 192, 2017.
[33]S. J. Williams, A. Kumar and S. T. Wereley,"Electrokinetic patterning of colloidal particles with optical landscapes," Lab on a Chip , vol.8, pp.1879-1882, 2008.
[34]K. C. Wang, A. Kumar, S. J. Williams, N. G. Green, K. C. Kim and H. S. Chuang,"An optoelectrokinetic technique for programmable particle manipulation and bead-based biosignal enhancement," Lab on a Chip, vol.14, pp. 3958-3967,2014.
[35]H. S. Chuang, H. N. Lin and J. Y. Wang,"Fluorescent immunosensing enhanced with a bead-based optoelectrokinetic platform," 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Bangkok, Thailand, pp. 130-134, 2019.
[36]Z. Chen, D. T. Burke and M. A. Burns,"Imaging cross-section of DNA electrophoresis in a microfabricated glass device with CLSM," 2006 International Conference of the IEEE Engineering in Medicine and Biology Society, New York, pp. 4307-4309, 2006.
[37]J. Fan et al,"Studies on polymer capped quantum dots and peptide self-assembly using fluorescence coupled capillary electrophoresis,"2016 IEEE International Nanoelectronics Conference (INEC), Chengdu, pp. 1-2, 2016.
[38]S. Colak, T. F. Wang, A. H. Serbest,"UWB dipole array with equally spaced elements of different lengths," 2007 IEEE International Conference on Ultra-Wideband, Singapore, pp. 789-793, 2007.
[39]H. Zhang and F. S. Zhang,"Circularly polarized crossed dipole with magnetoelectric dipole for wideband and broadbeam applications," 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference (CSQRWC), Xuzhou, pp. 1-3, 2018.
[40]S. X. Ta and I. Park,"Crossed dipole loaded with magneto-electric dipole for wideband and wide-beam circularly polarized radiation," in IEEE Antennas and Wireless Propagation Letters, vol. 14, pp. 358-361, 2015.
[41]L. Huang, P. Zhao, J. Wu, H. S. Chuang and W. Wang,"On-demand dielectrophoretic immobilization and high-resolution imaging of C. elegans in microfluids,"Sensor, vol. B259 , pp. 703-708, 2018.
[42]S. Park, D. Capelin, G. Piriatinskiy, T. Lotan and G. Yossifon,"Dielectrophoretic characterization andisolation of jellyfish stinging capsules,"Electrophoresis, vol. 38, pp. 1996-2003, 2017.
[43]S. C. Lin, Y. C. Tung and C. T. Lin,"A frequency-control particle separation device based on resultant effects of electroosmosis and dielectrophoresis," Applied Physics Letters, vol. 109, pp. 053701, 2016.
[44]G. Merniera, N. Piacentini, R. Tornay, N. Buffi, P. Renaud,"Cell viability assessment by flow cytometry using yeast as cell model,"Sensor and Actuators B, vol. 154, pp. 160-163, 2012.
[45]M. Cha, J. Yoo and J. Lee,"Bacterial cell manipulation by dielectrophoresis on a hydrophobic guide structure," Electrochemistry Communications, vol. 13, pp. 600-604, 2011.
[46]P. F. Eng, P. Nithiarasu, A. K. Arnold, P. Igic and O. J. Guy,"Electro-osmotic flow based cooling system for microprocessors," 2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime2007, London, pp. 1-5, 2007.
[47]S. M. Yang, P. T. Harishchandra, T. M. Yu, M. H. Liu, L. Hsu and C. H. Liu,"Concentration of magnetic beads utilizing light-induced electro-osmosis flow," in IEEE Transactions on Magnetics, vol. 47, no. 10, pp. 2418-2421, Oct.2011.
[48]T. Adam,P. L. Leow, P. S. Chee and K. L. Foo,"Fabrication of PDMS multi-layer microstructure: The electroosmosis mechanism in fluidics for life sciences," 2012 International Conference on Enabling Science and Nanotechnology, Johor Bahru , pp. 1-4, 2012.
[49]A. Salari, M. Navi, T. Lijnse and C. Dalton,"AC Electrothermal effect in microfluidics:AReview," Micromachines, vol.10, pp.762, 2019.
[50]H. Matsui et al,"Minute-particle reduction by applying thermophoresis to semiconductor production equipment," 2008 International Symposium on Semiconductor Manufacturing (ISSM), pp. 365-368,Tokyo.Japan, 2008.
[51]Y. Lamhot, O. Peleg and M. Segev,"Hot particle solitons: Self-trapped beams based on thermophoresis in complex fluids," CLEO/QELS: 2010 Laser Science to Photonic Applications, San Jose, CA, pp.1-2, 2010.
[52]T. Tsuji, K. Kozai, H. Ishino, S. Kawano,"Direct observations of thermophoresis in microfluidic systems," in Micro & Nano Letters, vol.12, no.8, pp.520-525, 2017.
[53]J. Chem, M. Zupkauskas, R. Lamboll, Y. Lan and E. Eiser,"Colloidal motion under the action of a thermophoretic force", Phys, vol. 147, pp. 9 , 2017.
[54]L. H. Yu and Y. F. Chen,"Optical thermophoresis for the manipulation and detection of biomolecules," 2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications, San Jose, CA, pp. 1-2, 2014.
[55]O. Jovanovic,"Photophoresis—light induced motion of particles suspended in gas," Journal of Quantitative Spectroscopy and Radiative Transfer, vol.110, pp.889-901, 2009.
[56]D. Kim, J. Shim, H.S. Chuang and K.C. Kim,"Numerical simulation on the opto-electro-kinetic patterning for rapid concentration of particles in a microchannel ,"Biomicrofluidics, vol. 9, 2015.
[57]A. Kumar, C. Cierpka, S. J. Williams, C. J. Kashler and S. T. Wereley,"3D3C velocimetry measurements of an electrothermal microvortex using wavefront deformation PTV and a single camera," Microfluid Nanofluid, vol. 10, pp. 355–365, 2011.
[58]C. H. Chiou, J. L. Lin, L. J. Chien, Y. Y. Lin, and J. C. Pan, “Characterization of Microparticle Separation Utilizing Electrokinesis within an Electrodeless Dielectrophoresis Chip.” Sensors, vol. 13, pp. 2763-2776, 2013.